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公开(公告)号：US20240229941A1
公开(公告)日：2024-07-11
申请号：US18576172
申请日：2022-06-08
Applicant: FUJIKIN INCORPORATED
Inventor： Kohei SHIGYOU , Takashi HIROSE , Takahiro MATSUDA , Kazunari WATANABE
Abstract: A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.
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公开(公告)号：US20160047483A1
公开(公告)日：2016-02-18
申请号：US14780393
申请日：2014-03-17
Applicant: FUJIKIN INCORPORATED
Inventor： Takashi HIROSE , Michio YAMAJI , Toshihide YOSHIDA , Kohei SHIGYOU
CPC classification number: F16K31/004 , F16K7/14 , F16K25/005 , F16K27/0236 , F16K31/007
Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.
Abstract translation: 用于流量控制器的流量控制阀包括：阀主体，其设置有开口阀室孔，金属隔膜阀元件，具有相互相对的凹口的下支撑筒，安装在下支撑筒上的上支撑筒， 水平地设置在下支撑筒的槽口处的支撑框架，放置在支撑框架和下支撑筒的底部之间的盘簧，设置在支撑框架上的下支架，插入到支撑筒上方的压电元件 下支架，与支撑框架一起固定到阀主体的引导件，其中支撑筒以可垂直移动的方式插入通过引导筒。 通过压电元件的延伸将支撑筒向上压，由此金属隔膜阀元件通过弹性力与阀座分离。
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公开(公告)号：US20220186845A1
公开(公告)日：2022-06-16
申请号：US17425424
申请日：2020-01-21
Applicant: FUJIKIN INCORPORATED
Inventor： Toshiyuki INADA , Kazunari WATANABE , Kenji AIKAWA , Kohei SHIGYOU , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.
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4.发明申请公开(公告)号：US20200278049A1
公开(公告)日：2020-09-03
申请号：US16764134
申请日：2018-11-13
Applicant: FUJIKIN INCORPORATED
Inventor： Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.
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公开(公告)号：US20240242976A1
公开(公告)日：2024-07-18
申请号：US18279712
申请日：2022-03-04
Applicant: Tokyo Electron Limited , FUJIKIN INCORPORATED
Inventor： Jun HIROSE , Atsushi SAWACHI , Takahiro MATSUDA , Kazunari WATANABE , Kohei SHIGYOU , Taiki HOSHIKO
IPC: H01L21/67
CPC classification number: H01L21/67017
Abstract: A gas supply device capable of saving space and supplying a mixed gas having components with stable concentration to a processing chamber in a short time includes: a plurality of fluid control units each including a flow path through which gas flows, and fluid control devices provided in the middle of the flow path; a merging flow path including a plurality of connecting portions fluidly connected to the plurality of fluid control units and a single gas outlet portion which derives the gas introduced through the plurality of connecting portions; wherein a plurality of connecting portions is arranged symmetrically with respect to the gas outlet portion in the flow path direction of the merging flow path, and two or more fluid control units are fluidly connected to each of the plurality of connecting portions.
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Patent Agency Ranking
公开(公告)号：US20220057002A1
公开(公告)日：2022-02-24
申请号：US17275034
申请日：2019-09-03
Applicant: FUJIKIN INCORPORATED
Inventor： Kohei SHIGYOU , Takashi HIROSE
Abstract: A diaphragm valve includes: a valve body having flow paths of fluids formed therein and having a diaphragm-arrangement portion on one surface; a diaphragm arranged in the diaphragm-arrangement portion and can open and close the flow path and adjust the opening degree of by elastic deformation; and a driving unit having a stem for pressing the diaphragm to elastically deform and an actuator for driving the stem, wherein the stem is axially movably held via a resin sleeve by a bonnet fixed to the valve body side.
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7.发明申请公开(公告)号：US20180240961A1
公开(公告)日：2018-08-23
申请号：US15751422
申请日：2016-08-09
Applicant: FUJIKIN INCORPORATED
Inventor： Kohei SHIGYOU , Takashi HIROSE , Kouji NISHINO , Ryousuke DOHI , Naofumi YASUMOTO
Abstract: A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.
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8.发明申请公开(公告)号：US20230003306A1
公开(公告)日：2023-01-05
申请号：US17782769
申请日：2020-12-07
Applicant: FUJIKIN INCORPORATED
Inventor： Kohei SHIGYOU , Takashi HIROSE
Abstract: A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.
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公开(公告)号：US20200370664A1
公开(公告)日：2020-11-26
申请号：US16966270
申请日：2019-02-19
Applicant: FUJIKIN INCORPORATED
Inventor： Kazunari WATANABE , Kohei SHIGYOU , Yohei SAWADA , Tomohiro NAKATA , Tsutomu SHINOHARA
IPC: F16K7/16 , F16K27/02 , H01L21/67 , C23C16/455
Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.
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公开(公告)号：US20200340591A1
公开(公告)日：2020-10-29
申请号：US16757172
申请日：2018-10-24
Applicant: FUJIKIN INCORPORATED
Inventor： Kazunari WATANABE , Kohei SHIGYOU , Kenji AIKAWA , Tomohiro NAKATA , Takahiro MATSUDA , Tsutomu SHINOHARA
Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.
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