摘要:
For forming a group or rows of nozzles in a substrate of an ink-jet head, firstly, a laser irradiation source and a masking material in which a plurality of holes arranged in two rows are formed, are arranged on an upper side of a position at which one group of rows of nozzles of the substrate is formed. Next, an ultraviolet laser is irradiated from an upper side of the masking material, and a laser which has passed through the masking material is irradiated on the substrate. Two rows of nozzles are formed in a portion of the substrate at which the ultraviolet laser is irradiated. Accordingly, by irradiation of the laser once, it is possible to form a plurality of nozzles arranged in a row.
摘要:
A method of optically coupling one end of an optical fiber to a waveguide formed on a substrate, such that an end portion of the fiber is fitted in a groove formed in the substrate. The groove is formed by forming a beam-shielding mask having a cutout, on the substrate such that the cutout is aligned with a part of the substrate in which the groove is formed, and by irradiating the above-indicated part of the substrate with a high-energy beam. Alternatively, the groove is formed by a cutting tool. An inclined end surface of the groove left uncut by the tool may be irradiated with a high-energy beam, through a beam-shielding mask which has a cutout aligned with the inclined end surface. The end of the optical fiber, which has a flat face or has a coned or hemi-spherical shape, is positioned for optical coupling with a portion of the waveguide which is exposed to the groove.