JOINT BLOCK AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20200248310A1

    公开(公告)日:2020-08-06

    申请号:US16635042

    申请日:2018-08-17

    Abstract: A joint block includes a block body, a closing member mounted in a recessed part formed on the other end side of the block body, a seal mechanism that includes a circular projection formed on an opposing surface of the block body, and seals an area between the block body and the closing member by the circular projection biting into the other opposing surface around an opening of a first flow path, a swaging part that is formed on the block body and presses the closing member toward the opposing surface, and an engaging part formed by an inner peripheral part of the recessed part and an outer peripheral part of the closing member that engages with the inner peripheral part. A pressing force that presses the circular projection of the seal mechanism against the other opposing surface is shared by the swaging part and the engaging part.

    VALVE DEVICE AND GAS SUPPLY SYSTEMS

    公开(公告)号:US20210388919A1

    公开(公告)日:2021-12-16

    申请号:US17286991

    申请日:2019-10-21

    Abstract: A valve device includes: a valve body which is accommodated in an accommodation recess having a circular cross-sectional shape, and has a first port and a second port in a bottom surface; and a bonnet nut which has an outer screw portion screwed with an inner screw portion formed on an inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has an outer peripheral surface portion fitted to an inner peripheral surface portion of the accommodation recess of the flow path block. A convex portion for defining an orientation of the valve body about an axis with respect to the flow path block is formed on the outer peripheral surface portion.

    FLUID CONTROL SYSTEM
    3.
    发明申请

    公开(公告)号:US20190162323A1

    公开(公告)日:2019-05-30

    申请号:US16312060

    申请日:2017-06-19

    Abstract: A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.

    VALVE DEVICE
    4.
    发明申请

    公开(公告)号:US20210199205A1

    公开(公告)日:2021-07-01

    申请号:US16757644

    申请日:2018-10-22

    Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

    VALVE DEVICE
    5.
    发明申请
    VALVE DEVICE 审中-公开

    公开(公告)号:US20200325887A1

    公开(公告)日:2020-10-15

    申请号:US16757939

    申请日:2018-10-22

    Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.

    CONCENTRATION DETECTION METHOD AND PRESSURE-TYPE FLOW RATE CONTROL DEVICE

    公开(公告)号:US20200018736A1

    公开(公告)日:2020-01-16

    申请号:US16334848

    申请日:2017-09-27

    Abstract: A method for detecting the concentration of a specified gas contained in a mixed gas includes, in a pressure-type flow rate control device including a restriction portion, an upstream valve provided upstream of the restriction portion, and a pressure sensor for measuring the pressure between the restriction portion and the upstream valve, a step of flowing the mixed gas from the upstream side of the upstream valve in a state in which the pressure on the downstream side of the restriction portion is lower than the pressure on the upstream side of the restriction portion, a step of determining with a pressure sensor pressure drop characteristics occurring after the upstream valve is changed from an open to a closed state, and a step of determining the concentration of the specified gas in the mixed gas based on the pressure drop characteristics.

    FLUID CONTROL SYSTEM
    7.
    发明申请

    公开(公告)号:US20190195378A1

    公开(公告)日:2019-06-27

    申请号:US16312015

    申请日:2017-06-19

    Abstract: A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.

    FLUID CONTROL DEVICE AND MANUFACTURING METHOD FOR THE FLUID CONTROL DEVICE

    公开(公告)号:US20210396326A1

    公开(公告)日:2021-12-23

    申请号:US17289831

    申请日:2019-10-18

    Abstract: A fluid control device comprises includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

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