MEMS device
    11.
    发明申请
    MEMS device 审中-公开
    MEMS器件

    公开(公告)号:US20070296532A1

    公开(公告)日:2007-12-27

    申请号:US11709854

    申请日:2007-02-23

    IPC分类号: H01F7/00

    摘要: A two-axis micro-electro mechanical system (MEMS) device includes a moving plate, a stage, a driving coil, a pair of magnets, and a yoke magnetic body. The moving plate is supported coaxially on a first axis to move pivotably about the first axis. The stage is supported coaxially on the second axis in an inner region of the moving plate. The driving coil includes a coaxial coil portion arranged along the first axis of the driving plate and divided at a center by the stage, and a first connecting coil portion and a second connecting coil portion. The yoke magnetic body is disposed between the pair of magnets in a region above or below the magnets and is formed of a material capable of being magnetized by the magnets in order to suddenly change a magnetic flux density according to a distance between the pair of magnets.

    摘要翻译: 双轴微电子机械系统(MEMS)装置包括移动板,台,驱动线圈,一对磁体和轭磁体。 移动板同轴地支撑在第一轴线上,以围绕第一轴线可枢转地运动。 舞台在移动板的内部区域中同轴地支撑在第二轴上。 驱动线圈包括沿着驱动板的第一轴线布置并在台架的中心被分割的同轴线圈部分,以及第一连接线圈部分和第二连接线圈部分。 轭磁体设置在磁体上方或下方的区域中的一对磁体之间,并且由能够被磁体磁化的材料形成,以便根据一对磁体之间的距离突然改变磁通密度 。

    Optical image shutter
    12.
    发明授权
    Optical image shutter 有权
    光学图像快门

    公开(公告)号:US08599464B2

    公开(公告)日:2013-12-03

    申请号:US12689603

    申请日:2010-01-19

    申请人: Yong-hwa Park

    发明人: Yong-hwa Park

    IPC分类号: G02F1/03 G02B1/10

    CPC分类号: G02F1/0311 G03B9/08 G03B11/00

    摘要: An optical image shutter is disclosed. The optical image shutter includes an optical filter having a fixed refractive index and an optical filter having a variable refractive index. The optical filter having a fixed refractive index may include two layers having different refractive indexes and stacked alternately at least once. Alternatively, the optical filter having a variable refractive index may include at least one refractive index variable layer, and two layers having different refractive indexes and stacked alternately at least once. The optical image shutter may further include a transparent electrode for applying an electric field to the at least one refractive index variable layer.

    摘要翻译: 公开了一种光学图像快门。 光学图像快门包括具有固定折射率的滤光器和具有可变折射率的滤光器。 具有固定折射率的滤光器可以包括具有不同折射率并且交替堆叠至少一次的两个层。 或者,具有可变折射率的滤光器可以包括至少一个折射率可变层和两个具有不同折射率的层并交替堆叠至少一次。 光学图像快门还可以包括用于向至少一个折射率可变层施加电场的透明电极。

    MEMS DEVICE AND FABRICATION METHOD OF THE SAME
    14.
    发明申请
    MEMS DEVICE AND FABRICATION METHOD OF THE SAME 有权
    MEMS器件及其制造方法

    公开(公告)号:US20100304517A1

    公开(公告)日:2010-12-02

    申请号:US12856308

    申请日:2010-08-13

    IPC分类号: H01L21/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。

    Light modulators and optical apparatuses including the same
    15.
    发明授权
    Light modulators and optical apparatuses including the same 有权
    光调制器和包括其的光学装置

    公开(公告)号:US08711463B2

    公开(公告)日:2014-04-29

    申请号:US13337956

    申请日:2011-12-27

    IPC分类号: G02F1/01

    摘要: Provided are examples of light modulators and optical apparatuses that may include the light modulators. A light modulator may include a plasmonic nano-antenna and an element for changing plasmon resonance characteristics of the plasmonic nano-antenna. The plasmon resonance characteristics of the plasmonic nano-antenna may be changed due to a change in refractive index of the element, and thus light may be modulated.

    摘要翻译: 提供可以包括光调制器的光调制器和光学装置的示例。 光调制器可以包括等离子体激元纳米天线和用于改变等离子体激元纳米天线的等离子体共振特性的元件。 等离子体激元纳米天线的等离子体共振特性可能由于元件的折射率的变化而改变,因此可以调制光。

    High speed optical shutter, method of operating the same and apparatus including the same
    16.
    发明授权
    High speed optical shutter, method of operating the same and apparatus including the same 有权
    高速光学快门,其操作方法和包括该快门的装置

    公开(公告)号:US08619354B2

    公开(公告)日:2013-12-31

    申请号:US12726162

    申请日:2010-03-17

    IPC分类号: G02F1/29

    摘要: A high speed optical shutter, a method of operating the high speed optical shutter, and an optical apparatus including the high speed optical shutter. The optical shutter includes a transparent electro-optical medium in an active solid state having a total internal reflection surface on which an angle of total internal reflection is changed by an external action. The transparent electro-optical medium may be a prism or a prism array whose angle of total internal reflection is changed by the external action. An incident light path changing unit may be further arranged in front of the transparent electro-optical medium. Also, a light path changing unit may be further arranged so as to allow light passing through the electro-optical medium to be perpendicularly incident on an incidence target object.

    摘要翻译: 高速光学快门,操作高速光学快门的方法以及包括高速光学快门的光学装置。 光学快门包括具有全内反射表面的活性固体状态的透明电光介质,通过外部动作改变全内反射角度。 透明电光介质可以是通过外部动作改变全内反射角度的棱镜或棱镜阵列。 入射光路改变单元还可以布置在透明电光介质的前面。 此外,光路改变单元还可以被布置成使得通过电光介质的光垂直入射到入射目标物体上。

    Optical image modulator, optical apparatus including the same, and methods of manufacturing and operating the optical image modulator
    17.
    发明授权
    Optical image modulator, optical apparatus including the same, and methods of manufacturing and operating the optical image modulator 有权
    光学图像调制器,包括其的光学装置以及制造和操作光学图像调制器的方法

    公开(公告)号:US08194303B2

    公开(公告)日:2012-06-05

    申请号:US12615381

    申请日:2009-11-10

    IPC分类号: G02F1/03 G02B1/10

    摘要: Disclosed are an optical image modulator, an optical apparatus including the same, and methods of manufacturing and operating the optical image modulator. The optical image modulator includes a light amount increasing unit increasing the amount of forward light emission of an electric-optical unit. The light amount increasing unit includes a first reflector reflecting light, which travels from the inside of the electric-optical unit toward the optical-electric unit, to the electric-optical unit. The light amount increasing unit may further include a second light reflector reflecting light, which passes through the optical-electric unit without optical-electric conversion, to the optical-electric unit.

    摘要翻译: 公开了一种光学图像调制器,包括该光学器件的光学装置以及制造和操作光学图像调制器的方法。 光学图像调制器包括增加电光单元的正向发光量的光量增加单元。 光量增加单元包括反射从电光单元的内部朝向光电单元行进的光的第一反射器到电光单元。 光量增加单元还可以包括将光通过光电单元而不进行光电转换的反射光的第二光反射器。

    MEMS device and fabrication method of the same
    18.
    发明授权
    MEMS device and fabrication method of the same 有权
    MEMS器件及其制造方法相同

    公开(公告)号:US07977207B2

    公开(公告)日:2011-07-12

    申请号:US12856308

    申请日:2010-08-13

    IPC分类号: H02N1/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。

    MEMS SCANNER HAVING ACTUATOR SEPARATED FROM MIRROR
    19.
    发明申请
    MEMS SCANNER HAVING ACTUATOR SEPARATED FROM MIRROR 审中-公开
    具有从镜子分离的致动器的MEMS扫描仪

    公开(公告)号:US20090109512A1

    公开(公告)日:2009-04-30

    申请号:US12054615

    申请日:2008-03-25

    申请人: Yong-hwa Park

    发明人: Yong-hwa Park

    IPC分类号: G02B26/10

    摘要: A microelectromechanical systems (MEMS) scanner is provided. The MEMS scanner includes: a stationary frame; a first movable stage disposed inside the stationary frame and suspended on the stationary frame so as to pivot and vibrate around a virtual center shaft; a second movable stage disposed inside the first movable stage and suspended on the first movable stage so as to pivot and vibrate around the center shaft; and an actuator providing a driving force used to pivot and vibrate the first movable stage.

    摘要翻译: 提供了一种微机电系统(MEMS)扫描器。 MEMS扫描器包括:固定框架; 第一可移动台,其设置在所述固定框架的内部并且悬挂在所述固定框架上,以围绕虚拟中心轴枢转和振动; 第二可移动台,设置在所述第一可移动台的内部,并悬挂在所述第一可移动台上,以围绕所述中心轴枢转和振动; 以及提供用于枢转和振动第一可移动台的驱动力的致动器。

    SPECKLE REDUCTION LASER AND LASER DISPLAY APPARATUS HAVING THE SAME
    20.
    发明申请
    SPECKLE REDUCTION LASER AND LASER DISPLAY APPARATUS HAVING THE SAME 有权
    具有减光激光和激光显示装置

    公开(公告)号:US20080180776A1

    公开(公告)日:2008-07-31

    申请号:US11843211

    申请日:2007-08-22

    IPC分类号: G02B26/08 H01S3/08

    摘要: A speckle reduction laser and a laser display apparatus having the speckle reduction laser are provided. The speckle reduction laser includes a semiconductor unit that comprises an active layer and emits laser light through a first side surface thereof by resonating light generated from the active layer, and a vibration mirror unit disposed adjacent to a second side surface of the semiconductor unit. The laser further includes a mirror, and the resonance of the laser light is generated between the first side surface of the semiconductor unit and the mirror, and a resonance mode of the laser light is changed according to the vibration of the mirror.

    摘要翻译: 提供了一种减光激光器和具有散斑激光的激光显示装置。 散斑减少激光器包括半导体单元,该半导体单元包括有源层,并且通过使从有源层产生的光谐振而发射通过其第一侧表面的激光,以及邻近半导体单元的第二侧表面设置的振动镜单元。 激光还包括反射镜,并且在半导体单元的第一侧表面和反射镜之间产生激光的共振,并且激光的谐振模式根据反射镜的振动而改变。