公开(公告)号：US6126844A

公开(公告)日：2000-10-03

申请号：US195275

申请日：1998-11-18

Applicant: Gregory Hirsch

Inventor： Gregory Hirsch

IPC: C03C25/68 ,  C23F1/04 ,  G02B6/12 ,  G02B6/26 ,  G21K1/06 ,  C03C25/06

CPC classification number: C03C25/68 ,  C23F1/04 ,  G02B6/262 ,  G21K1/06 ,  G02B2006/12195

Abstract: A glass or metal wire is precisely etched to form the paraboloidal or ellipsoidal shape of the final desired capillary optic. This shape is created by carefully controlling the withdrawal speed of the wire from an etchant bath. In the case of a complete ellipsoidal capillary, the etching operation is performed twice in opposite directions on adjacent wire segments. The etched wire undergoes a subsequent operation to create an extremely smooth surface. This surface is coated with a layer of material which is selected to maximize the reflectivity of the radiation. This reflective surface may be a single layer for wideband reflectivity, or a multilayer coating for optimizing the reflectivity in a narrower wavelength interval. The coated wire is built up with a reinforcing layer, typically by a plating operation. The initial wire is removed by either an etching procedure or mechanical force. Prior to removing the wire, the capillary is typically bonded to a support substrate. One option for attaching the wire to the substrate produces a monolithic structure by essentially burying it under a layer of plating which covers both the wire and the substrate. The capillary optic is used for efficiently collecting and redirecting the divergent radiation from a source which could be the anode of an x-ray tube, a plasma source, the fluorescent radiation from an electron microprobe, or some other source of radiation.

Abstract translation: 精确地蚀刻玻璃或金属丝以形成最终期望的毛细管光学器件的抛物面或椭圆形形状。 这种形状是通过仔细地控制来自蚀刻剂浴的丝线的提取速度而产生的。 在完全椭圆形毛细管的情况下，相邻线段上的相反方向进行两次蚀刻操作。 蚀刻的线经历后续操作以产生非常光滑的表面。 该表面涂覆有一层材料，其被选择为使辐射的反射率最大化。 该反射表面可以是用于宽带反射率的单层或用于在较窄波长间隔内优化反射率的多层涂层。 涂层线材通常通过电镀操作而由增强层构成。 初始线通过蚀刻程序或机械力去除。 在除去电线之前，毛细管通常结合到支撑衬底上。 将导线附接到基板的一个选择通过将其基本上埋在覆盖电线和基板的电镀层下面而产生整体结构。 毛细管光学器件用于有效地收集和重定向来自源的发散辐射，该源可以是X射线管的阳极，等离子体源，来自电子微探针的荧光辐射或其它一些辐射源。

公开(公告)号：US5772903A

公开(公告)日：1998-06-30

申请号：US721871

申请日：1996-09-27

Applicant: Gregory Hirsch

Inventor： Gregory Hirsch

IPC: C03C25/68 ,  C23F1/00 ,  G02B6/10 ,  G02B6/26 ,  G21K1/06 ,  G21K5/02 ,  C03C25/06

CPC classification number: C03C15/00 ,  C03C25/68 ,  G02B6/10 ,  G02B6/262 ,  G21K1/06 ,  G21K2201/068

Abstract: A metal or glass wire is etched with great precision into a very narrowly tapering cone which has the shape of the desired final capillary-optics bore. By controlling the rate of removal of the wire from an etchant bath, a carefully controlled taper is produced. A sensor measures the diameter of the wire as it leaves the surface of the etchant. This signal is used for feedback control of the withdrawal speed. The etched wire undergoes a treatment to produce an extremely low surface-roughness. The etched and smoothed wire is coated with the material of choice for optimizing the reflectivity of the radiation being focused. This could be a vacuum evaporation, sputtering, CVD or aqueous chemical process. The coated wire is either electroplated, built up with electroless plating, or encapsulated in a polymer cylinder such as epoxy to increase the diameter of the wire for easier handling and greater robustness. During this process, the wire is vertically oriented and tensioned to assure that the wire is absolutely straight. The coated and electroformed wire is bonded to a flat, rigid substrate and is then periodically segmented by cutting or etching a series of narrow slits or grooves into the wire. The wire is vertically oriented and tensioned during the bonding process to assure that it is straight. The original wire material is then chemically etched away through the slits or otherwise withdrawn to leave the hollow internal bore of the final tapered-capillary optical element.

Abstract translation: 将金属或玻璃丝以很高的精度蚀刻成具有所需最终毛细孔孔的形状的非常窄的锥形锥体。 通过控制从蚀刻剂浴中除去丝线的速率，产生精心控制的锥度。 传感器测量线材离开蚀刻剂表面时的直径。 该信号用于提取速度的反馈控制。 经蚀刻的线经过处理以产生极低的表面粗糙度。 蚀刻和平滑的线材涂覆有选择的材料，以优化被聚焦的辐射的反射率。 这可以是真空蒸发，溅射，CVD或水性化学过程。 涂覆的电线是电镀的，用无电解电镀构建，或者封装在诸如环氧树脂的聚合物圆筒中以增加电线的直径以便于处理和更强的鲁棒性。 在此过程中，导线垂直取向和张紧，以确保导线绝对直线。 涂覆和电铸线被粘合到平坦的刚性基底上，然后通过将一系列狭窄的狭缝或凹槽切割或蚀刻到线中来周期性地分割。 导线在接合过程中垂直取向和张紧，以确保其是直的。 然后将原始的线材通过狭缝化学蚀刻掉，或以其他方式取出，留下最终的锥形毛细管光学元件的中空内孔。

公开(公告)号：US4829177A

公开(公告)日：1989-05-09

申请号：US94639

申请日：1987-09-09

Applicant: Gregory Hirsch

Inventor： Gregory Hirsch

IPC: G01N23/227 ,  H01J37/285

CPC classification number: G01N23/2273 ,  H01J37/285

Abstract: A point projection photoelectron microscope is disclosed. A specimen is enclosed in a photoconductor that is subject to the photoelectric effect. The specimen is positioned on a pedestal in an evacuated chamber. The specimen is bombarded by radiation, either of light, ultraviolet radiation, or soft x-rays. The is in a vacuum chamber and it is highly charged with a negative potential. The vacuum chamber includes a surface sensitive to electron flow for making an image. This surface is a phosphor screen or an image intensifier having the capability to be gated for imaging or not imaging incident electrons or a segmented electron collecting anode for electronic imaging. In operation, a collimated beam of radiation, ranging from light to soft x-rays is projected through a specimen disposed in the photoemitter. An image of the specimen is produced on the photoemitter. The light or x-ray which impact on the photoemitter which produce electrons by the photoelectric effect. The electrons migrate beyond the photoemitter where the electric field at the tip of the photoconductor radially repels the electrons to and towards the imaging surface, typically the image intensifier.

Abstract translation: 公开了一种投影光电子显微镜。 样品被封装在受光电效应影响的光电导体中。 样品定位在抽真空室中的基座上。 样品被光线，紫外线辐射或软X射线照射。 它在真空室中，并且具有高电荷负电位。 真空室包括对电子流敏感的表面，用于制作图像。 该表面是具有用于成像或不成像入射电子的能力的荧光屏或图像增强器或用于电子成像的分段电子收集阳极。 在操作中，从光到软X射线范围的准直的辐射束通过设置在光发射器中的试样投影。 在光电发生器上产生样品的图像。 影响通过光电效应产生电子的光电转换器的光或X射线。 电子迁移超过光电发射器，其中光电导体尖端处的电场径向地将电子排斥到成像表面并朝向成像表面，通常是图像增强器。