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公开(公告)号：US20210388914A1
公开(公告)日：2021-12-16
申请号：US17284830
申请日：2019-10-21
Applicant: FUJIKIN INCORPORATED
Inventor： Kenji AIKAWA , Takahiro MATSUDA , Akihiro HARADA , Kazunari WATANABE , Tomohiro NAKATA , Tsutomu SHINOHARA
Abstract: A valve device has a structure more suitable for miniaturization and integration and is used for a semiconductor manufacturing process or the like. A valve device includes: a valve body which is accommodated in an accommodation recess and has a first port and a second port in a bottom surface; and a bonnet nut which has a screw portion formed on an outer periphery thereof and is screwed with the inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has first and second annular protrusions for sealing which are formed around the first port and the second port and protrude from a bottom surface. The first and the second annular protrusions are formed so as to share a part thereof.
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公开(公告)号：US20210132638A1
公开(公告)日：2021-05-06
申请号：US17038459
申请日：2020-09-30
Applicant: FUJIKIN INCORPORATED
Inventor： Kenji AIKAWA , Takahiro MATSUDA , Toshiyuki INADA , Kazunari WATANABE , Yuta MOTEGI , Tomohiro NAKATA , Tsutomu SHINOHARA
Abstract: A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.
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公开(公告)号：US20210131583A1
公开(公告)日：2021-05-06
申请号：US17038440
申请日：2020-09-30
Applicant: FUJIKIN INCORPORATED
Inventor： Takahiro MATSUDA , Kenji AIKAWA , Toshiyuki INADA , Kazunari WATANABE , Yuta MOTEGI , Tomohiro NAKATA , Tsutomu SHINOHARA
IPC: F16K31/126 , F16K11/02
Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.
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公开(公告)号：US20200340591A1
公开(公告)日：2020-10-29
申请号：US16757172
申请日：2018-10-24
Applicant: FUJIKIN INCORPORATED
Inventor： Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.
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公开(公告)号：US20200149639A1
公开(公告)日：2020-05-14
申请号：US16625875
申请日：2018-06-12
Applicant: FUJIKIN INCORPORATED
Inventor： Kenji AIKAWA , Tsutomu SHINOHARA , Takahiro MATSUDA
Abstract: To provide a gas-driven type valve device that is capable of mounting various electronic devices, and includes a power generation function that solves problems involving wiring or battery replacement. The problem is solved by a valve device including an actuator including a housing part, and a movable part housed in the housing part and driven by a driving fluid to move a valve element in a closing direction or an opening direction, a spring member that presses the movable part in a direction against a driving force of the driving fluid, and a power-generating and vibration-damping unit including that uses a piezoelectric effect of a piezoelectric element to exercise a power generation function of converting a vibration generated in a vibration system by an activation of the actuator into electric power, and a vibration-damping function of suppressing a vibration applied to a device.
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Patent Agency Ranking
公开(公告)号：US20160341332A1
公开(公告)日：2016-11-24
申请号：US15112845
申请日：2015-02-06
Applicant: FUJIKIN INCORPORATED
Inventor： Yusuke IWANAGA , Hidenobu SATO , Takahiro MATSUDA
Abstract: Provided is a cap for a handwheel that opens and closes a valve, capable of being readily attached to the handwheel without requiring a large space around the handwheel. The cap has easily switchable two working modes: One is a co-rotation mode where the cap is capable of rotating with the handwheel and the other is an independent rotation mode where the cap is capable of rotating independently of the handwheel. The cap has an internal casing to be securely fitted to the handwheel; an external casing being rotatable around its axis and having the internal casing in an interior thereof; a clutch for connecting the external casing with the internal casing and for disconnecting the former from the latter; and a maintaining member for keeping the external casing rotatable independently of the internal casing when they are disconnected by the clutch.
Abstract translation: 提供了一种用于打开和关闭阀的手轮盖，其能够容易地附接到手轮而不需要在手轮周围的大的空间。 盖子具有易于切换的两种工作模式：一种是共同旋转模式，其中盖子能够用手轮旋转，另一种是独立的旋转模式，其中盖子能够独立于手轮旋转。 盖子具有牢固地安装在手轮上的内部壳体; 外壳可围绕其轴线旋转并且在其内部具有内壳; 用于将外壳与内壳连接并将前者与后者分离的离合器; 以及保持构件，用于保持外壳在通过离合器断开时能够独立于内部壳体旋转。
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公开(公告)号：US20240242976A1
公开(公告)日：2024-07-18
申请号：US18279712
申请日：2022-03-04
Applicant: Tokyo Electron Limited , FUJIKIN INCORPORATED
Inventor： Jun HIROSE , Atsushi SAWACHI , Takahiro MATSUDA , Kazunari WATANABE , Kohei SHIGYOU , Taiki HOSHIKO
IPC: H01L21/67
CPC classification number: H01L21/67017
Abstract: A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.
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公开(公告)号：US20180372130A1
公开(公告)日：2018-12-27
申请号：US16047482
申请日：2018-07-27
Applicant: FUJIKIN INCORPORATED , KOKUSAI ELECTRIC CORPORATION
Inventor： Masahiko OCHIISHI , Takahiro MATSUDA , Hiroshi UNAMI , Yuji SAIKI
Abstract: A fluid control apparatus includes a gas line unit detachably attached to a frame. The gas line unit includes a line support member to which a fluid control device is attached. The frame includes: a first horizontal frame member; and a second horizontal frame member located below the first horizontal frame member. The first horizontal frame member includes: a hooking member extending in a left-right direction; and a lower portion which is located below the hooking member and in which a plurality of first grooves that are open to front are formed. The line support member includes: a device placement portion; and a pair of side plate portions protruding rearward from right and left edges of the device placement portion. Each of the side plate portions includes: a base portion located below the hooking member; and an upper portion located above the base portion and behind the hooking member.
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公开(公告)号：US20220186845A1
公开(公告)日：2022-06-16
申请号：US17425424
申请日：2020-01-21
Applicant: FUJIKIN INCORPORATED
Inventor： Toshiyuki INADA , Kazunari WATANABE , Kenji AIKAWA , Kohei SHIGYOU , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.
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公开(公告)号：US20210396326A1
公开(公告)日：2021-12-23
申请号：US17289831
申请日：2019-10-18
Applicant: FUJIKIN INCORPORATED
Inventor： Kenji AIKAWA , Tomohiro NAKATA , Toshiyuki INADA , Akihiro HARADA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A fluid control device comprises includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.
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