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公开(公告)号:US20200248310A1
公开(公告)日:2020-08-06
申请号:US16635042
申请日:2018-08-17
Applicant: FUJIKIN INCORPORATED
Inventor: Kenji AIKAWA , Kazunari WATANABE , Toshiyuki INADA , Tsutomu SHINOHARA
IPC: C23C16/455 , F16K27/00 , F16L55/11 , F16J13/06
Abstract: A joint block includes a block body, a closing member mounted in a recessed part formed on the other end side of the block body, a seal mechanism that includes a circular projection formed on an opposing surface of the block body, and seals an area between the block body and the closing member by the circular projection biting into the other opposing surface around an opening of a first flow path, a swaging part that is formed on the block body and presses the closing member toward the opposing surface, and an engaging part formed by an inner peripheral part of the recessed part and an outer peripheral part of the closing member that engages with the inner peripheral part. A pressing force that presses the circular projection of the seal mechanism against the other opposing surface is shared by the swaging part and the engaging part.
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公开(公告)号:US20210388919A1
公开(公告)日:2021-12-16
申请号:US17286991
申请日:2019-10-21
Applicant: FUJIKIN INCORPORATED
Inventor: Takahiro MATSUDA , Kenji AIKAWA , Akihiro HARADA , Kazunari WATANABE , Tomohiro NAKATA , Tsutomu SHINOHARA
IPC: F16K31/50 , F16K27/00 , F16K7/14 , F16K31/122
Abstract: A valve device includes: a valve body which is accommodated in an accommodation recess having a circular cross-sectional shape, and has a first port and a second port in a bottom surface; and a bonnet nut which has an outer screw portion screwed with an inner screw portion formed on an inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has an outer peripheral surface portion fitted to an inner peripheral surface portion of the accommodation recess of the flow path block. A convex portion for defining an orientation of the valve body about an axis with respect to the flow path block is formed on the outer peripheral surface portion.
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公开(公告)号:US20190162323A1
公开(公告)日:2019-05-30
申请号:US16312060
申请日:2017-06-19
Applicant: FUJIKIN INCORPORATED
Inventor: Kenji AIKAWA , Tsutomu SHINOHARA , Hajime NAKAGAWA , Takahiro MATSUDA , Akihiro HARADA
Abstract: A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.
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公开(公告)号:US20210199205A1
公开(公告)日:2021-07-01
申请号:US16757644
申请日:2018-10-22
Applicant: FUJIKIN INCORPORATED
Inventor: Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.
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公开(公告)号:US20200325887A1
公开(公告)日:2020-10-15
申请号:US16757939
申请日:2018-10-22
Applicant: FUJIKIN INCORPORATED
Inventor: Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
IPC: F04B43/02
Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.
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公开(公告)号:US20200018736A1
公开(公告)日:2020-01-16
申请号:US16334848
申请日:2017-09-27
Applicant: FUJIKIN INCORPORATED
Inventor: Masaaki NAGASE , Kenji AIKAWA , Kaoru HIRATA , Takahiro IMAI , Tetsuo NARITOMI , Tsutomu SHINOHARA , Takahiro MATSUDA , Kouji NISHINO
Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.
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公开(公告)号:US20190195378A1
公开(公告)日:2019-06-27
申请号:US16312015
申请日:2017-06-19
Applicant: FUJIKIN INCORPORATED
Inventor: Kenji AIKAWA , Tsutomu SHINOHARA , Hajime NAKAGAWA , Takahiro MATSUDA , Akihiro HARADA
Abstract: A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.
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公开(公告)号:US20220186845A1
公开(公告)日:2022-06-16
申请号:US17425424
申请日:2020-01-21
Applicant: FUJIKIN INCORPORATED
Inventor: Toshiyuki INADA , Kazunari WATANABE , Kenji AIKAWA , Kohei SHIGYOU , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.
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公开(公告)号:US20210396326A1
公开(公告)日:2021-12-23
申请号:US17289831
申请日:2019-10-18
Applicant: FUJIKIN INCORPORATED
Inventor: Kenji AIKAWA , Tomohiro NAKATA , Toshiyuki INADA , Akihiro HARADA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A fluid control device comprises includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.
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10.
公开(公告)号:US20200278049A1
公开(公告)日:2020-09-03
申请号:US16764134
申请日:2018-11-13
Applicant: FUJIKIN INCORPORATED
Inventor: Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.
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