公开(公告)号：US20210199205A1

公开(公告)日：2021-07-01

申请号：US16757644

申请日：2018-10-22

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC: F16K7/16 ,  F16K27/02 ,  H01L21/67

Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.

公开(公告)号：US20200325887A1

公开(公告)日：2020-10-15

申请号：US16757939

申请日：2018-10-22

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC: F04B43/02

Abstract: A valve device includes valve elements each having a valve seat, a valve seat support, and a diaphragm provided so as to be able to abut on and separate from the seat surface of the valve seat, the diaphragm making the flow passage of the valve seat and the corresponding secondary flow path communicate through the gap between the diaphragm and the valve seat, and the valve seat support has seal surfaces that cooperate with a part of the inner wall surface of the corresponding accommodation recess to shut off the communication between the corresponding primary flow path and the secondary flow path, and a detour passage that connects the primary flow path and the flow passage of the valve seat, and the valve body defines a communication passage that makes the secondary flow paths communicates with each other.