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公开(公告)号：US4707820A
公开(公告)日：1987-11-17
申请号：US581438
申请日：1984-02-17
申请人： Mitsuharu Sawamura
发明人： Mitsuharu Sawamura
CPC分类号： C23C14/083 , C23C14/024
摘要： An optical film comprises one or more layers at least one of which comprises Ta.sub.2 O.sub.5 and ZrO.sub.2, and a process for producing optical films comprising vapor deposition of a film comprising Ta.sub.2 O.sub.5 and ZrO.sub.2 on a substrate kept at a temperature between room temperature and 80.degree. C. by using a sintered pellet comprising Ta.sub.2 O.sub.5 and ZrO.sub.2 as a raw material for vapor deposition.
摘要翻译： 光学膜包括至少一个包括Ta 2 O 5和ZrO 2的一层或多层，以及包括在保持在室温和80℃之间的衬底上气相沉积包含Ta 2 O 5和ZrO 2的膜的光学膜的工艺。 通过使用包含Ta 2 O 5和ZrO 2的烧结颗粒作为蒸镀原料。
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12.发明申请Method of forming film by sputtering, optical member, and sputtering apparatus 审中-公开通过溅射形成膜的方法，光学部件和溅射装置公开(公告)号：US20050016834A1
公开(公告)日：2005-01-27
申请号：US10917360
申请日：2004-08-13
申请人： Mitsuharu Sawamura
发明人： Mitsuharu Sawamura
CPC分类号： C23C14/568 , C23C14/044 , C23C14/3407
摘要： A minute multilayer film with good characteristics is automatically and continuously formed on an in-line basis at a low production cost. In a sputtering chamber, there is provided a bonded target in which a first Ti member, a first Si member, a second Ti member, a Ta member, and a second Si member are bonded and which acts as a cathode electrode. A power is supplied between a substrate and the bonded target, and a substrate and a substrate holder are moved. With the movement, the substrate successively comes to face the first Ti member, first Si member, second Ti member, Ta member, and second Si member of the bonded target and sputtering is carried out on the substrate. A multilayer thin film of a structure consisting of a TiO2 film, an SiO2 film, a TiO2 film, a Ta2O5 film, and an SiO2 film is formed on a surface of the substrate. The thickness of each layer is adjusted by a film thickness correcting plate interposed between the substrate and the bonded target.
摘要翻译： 具有良好特性的微小的多层膜以低成本自动连续地在线地形成。 在溅射室中，设置有接合了第一Ti构件，第一Si构件，第二Ti构件，Ta构件和第二Si构件并且用作阴极电极的键合对象。 在基板和接合的靶之间提供电力，并移动基板和基板保持器。 通过运动，基板依次面对接合靶的第一Ti构件，第一Si构件，第二Ti构件，Ta构件和第二Si构件，并且在基板上进行溅射。 在基板的表面上形成由TiO 2膜，SiO 2膜，TiO 2膜，Ta 2 O 5膜和SiO 2膜构成的结构的多层薄膜。 通过插入在基板和粘结对象物之间的膜厚校正板来调整各层的厚度。
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公开(公告)号：US4714308A
公开(公告)日：1987-12-22
申请号：US705521
申请日：1985-02-26
CPC分类号： G02B5/286 , G02B5/0858 , G02B5/0891
摘要： An ultraviolet reflecting mirror comprises a substrate, a high reflection factor film provided on the substrate and having a film thickness of at least 250 .ANG. and reflecting a light beam by the surface thereof, and a group of dielectric material layers comprising one or more sets of two layers of low refractive index film and high refractive index film provided on the high reflection factor film. The low refractive index film is provided on the high reflection factor film. The optical film thickness of the high refractive index film and the low refractive index film is approximately 1/4(2n-1).lambda., where n is a natural number and .lambda. is the design wavelength and 150nm.ltoreq..lambda..ltoreq.300nm. The film thickness of at least one of the high refractive index film and the low refractive index film is 3.lambda./4.
摘要翻译： 紫外线反射镜包括基板，设置在基板上的高反射因子膜，其膜厚度至少为250，并通过其表面反射光束;以及一组介电材料层，包括一组或多组 在高反射因子膜上提供两层低折射率膜和高折射率膜。 低折射率膜设置在高反射因子膜上。 高折射率膜和低折射率膜的光学膜厚度约为1/4（2n-1)λ，其中n为自然数，λ为设计波长，λ为150nmλ= 300nm 。 高折射率膜和低折射率膜中的至少一个的膜厚为3λ/ 4。
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14.发明授权
公开(公告)号：US4531838A
公开(公告)日：1985-07-30
申请号：US359481
申请日：1982-03-18
申请人： Mitsuharu Sawamura
发明人： Mitsuharu Sawamura
CPC分类号： C23C14/547 , C23C14/54 , G01B11/0683
摘要： In film thickness control, different film thicknesses are evaporated on a first monitor and a second monitor provided in an evaporation tank, light beams of the same wavelength are projected onto the first monitor and the second monitor, the reflected lights from the first monitor and the second monitor are received and the reflection factors of the light beams from the monitors are detected.
摘要翻译： 在膜厚控制中，在第一监视器和设置在蒸发槽中的第二监视器上蒸发不同的膜厚度，将相同波长的光束投影到第一监视器和第二监视器上，来自第一监视器的反射光和 第二监视器被接收，并且检测来自监视器的光束的反射系数。
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公开(公告)号：US4261645A
公开(公告)日：1981-04-14
申请号：US5019
申请日：1979-01-19
申请人： Mitsuharu Sawamura , Osamu Kamiya
发明人： Mitsuharu Sawamura , Osamu Kamiya
CPC分类号： C03C17/3452 , C03C17/3417 , G02B1/115
摘要： An aspherical reflection preventive coating composed of a first thin film group includes one or more layers of thin film having an equal thickness, an aspherical thin film disposed on the thin film group and having an aspherical shape at the side opposite to the substrate, and a second thin film group disposed on the aspherical thin film, and comprising one or more layers of thin film, the films being arranged in the order as mentioned above from the side of the substrate.
摘要翻译： 由第一薄膜组构成的非球面防反射涂层包括一层或多层具有相同厚度的薄膜，设置在薄膜组上的非球面薄膜在与基板相对的一侧具有非球面形状，以及 设置在非球面薄膜上的第二薄膜组，并且包括一层或多层薄膜，所述薄膜从基板侧按照上述顺序排列。
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公开(公告)号：US07008059B2
公开(公告)日：2006-03-07
申请号：US10771860
申请日：2004-02-03
IPC分类号： G03B21/14
CPC分类号： H04N9/3105 , G02B27/283 , H04N9/315
摘要： A color combining optical system is disclosed, with which light of a plurality of colors can be combined while reducing the loss of light due to fluctuations in the incidence angle on a polarization color combining film. The color combining optical system, which combines a first color light and a second color light, includes a polarization color combining film made of a multilayer film. The polarization color combining film combines a first polarization component of the first color light and a second polarization component of the second color light, which has a polarization direction substantially perpendicular to the first polarization component, with an efficiency of 90% or more in a predetermined incidence angle range.
摘要翻译： 公开了一种彩色组合光学系统，可以组合多种颜色的光，同时减少由于偏振颜色组合膜上的入射角的波动引起的光的损失。 组合第一色光和第二色光的彩色组合光学系统包括由多层膜制成的偏振色彩组合膜。 偏振颜色组合膜将预定的第一颜色光的第一偏振分量和具有基本上垂直于第一偏振分量的偏振方向的第二色光的第二偏振分量结合成90％以上的效率 入射角度范围。
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公开(公告)号：US20050275807A1
公开(公告)日：2005-12-15
申请号：US11206775
申请日：2005-08-19
CPC分类号： H04N9/3105 , G02B27/283 , H04N9/315
摘要： A color combining optical system is disclosed, with which light of a plurality of colors can be combined while reducing the loss of light due to fluctuations in the incidence angle on a polarization color combining film. The color combining optical system, which combines a first color light and a second color light, includes a polarization color combining film made of a multilayer film. The polarization color combining film combines a first polarization component of the first color light and a second polarization component of the second color light, which has a polarization direction substantially perpendicular to the first polarization component, with an efficiency of 90% or more in a predetermined incidence angle range.
摘要翻译： 公开了一种彩色组合光学系统，可以组合多种颜色的光，同时减少由于偏振颜色组合膜上的入射角的波动引起的光的损失。 组合第一色光和第二色光的彩色组合光学系统包括由多层膜制成的偏振色彩组合膜。 偏振颜色组合膜将预定的第一颜色光的第一偏振分量和具有基本上垂直于第一偏振分量的偏振方向的第二色光的第二偏振分量结合在一起，其效率为90％以上 入射角度范围。
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公开(公告)号：US06366332B1
公开(公告)日：2002-04-02
申请号：US09511247
申请日：2000-02-23
IPC分类号： G02F1333
CPC分类号： G02F1/133512
摘要： A display apparatus includes a planar optical modulation device having a transparent substrate and a plurality of pixels disposed thereon so as to be each capable of optical modulation thereat, and a masking member disposed on the transparent substrate and including spacings. The making member includes a layer of a metal compound containing C, O and a metal element. The masking member is effective in reducing a degree of reflection of external light (from a viewer side) while maintaining a sufficient light-interrupting property, thus resulting in a display apparatus exhibiting good display performances.
摘要翻译： 显示装置包括具有透明基板和设置在其上的多个像素以便能够进行光学调制的平面光调制装置，以及设置在透明基板上并包括间隔的掩模部件。 制造构件包括含有C，O和金属元素的金属化合物层。 掩蔽构件在保持足够的光中断特性的同时有效地降低外部光（来自观察者侧）的反射程度，从而导致显示装置呈现良好的显示性能。
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公开(公告)号：US5715103A
公开(公告)日：1998-02-03
申请号：US651512
申请日：1996-05-22
申请人： Sayoko Amano , Mitsuharu Sawamura , Susumu Abe
发明人： Sayoko Amano , Mitsuharu Sawamura , Susumu Abe
CPC分类号： G02B5/205
摘要： A thin-film-type ND filter which attenuates the amount of light transmission is formed on a transparent substrate by using two or more types of metallic oxide having a refractive index n and an attenuation coefficient k which are in the range of 1.0 to 3.0 in the wavelength region of the visible region, making it possible to obtain flat transmittance characteristics.
摘要翻译： 通过使用折射率n和衰减系数k在1.0〜3.0的范围内的两种以上的金属氧化物，在透明基板上形成使透光量衰减的薄膜型ND滤光器 可见区域的波长区域，使得可以获得平坦的透射率特性。
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20.发明授权Optical filter having alternately laminated thin layers provided on a light receiving surface of an image sensor 失效光学滤波器具有设置在图像传感器的光接收表面上的交替层叠的薄层
公开(公告)号：US5648653A
公开(公告)日：1997-07-15
申请号：US324707
申请日：1994-10-18
IPC分类号： H01L31/0216 , H01L27/00 , H04N1/46
CPC分类号： H01L27/14625 , H01L27/14618 , H01L27/14621 , H01L31/02165 , H01L2924/0002
摘要： An Optical filter is provided on a light receiving surface of an image sensor. The filter has a plurality of thin layers alternately laminated. The thin layers alternately consist of a dielectric layer having a high refractive index and a metal layer and each thin layer has its stress .sigma. in a range -5 GPa.ltoreq..sigma.
摘要翻译： 光学滤波器设置在图像传感器的光接收表面上。 过滤器具有交替层压的多个薄层。 薄层交替地由具有高折射率的电介质层和金属层组成，并且每个薄层的应力σ在-5GPa≤σ2.2GPa的范围内。
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