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公开(公告)号：US20100065310A1
公开(公告)日：2010-03-18
申请号：US12516394
申请日：2007-11-29
CPC分类号： H05K3/0052 , H01L23/13 , H01L2924/0002 , H05K1/0306 , H05K2201/09036 , H05K2201/0909 , H05K2203/0228 , Y10T29/49117 , Y10T29/49124 , H01L2924/00
摘要： A method for manufacturing a substrate chip including the steps of: setting the thickness of at least a part of a metal wiring pattern unit provided on the raw substrate to be 0.1 μm to 5 μm; forming a groove for creating at least a crack in the surface of the ceramic substrate along a planned cutting line which passes through the part of the metal wiring pattern unit by using a cutting wheel having a cutter blade being formed into substantially V shape in cross section along the circumferential portion of the disk rotating wheel; and cutting the raw substrate by giving load from just behind of the groove. When manufacturing metallized ceramic substrate chips by cutting (dividing) the ceramic substrate on the surface of which wiring patterns made of a metal film is formed, the method is capable of effectively using the base material, inhibiting defects in the metallized portion, and efficiently manufacturing the substrate chips in high yield.
摘要翻译： 一种用于制造衬底芯片的方法，包括以下步骤：将设置在原始衬底上的金属布线图案单元的至少一部分的厚度设定为0.1μm至5μm; 形成用于沿着规划的切割线在陶瓷基板的表面中至少形成裂纹的槽，该切割线穿过金属布线图案单元的一部分，通过使用具有切割刀的切割轮，该切割轮具有大致V形截面 沿着盘旋转轮的圆周部分; 并通过从凹槽的后面施加载荷来切割原始基底。 当通过在形成由金属膜制成的布线图案的表面上切割（分割）陶瓷基板来制造金属化陶瓷基板芯片时，该方法能够有效地使用基材，抑制金属化部分中的缺陷并有效地制造 基片芯片产量高。
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12.发明授权公开(公告)号：US07598497B2
公开(公告)日：2009-10-06
申请号：US11892332
申请日：2007-08-22
申请人： Kouichi Yamamoto , Kaneo Kageyama
发明人： Kouichi Yamamoto , Kaneo Kageyama
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/222 , H01J37/28 , H01J2237/1536 , H01J2237/2809 , H01J2237/2817 , H01J2237/2826
摘要： A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval direction and desired magnification in a scan-line direction, and performing a calculation for rotating the scan direction with respect to the scan signal in order to suppress a distortion which is caused to occur when the technology where the scan direction of a charged particle beam is rotated is applied to the technology where the charged particle beam is scanned such that the scan-line interval is enlarged.
摘要翻译： 一种用于计算扫描信号的方法和装置，使得扫描区域变为基于扫描线间隔方向上的期望倍率与扫描线方向上的期望倍率之间的倍率的扫描区域，并且对扫描区域进行计算 相对于扫描信号旋转扫描方向，以便在将带电粒子束的扫描方向旋转的技术应用于扫描带电粒子束的技术时，抑制发生的变形，使得 扫描线间隔被放大。
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公开(公告)号：US5538691A
公开(公告)日：1996-07-23
申请号：US199155
申请日：1994-03-23
申请人： Kaori Tosa , Yoshiyuki Hama , Kouichi Yamamoto , Ryuuji Akiyama , Masakazu Yoshida , Hiroshi Yagi , Kazuhisa Shigemori , Tomomi Sakamoto
发明人： Kaori Tosa , Yoshiyuki Hama , Kouichi Yamamoto , Ryuuji Akiyama , Masakazu Yoshida , Hiroshi Yagi , Kazuhisa Shigemori , Tomomi Sakamoto
CPC分类号： G01N21/648 , B01L3/508 , G01N21/03 , G01N2021/7733
摘要： An apparatus for optical measurement is formed as a one-piece molding. The apparatus has a reaction vessel and pre-treatment vessels, at least part of the partitioning wall between the both serves as an optical waveguide body, and a light absorber vessel is formed adjacent the reaction vessel (24). Simplification of the process of manufacture thus is attained. With a light absorber accommodated in the light absorber vessel, (25), reaction components of excitation light and other noise light components that are propagated through the optical waveguide body can be sufficiently attenuated to improve the S/N ratio of the optical measurement.
摘要翻译： PCT No.PCT / JP93 / 00873 Sec。 371日期1994年3月23日 102（e）1994年3月23日PCT提交1993年6月25日PCT公布。 公开号WO94 / 00761 日期1994年1月6日光学测量装置形成为一体成型。 该装置具有反应容器和预处理容器，两者之间的分隔壁的至少一部分用作光波导体，并且在反应容器（24）附近形成光吸收容器。 实现了简化制造过程。 通过容纳在光吸收容器中的光吸收体（25），可以充分地衰减通过光波导体传播的激发光和其他噪声光成分的反应成分，以提高光学测量的S / N比。
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公开(公告)号：US08203504B2
公开(公告)日：2012-06-19
申请号：US12907912
申请日：2010-10-19
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： G09G1/08
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。
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公开(公告)号：US07817105B2
公开(公告)日：2010-10-19
申请号：US11713687
申请日：2007-03-05
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。
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公开(公告)号：US20070215374A1
公开(公告)日：2007-09-20
申请号：US11723225
申请日：2007-03-19
IPC分类号： H01R9/05
摘要： To simply provide a water-stopping structures for shielded electric wire in the shielded portion of the wire at a low cost, a water stop structure in a shielded electric wire is comprised by stripping a sheath 4 of the shielded electric wire in the middle part thereof; permeating an adhesive into the exposed shield member 3; overlaying a heat shrinkable tube 12 over the shield member via hot melt 14; and heat shrinking the heat shrinkable tube 12 in a state where both ends of the heat shrinkable tube 12 are overlapped with the outer periphery of the sheath 4.
摘要翻译： 为了以较低的成本简单地在屏蔽电线中提供屏蔽电线的防水结构，屏蔽电线中的防水结构包括通过在其中间部分剥离屏蔽电线的护套4 ; 将粘合剂渗透到暴露的屏蔽构件3中; 通过热熔体14将热收缩管12覆盖在屏蔽构件上; 并且在热收缩管12的两端与护套4的外周重叠的状态下热收缩热收缩管12。
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公开(公告)号：US20070024528A1
公开(公告)日：2007-02-01
申请号：US11298590
申请日：2005-12-12
申请人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
发明人： Atsushi Kobaru , Hidetoshi Morokuma , Hiroki Kawada , Sho Takami , Katsuhiro Sasada , Kouichi Yamamoto , Norio Satou , Kunio Nakanishi
IPC分类号： G09G3/00
CPC分类号： H01J37/265 , H01J37/28 , H01J2237/1536 , H01J2237/31749
摘要： An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
摘要翻译： 一种适于在用带电粒子束扫描二维区域时抑制充电倾斜的图像形成方法和带电粒子束装置。 扫描位于第一扫描线和第二扫描线之间的第三扫描线。 在扫描第一，第二和第三扫描线之后，在第一扫描线和第三扫描线之间以及第二和第三扫描线之间扫描多条扫描线。
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18.发明申请Connector and an electronic apparatus having electronic parts connected to each other by the connector 失效连接器和具有通过连接器彼此连接的电子部件的电子设备公开(公告)号：US20050020116A1
公开(公告)日：2005-01-27
申请号：US10740545
申请日：2003-12-22
摘要： There is provided a connector used for connecting a plurality of first terminals formed on a first electronic part to a plurality of respective second terminals formed on a second electronic part. The connector comprises an intermediate basis material having a spring characteristic, a plurality of first electrically conductive members provided on a first surface of the intermediate basis material, a plurality of second electrically conductive members provided on a second surface of the intermediate basis material, and wiring for connecting each of the first electrically conductive members to corresponding one of the second electrically conductive members.
摘要翻译： 提供了一种用于将形成在第一电子部件上的多个第一端子连接到形成在第二电子部件上的多个相应的第二端子的连接器。 连接器包括具有弹簧特性的中间基材料，设置在中间基材的第一表面上的多个第一导电构件，设置在中间基材的第二表面上的多个第二导电构件和布线 用于将每个第一导电构件连接到相应的一个第二导电构件。
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19.发明授权Electrostatic chuck and method of treating substrate using electrostatic chuck 失效静电吸盘和使用静电吸盘处理衬底的方法公开(公告)号：US06760213B2
公开(公告)日：2004-07-06
申请号：US10216777
申请日：2002-08-13
申请人： Kouichi Yamamoto
发明人： Kouichi Yamamoto
IPC分类号： H01T2300
CPC分类号： H01L21/6833 , H02N13/00
摘要： An electrostatic chuck comprises a sample stage 9 provided with electrodes 1, 2 and 3 for applying n-phase alternating voltage wherein n is equal to or greater than 2, and a circuit for applying the n-phase alternating voltage. The present electrostatic chuck realizes smooth and speedy attraction/separation of the substrate without the need for a charge elimination process, and the present chuck solves the problem of substrate vibration.
摘要翻译： 静电卡盘包括：具有用于施加n等于或大于2的n相交流电压的电极1,2和3的样品台9和用于施加n相交流电压的电路。 本静电卡盘实现了基板的平滑快速的吸引/分离，而不需要电荷消除过程，并且本卡盘解决了基板振动的问题。
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公开(公告)号：US6111630A
公开(公告)日：2000-08-29
申请号：US127959
申请日：1998-08-03
CPC分类号： H04N9/3141 , G02F1/133385 , H04N5/7441
摘要： A liquid crystal projector, comprising: a liquid crystal panel; a light source for irradiating light onto an image formed on the a liquid crystal panel; a projection lens for enlarging and projecting the image projected from the liquid crystal panel; a cooler, such as a suction fan, for sending cooling air flow onto a panel surface of the liquid crystal panel; an air velocity sensor for sensing air velocity of the cooling air flow sent onto the liquid crystal panel; and a protection device for protecting the liquid crystal panel on a basis of a detected value of the air velocity measured by the air velocity sensor. The is further formed an air passage for passing the cooling air flow along with the panel surface of the liquid crystal panel, and the air velocity sensor is positioned in an exit portion of the cooling air flow passing through the liquid crystal panel.
摘要翻译： 一种液晶投影仪，包括：液晶面板; 用于将光照射到形成在液晶面板上的图像上的光源; 投影透镜，用于放大和投影从液晶面板投影的图像; 诸如吸风机的冷却器，用于将冷却空气流送到液晶面板的面板表面上; 用于感测送到液晶面板上的冷却空气流的空气速度的空气速度传感器; 以及用于基于由空气速度传感器测量的空气速度的检测值来保护液晶面板的保护装置。 进一步形成有用于使冷却空气流与液晶面板的面板通过的空气通路，空气速度传感器位于通过液晶面板的冷却气流的出口部分。
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