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    Optical coating on light transmissive substrates of micromirror devices
    15.
    发明申请
    Optical coating on light transmissive substrates of micromirror devices 有权
    微镜器件的透光基板上的光学涂层

    公开(公告)号：US20060227406A1

    公开(公告)日：2006-10-12

    申请号：US11102531

    申请日：2005-04-08

    Applicant: Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    Inventor： Satyadev Patel ,  Peter Heureux ,  Jonathan Doan ,  Regis Grasser

    IPC: G02B26/00

    CPC classification number: G02B26/0841

    Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

    Abstract translation: 这里公开了一种操作包括微镜阵列的装置的方法。 该方法包括可用于在操作期间修复微镜阵列的粘性微镜的过程。 修复过程在ON状态下，对阵列中的微镜的镜板施加两个连续的刷新电压，其中脉冲在时间上比微镜的特征振荡时间长。 修复过程可独立应用于微镜。 或者，修复过程可以结合偏置反转过程。

    Electrical connections in microelectromechanical devices
    17.
    发明申请
    Electrical connections in microelectromechanical devices 有权
    微机电装置中的电气连接

    公开(公告)号：US20050250362A1

    公开(公告)日：2005-11-10

    申请号：US11181079

    申请日：2005-07-13

    Applicant: Jonathan Doan ,  Satyadev Patel ,  Robert Duboc

    Inventor： Jonathan Doan ,  Satyadev Patel ,  Robert Duboc

    IPC: G02B26/08 ,  H01R13/15

    CPC classification number: G02B26/0841 ,  G02B26/0833 ,  Y10T29/49155

    Abstract: A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.

    Abstract translation: 本文公开了一种微镜器件及其制造方法。 微镜装置包括各自具有导电层的镜板，铰链和柱。 铰链，镜板和柱中的一个还包括电绝缘层。 为了实现铰链，镜板和柱的导电层之间的电连接，绝缘层被图案化。

    Microelectromechanical structure and a method for making the same
    19.
    发明授权
    Microelectromechanical structure and a method for making the same 有权
    微机电结构及其制造方法

    公开(公告)号：US07153443B2

    公开(公告)日：2006-12-26

    申请号：US10805610

    申请日：2004-03-18

    Applicant: Jonathan Doan ,  Satyadev Patel

    Inventor： Jonathan Doan ,  Satyadev Patel

    IPC: H01L21/302

    CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

    Abstract: A microstructure and the method for making the same are disclosed herein. The microstructure has structural members, at least one of which comprises an intermetallic compound. In making such a microstructure, a sacrificial material is employed. After completion of forming the structural layers, the sacrificial material is removed by a spontaneous vapor phase chemical etchant.

    Abstract translation: 本文公开了微结构及其制造方法。 微结构具有结构构件，其中至少一个包括金属间化合物。 在制造这样的微结构时，采用牺牲材料。 在完成形成结构层之后，牺牲材料通过自发气相化学腐蚀剂除去。

    Micromirror array assembly with in-array pillars
    20.
    发明授权
    Micromirror array assembly with in-array pillars 有权
    具有阵列支柱的微镜阵列组件

    公开(公告)号：US08693082B2

    公开(公告)日：2014-04-08

    申请号：US12853411

    申请日：2010-08-10

    Applicant: Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    Inventor： Satyadev Patel ,  Andrew G. Huibers ,  Peter Richards ,  Terry Tarn ,  Dietrich Dehlinger

    IPC: G02B26/00 ,  G02B26/08

    CPC classification number: G02B26/0841 ,  B81C3/001 ,  Y10S359/90 ,  Y10T156/10

    Abstract: The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

    Abstract translation: 本发明提供了一种微结构器件，其包括多个衬底，其中器件的部件形成在衬底上。 为了保持基板之间的间隙的均匀性，提供并分布在间隙中的多个支柱以防止间隙尺寸的减小。 可以通过将支柱结合到微结构的部件来防止间隙尺寸的增加。 或者，可以通过将间隙内的压力维持在微结构将在其中操作的压力以下来防止间隙尺寸的增加。 形成微反射镜和电极的基板的电接触可以通过许多方式制成，例如电接触区域，电接触焊盘和电接触弹簧。

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