Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof
    12.
    发明授权
    Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereof 有权
    纳米精度六自由度磁悬浮微动平台及其应用

    公开(公告)号:US08599361B2

    公开(公告)日:2013-12-03

    申请号:US13635168

    申请日:2011-03-15

    CPC分类号: G03F7/70758 G03F7/70716

    摘要: A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

    摘要翻译: 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。

    NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF
    14.
    发明申请
    NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF 有权
    NANOMETER-PRECISION六自由度磁悬浮微运动表及其应用

    公开(公告)号:US20130038853A1

    公开(公告)日:2013-02-14

    申请号:US13635168

    申请日:2011-03-15

    IPC分类号: H02K41/02 G03B27/58

    CPC分类号: G03F7/70758 G03F7/70716

    摘要: A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.

    摘要翻译: 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。

    House structure with expandable function

    公开(公告)号:US11512486B2

    公开(公告)日:2022-11-29

    申请号:US16904591

    申请日:2020-06-18

    摘要: The invention discloses a house structure with expandable function, comprising a house body (20), wherein an elevator shaft (21) is provided in the house body (20), and a carrying elevator (22) is provided in the elevator shaft (21); a multifunctional balcony (23) is further provided on both sides of the elevator shaft (21), and the multifunctional balcony (23) and the elevator shaft (21) are connected via a landing door (24); the car of the carrying elevator (22) is provided with a car front door, a car left door and a car right door, respectively; a multifunctional cabin (1) can be detachably connected to an automatic carrying system (35) capable of autonomous driving. The house structure provided by the invention can take into account the owner's demand for various aspects of the house, and improves the functionality of the house.

    Automatic charging system for intelligent driving electric vehicles and charging method thereof

    公开(公告)号:US11511641B2

    公开(公告)日:2022-11-29

    申请号:US16836963

    申请日:2020-04-01

    申请人: Ming Zhang

    发明人: Ming Zhang

    摘要: An automatic charging system for intelligent driving electric vehicles and charging method thereof, comprising a vehicle-mounted terminal and a charging terminal; the vehicle-mounted terminal comprises a battery module, which is communicatively connected to a battery management system, and the battery module is electrically connected to a power receiving controller; the battery management system is connected to a vehicle control unit via a vehicle-mounted communication unit, the vehicle control unit is connected to an unmanned system, and the power receiving controller is electrically connected to a receiving coil; the charging terminal comprises a charging management system, which is respectively connected to the vehicle-mounted communication unit and a charging communication unit that is communicatively connected to a power transmitting controller, and the power transmitting controller is electrically connected to a transmitting coil. The invention realizes the flexibility and rapidization of charging, improves charging efficiency, and saves charging pile resource.

    UNMANNED VENDING VEHICLE SYSTEM AND METHOD OF USE THEREOF

    公开(公告)号:US20200339025A1

    公开(公告)日:2020-10-29

    申请号:US16530950

    申请日:2019-08-02

    申请人: Chuan Yu Ming Zhang

    发明人: Chuan Yu Ming Zhang

    摘要: The invention discloses an unmanned vending vehicle system, comprising an order module and a remote scheduling module, wherein both the order module and the remote scheduling module are communicated and connected to the vehicle-mounted terminal via a server; the vehicle-mounted terminal comprises a vehicle management system disposed on the chassis and a commodity management system disposed on the vehicle body, and the chassis is detachably connected to the vehicle body; the vehicle management system comprises an automatic driving module; the commodity management system comprises a commodity throughput module and an access module; the automatic driving module comprises an IPC (Industrial Personal Computer), a laser radar; and a GPS module. The invention has the characteristics of saving labor power, improving freight efficiency, enhancing expansibility and saving resources.

    UNMANNED-DRIVE MOBILE MULTIFUNCTIONAL VEHICLE SYSTEM AND USING METHOD THEREOF

    公开(公告)号:US20200333802A1

    公开(公告)日:2020-10-22

    申请号:US16836961

    申请日:2020-04-01

    申请人: Ming Zhang Chuan Yu

    发明人: Ming Zhang Chuan Yu

    IPC分类号: G05D1/02 G05D1/00 G06Q10/10

    摘要: The invention disclosures an unmanned-drive mobile multifunctional vehicle system and using method thereof, comprising a server (1) connected with a remote scheduling module (2) and vehicle terminal respectively; the vehicle terminal comprises chassis and vehicle body, the chassis and the vehicle body are detachably connected; the chassis is provided with a chassis management system (3), the vehicle body is provided with a vehicle body separation system (4); the chassis management system (3) comprises an autopilot module (31) and a chassis wireless communication module (32); the vehicle body separation system (4) comprises a separation execution module (41) and a vehicle body wireless communication module (42); the autopilot module (31) comprises an Industrial Personal Computer (311), a laser radar (312), and a GPS module (313). The invention has advantages of saving manpower, good expansibility and saving resources.

    AUTOMATIC CHARGING SYSTEM FOR INTELLIGENT DRIVING ELECTRIC VEHICLES AND CHARGING METHOD THEREOF

    公开(公告)号:US20200317078A1

    公开(公告)日:2020-10-08

    申请号:US16836963

    申请日:2020-04-01

    申请人: Ming Zhang

    发明人: Ming Zhang

    摘要: An automatic charging system for intelligent driving electric vehicles and charging method thereof, comprising a vehicle-mounted terminal and a charging terminal; the vehicle-mounted terminal comprises a battery module, which is communicatively connected to a battery management system, and the battery module is electrically connected to a power receiving controller; the battery management system is connected to a vehicle control unit via a vehicle-mounted communication unit, the vehicle control unit is connected to an unmanned system, and the power receiving controller is electrically connected to a receiving coil; the charging terminal comprises a charging management system, which is respectively connected to the vehicle-mounted communication unit and a charging communication unit that is communicatively connected to a power transmitting controller, and the power transmitting controller is electrically connected to a transmitting coil. The invention realizes the flexibility and rapidization of charging, improves charging efficiency, and saves charging pile resource.