Method of optically coupling optical fiber to waveguide on substrate,
and optical device produced by the method
    12.
    发明授权
    Method of optically coupling optical fiber to waveguide on substrate, and optical device produced by the method 失效
    将光纤耦合到基板上的波导的方法以及通过该方法制造的光学器件的方法

    公开(公告)号:US5018817A

    公开(公告)日:1991-05-28

    申请号:US447421

    申请日:1989-12-07

    摘要: A method of optically coupling one end of an optical fiber to a waveguide formed on a substrate, such that an end portion of the fiber is fitted in a groove formed in the substrate. The groove is formed by forming a beam-shielding mask having a cutout, on the substrate such that the cutout is aligned with a part of the substrate in which the groove is formed, and by irradiating the above-indicated part of the substrate with a high-energy beam. Alternatively, the groove is formed by a cutting tool. An inclined end surface of the groove left uncut by the tool may be irradiated with a high-energy beam, through a beam-shielding mask which has a cutout aligned with the inclined end surface. The end of the optical fiber, which has a flat face or has a coned or hemi-spherical shape, is positioned for optical coupling with a portion of the waveguide which is exposed to the groove.

    摘要翻译: 将光纤的一端光学耦合到形成在基板上的波导的方法,使得光纤的端部装配在形成在基板中的凹槽中。 通过在基板上形成具有切口的光束屏蔽掩模,使得切口与形成有凹槽的基板的一部分对准,并且通过用基板的上述部分照射来形成凹槽 高能束。 或者,槽由切削工具形成。 通过工具未切割的槽的倾斜端面可以通过具有与倾斜端面对准的切口的束屏蔽掩模用高能束照射。 具有平面或具有锥形或半球形形状的光纤的端部定位成与暴露于凹槽的波导的一部分进行光学耦合。