公开(公告)号：US5907396A

公开(公告)日：1999-05-25

申请号：US934454

申请日：1997-09-19

申请人： Koichiro Komatsu ,  Hideyuki Tashiro ,  Tsuneyuki Hagiwara

发明人： Koichiro Komatsu ,  Hideyuki Tashiro ,  Tsuneyuki Hagiwara

IPC分类号： G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  H01L21/66 ,  G01N21/00

CPC分类号： G01N21/94

摘要： An optical detection system capable of detecting even small particles or defects on a specimen such as a mask with high sensitivity and being unaffected by diffracted light from the edges of the pattern even when inspecting a thick specimen. The optical detection system includes a light emission means for illuminating a pattern surface on the specimen with light, a first light reception optical system placed on the pattern surface side of the specimen for receiving scattered light emanating from the pattern surface, a second light reception optical system placed on the glass side of the specimen in symmetry with the first light reception optical system relative to the pattern surface for receiving scattered light emanating from the pattern surface through the specimen and a corrective optical element for correcting for differences in the aberration states of the first and second light reception optical systems.

摘要翻译： 光学检测系统即使在检查厚样品时，也能够高灵敏度地检测诸如掩模的样品上的甚至小的颗粒或缺陷，并且不受来自图案的边缘的衍射光的影响。 光学检测系统包括用光照射样本上的图案表面的发光装置，放置在样本的图案表面侧的第一光接收光学系统，用于接收从图案表面发出的散射光，第二光接收光 系统相对于图案表面放置在与第一光接收光学系统对称的样本的玻璃面上，用于接收从图案表面通过样本发出的散射光;以及校正光学元件，用于校正色差状态的差异 第一和第二光接收光学系统。

公开(公告)号：US5070250A

公开(公告)日：1991-12-03

申请号：US649340

申请日：1991-02-01

申请人： Koichiro Komatsu ,  Hideo Mizutani ,  Nobutaka Magome ,  Kazuya Ota

发明人： Koichiro Komatsu ,  Hideo Mizutani ,  Nobutaka Magome ,  Kazuya Ota

IPC分类号： G03F9/00

CPC分类号： G03F9/7049

摘要： A position detection apparatus has a substrate on which a diffraction grating is formed and an alignment optical system for illuminating the diffraction grating with a pair of coherent light beams having different frequencies from each other from different directions. The intensity of interference fringes formed due to the interference of diffracted beams generated in the diffraction grating is detected photo-electrically. The alignment optical system forms the pair of coherent light by using an optical modulator, and two luminous fluxes from the optical modulator pass through independent optical paths positioned symmetrically with the optical axis of the alignment optical system therebetween and reach the diffraction grating from different directions. The alignment optical system has a stop having an opening having an inclined edge with respect to the direction of the grating components of the diffraction grating, the opening being in conjugation with the substrate.

摘要翻译： 位置检测装置具有其上形成有衍射光栅的基板和用于用不同方向彼此不同频率的一对相干光束照射衍射光栅的对准光学系统。 由于衍射光栅中产生的衍射光束的干涉而形成的干涉条纹的强度被光电检测。 对准光学系统通过使用光学调制器形成一对相干光，并且来自光学调制器的两个光束通过独立的光学路径，与对准光学系统的光轴对称地定位并从不同的方向到达衍射光栅。 对准光学系统具有具有相对于衍射光栅的光栅部件的方向具有倾斜边缘的开口的开口，该开口与基板共轭。

公开(公告)号：US20100225906A1

公开(公告)日：2010-09-09

申请号：US12662084

申请日：2010-03-30

申请人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

发明人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

IPC分类号： G01N21/956 ,  G01N21/00

CPC分类号： G01N21/9501 ,  G01B11/30 ,  G01N21/21 ,  G01N21/956 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

摘要翻译： 表面检查装置和表面检查方法旨在可靠地处理更精细的重复间距而不缩短照明光的波长。 为此，该装置包括以线性偏振光照射形成在要检查的基板表面上的重复图案的单元，该单元设置为倾斜角度，该倾斜角与第一振动平面的相交线的方向之间的角度 基板表面上的线偏振光和重复图案的重复方向，从垂直于线偏振光的振动平面的偏振光分量中提取出的光从具有重复图案的光中发出的光 镜面方向，以及根据偏振光分量的光强度检测重复图案的缺陷的单元。

公开(公告)号：US20080094628A1

公开(公告)日：2008-04-24

申请号：US11907093

申请日：2007-10-09

申请人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

发明人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

IPC分类号： G01J4/00

CPC分类号： G01N21/9501 ,  G01B11/30 ,  G01N21/21 ,  G01N21/956 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

摘要翻译： 表面检查装置和表面检查方法旨在可靠地处理更精细的重复间距而不缩短照明光的波长。 为此，该装置包括以线性偏振光照射形成在要检查的基板表面上的重复图案的单元，该单元设置为倾斜角度，该倾斜角与第一振动平面的相交线的方向之间的角度 基板表面上的线偏振光和重复图案的重复方向，从垂直于线偏振光的振动平面的偏振光分量中提取出的光从具有重复图案的光中发出的光 镜面方向，以及根据偏振光分量的光强度检测重复图案的缺陷的单元。

公开(公告)号：US20060130801A1

公开(公告)日：2006-06-22

申请号：US11299899

申请日：2005-12-13

申请人： Yoshinori Suzuki ,  Koichiro Komatsu ,  Hisayoshi Kato

发明人： Yoshinori Suzuki ,  Koichiro Komatsu ,  Hisayoshi Kato

IPC分类号： F01M1/02 ,  F02B77/00 ,  F01M1/04

CPC分类号： F01M11/045

摘要： An oil pan structure includes a tubular level-gauge guide into which an oil level-gauge that measures the amount of oil stored in the oil pan is inserted. The oil pan structure further includes a nozzle guide that guides the end of a nozzle of an oil changer, which is inserted into the level-gauge-guide when the oil in the oil pan is replaced with new oil, to a position near the deepest portion of the reservoir portion.

摘要翻译： 油盘结构包括管状液位计引导件，其中插入有用于测量储存在油底壳中的油量的油位计。 油盘结构还包括喷嘴引导件，其引导油更换器的喷嘴的端部，当油盘中的油被新油代替时，其插入到液位计引导件中到最接近深度的位置 储存部分的一部分。

公开(公告)号：US20050179997A1

公开(公告)日：2005-08-18

申请号：US11018487

申请日：2004-12-22

申请人： Koichiro Komatsu ,  Hiromasa Shibata

发明人： Koichiro Komatsu ,  Hiromasa Shibata

IPC分类号： G02B21/00 ,  G01N21/956 ,  G02B21/33

CPC分类号： G02B21/33

摘要： A microscope includes a microscope optical system that forms an enlarged image of an observation position by an immersion objective lens with an immersion liquid is filled between the observation position and the objective lens, a moving mechanism that moves a state that a first observation position among a plurality of observation positions on a substrate is positioned in a field of view of the microscope to another state that a second observation position is positioned in the field of view of the microscope, an immersion supplier that supplies the immersion liquid to fill between the objective lens and the observation position, an immersion remover that removes the immersion liquid filled between the objective lens and the observation position, and an immersion remove controller that makes the immersion remover remove the immersion liquid before operating the moving mechanism.

摘要翻译： 显微镜包括通过浸没物镜形成观察位置的放大图像的显微镜光学系统，其中浸没液被填充在观察位置和物镜之间;移动机构，其移动第一观察位置 将基板上的多个观察位置定位在显微镜的视场中，使得第二观察位置位于显微镜的视野内的另一状态，提供浸没液体以供填充在物镜 观察位置，去除填充在物镜和观察位置之间的浸没液的浸渍去除器，以及在操作移动机构之前使浸渍去除器去除浸液的浸渍去除控制器。

公开(公告)号：US06313913B1

公开(公告)日：2001-11-06

申请号：US09447691

申请日：1999-11-23

申请人： Yumi Nakagawa ,  Koichiro Komatsu

发明人： Yumi Nakagawa ,  Koichiro Komatsu

IPC分类号： G01N2100

CPC分类号： G01N21/94 ,  G01N2021/9513 ,  G01N2021/95676

摘要： A surface inspection apparatus is provided which uses at least two sets of surface inspection systems each comprising with a paired surface illumination device (A1, B1) and detection device (A2, B2), with each set of illumination devices and detection devices creating their own irradiation regions (51A, 51B) and detection regions (23A,23B), in which the irradiation and detection regions of one pair of illumination and detection devices does not over lap the illumination and detection regions of the adjacent pair of illumination and detection devices. The surface illumination devices preferably project light at an angle of 80° or more with respect to a normal to the surface being inspected (21). The detection devices detect light scattered by dust or defects on the surface to be inspected. The surface to be inspected can be moved in a direction perpendicular to the direction of the illumination and detection regions on the surface being inspected. Thus, the entire surface can be inspected. The inspection device and method can also be adapted for use in a liquid crystal display manufacturing operation.

摘要翻译： 提供一种表面检查装置，其使用至少两组表面检查系统，每个表面检查系统包括成对的照明装置（A1，B1）和检测装置（A2，B2），每组照明装置和检测装置产生自己的 照射区域（51A，51B）和检测区域（23A，23B），其中一对照明和检测装置的照射和检测区域没有超过相邻照明和检测装置对的照明和检测区域。 表面照明装置优选相对于被检查表面的法线（21）以80°或更大的角度投射光。 检测装置检测被检查表面上的灰尘或缺陷散射的光。 待检查的表面可以在垂直于被检查表面上的照明方向和检测区域的方向上移动。 因此，可以检查整个表面。 检查装置和方法也可以适用于液晶显示器制造操作。

公开(公告)号：US5171999A

公开(公告)日：1992-12-15

申请号：US762472

申请日：1991-09-19

申请人： Koichiro Komatsu ,  Hideo Mizutani ,  Nobutaka Magome ,  Kazuya Ota

发明人： Koichiro Komatsu ,  Hideo Mizutani ,  Nobutaka Magome ,  Kazuya Ota

IPC分类号： G03F9/00

CPC分类号： G03F9/7049

摘要： A position detection apparatus has a substrate on which a diffraction grating is formed and an alignment optical system for illuminating the diffraction grating with a pair of coherent light beams having different frequencies from each other from different directions. The intensity of interference fringes formed due to the interference of diffracted beams generated in the diffraction grating is detected photo-electrically. The alignment optical system forms the pair of coherent light by using an optical modulator, and two luminous fluxes from the optical modulator pass through independent optical paths positioned symmetrically with the optical axis of the alignment optical system therebetween and reach the diffraction grating from different directions. The alignment optical system has a stop having an opening having an inclined edge with respect to the direction of the grating components of the diffraction grating, the opening being in conjugation with the substrate.

摘要翻译： 位置检测装置具有其上形成有衍射光栅的基板和用于用不同方向彼此不同频率的一对相干光束照射衍射光栅的对准光学系统。 由于衍射光栅中产生的衍射光束的干涉而形成的干涉条纹的强度被光电检测。 对准光学系统通过使用光学调制器形成一对相干光，并且来自光学调制器的两个光束通过独立的光学路径，与对准光学系统的光轴对称地定位并从不同的方向到达衍射光栅。 对准光学系统具有具有相对于衍射光栅的光栅部件的方向具有倾斜边缘的开口的开口，该开口与基板共轭。

公开(公告)号：US08441627B2

公开(公告)日：2013-05-14

申请号：US12662084

申请日：2010-03-30

申请人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

发明人： Kazuhiko Fukazawa ,  Koichiro Komatsu ,  Takeo Oomori

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01B11/30 ,  G01N21/21 ,  G01N21/956 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

摘要翻译： 表面检查装置和表面检查方法旨在可靠地处理更精细的重复间距而不缩短照明光的波长。 为此，该装置包括以线性偏振光照射形成在要检查的基板表面上的重复图案的单元，该单元设置为倾斜角度，该倾斜角与第一振动平面的相交线的方向之间的角度 基板表面上的线偏振光和重复图案的重复方向，从垂直于线偏振光的振动平面的偏振光分量中提取出的光从具有重复图案的光中发出的光 镜面方向，以及根据偏振光分量的光强度检测重复图案的缺陷的单元。

公开(公告)号：US08403687B2

公开(公告)日：2013-03-26

申请号：US12949329

申请日：2010-11-18

申请人： Tsukasa Abe ,  Koichiro Komatsu

发明人： Tsukasa Abe ,  Koichiro Komatsu

IPC分类号： H01R13/44

CPC分类号： B41J29/02 ,  B41J2/32 ,  G07G5/00

摘要： A data storage device is provided. At least a storage section configured to store information therein and a connection terminal configured to transmit information are mounted on a substrate. A casing accommodates the substrate, the casing is formed with an opening to expose a connection portion of the connection terminal to the outside. A shield plate configured to shield the opening of the casing. A shield plate actuation mechanism is configured to detect a connection state between the connection terminal and a receiving terminal to which the connection terminal is connected and actuate the shield plate. The shield plate actuation mechanism actuates the shield plate to shield the opening when the shield plate actuation mechanism detects that the connection terminal is separated from the receiving terminal.

摘要翻译： 提供数据存储装置。 至少一个被配置为在其中存储信息的存储部分和被配置为发送信息的连接终端安装在基板上。 壳体容纳基板，壳体形成有开口以将连接端子的连接部分暴露于外部。 被配置为屏蔽壳体的开口的屏蔽板。 屏蔽板致动机构被配置为检测连接端子与连接端子所连接的接收端子之间的连接状态，并致动屏蔽板。 当屏蔽板致动机构检测到连接端子与接收端分离时，屏蔽板致动机构致动屏蔽板以屏蔽开口。