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公开(公告)号：US6062239A
公开(公告)日：2000-05-16
申请号：US108162
申请日：1998-06-30
申请人： Daniel P. Bexten
发明人： Daniel P. Bexten
CPC分类号： H01L21/67034 , F26B5/08 , G03F7/162
摘要： A centrifugal processor for processing flat media, such as silicon wafers, has a rotor rotatably mounted within a rotor housing. Fan blades on the rotor blow air over the wafers, to move any remaining fluid droplets away from the wafer centers, to allow centrifugal force to fling the fluid droplets off of the wafers. The centrifugal processor uses clean room air, rather than nitrogen, for drying. Operating costs are reduced while manufacturing yields are increased, as spotting at the wafer centers is avoided.
摘要翻译： 用于处理诸如硅晶片的扁平介质的离心处理器具有可转动地安装在转子壳体内的转子。 转子上的风扇叶片吹过晶片上的空气，以将任何剩余的液体液滴从晶片中心移开，以允许离心力使流体液滴离开晶片。 离心处理器使用洁净室空气而不是氮气进行干燥。 降低制造成本的同时降低了运营成本，因为避免了在晶圆中心的发现。
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12.发明授权Belt tensioning system, tensioner and parts therefor and methods of making the same 失效皮带张紧系统，张紧器及其部件及其制作方法
公开(公告)号：US4938735A
公开(公告)日：1990-07-03
申请号：US407610
申请日：1989-09-15
CPC分类号： F16H7/129 , F02B67/06 , F02B75/22 , F16H7/1281 , F02B2275/06 , F02B2275/18 , F16H2007/0806 , F16H2007/0893
摘要： A belt tensioning system, tensioner and parts therefor and methods of making the same are provided, the system comprising a support unit, an endless transmission belt construction carried by the support unit and arranged to move in a certain path, an arm pivotally mounted to the support unit, a pulley rotatably carried by the arm and being in engagement with the belt construction, and an actuator carried by the support unit and having opposed ends, the actuator having a movable piston projecting out of one of the opposed ends thereof and being in engagement with the arm to pivot the arm in a direction to urge the pulley into the belt construction as the piston is extended outwardly from the one end of the actuator, the other of the opposed ends of the actuator being pivotally mounted to the support unit whereby the actuator pivots relative to the support unit as the piston thereof extends and retracts at the one end thereof.
摘要翻译： 提供了一种带张紧系统，张紧器及其部件及其制造方法及其制造方法，该系统包括支撑单元，由支撑单元承载并设置成沿某一路径移动的环形传动带结构，枢转地安装到 支撑单元，由所述臂可旋转地承载并与所述带结构接合的滑轮和由所述支撑单元承载并且具有相对端的致动器，所述致动器具有从其相对的一个中的一个突出并位于 与所述臂接合以在所述活塞从所述致动器的一端向外延伸的方向上使所述臂沿着使所述带轮进入所述带结构的方向枢转，所述致动器的所述相对端的另一端枢转地安装到所述支撑单元，由此 当其活塞在其一端延伸和缩回时，致动器相对于支撑单元枢转。
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13.发明授权Belt tensioning system, tensioner and parts therefor and methods of making the same 失效皮带张紧系统，张紧器及其部件及其制作方法
公开(公告)号：US4883446A
公开(公告)日：1989-11-28
申请号：US323539
申请日：1989-03-14
CPC分类号： F02B67/06 , F02B75/22 , F16H7/1281 , F16H7/129 , F02B2275/06 , F02B2275/18 , F16H2007/0806 , F16H2007/0893
摘要： A belt tensioning system, tensioner and parts therefor and methods of making the same are provided, the system comprising a support unit, an endless transmission belt construction carried by the support unit and arranged to move in a certain path, an arm pivotally mounted to the support unit, a pulley rotatably carried by the arm and being in engagement with the belt construction, and an actuator carried by the support unit and having opposed ends, the actuator having a movable piston projecting out of one of the opposed ends thereof and being in engagement with the arm to pivot the arm in a direction to urge the pulley into the belt construction as the piston is extended outwardly from the one end of the actuator, the other of the opposed ends of the actuator being pivotally mounted to the support unit whereby the actuator pivots relative to the support unit as the piston thereof extends and retracts at the one end thereof.
摘要翻译： 提供了一种带张紧系统，张紧器及其部件及其制造方法及其制造方法，该系统包括支撑单元，由支撑单元承载并设置成沿某一路径移动的环形传动带结构，枢转地安装到 支撑单元，由所述臂可旋转地承载并与所述带结构接合的滑轮和由所述支撑单元承载并且具有相对端的致动器，所述致动器具有从其相对的一个中的一个突出并位于 与所述臂接合以在所述活塞从所述致动器的一端向外延伸的方向上使所述臂沿着使所述带轮进入所述带结构的方向枢转，所述致动器的所述相对端的另一端枢转地安装到所述支撑单元，由此 当其活塞在其一端延伸和缩回时，致动器相对于支撑单元枢转。
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公开(公告)号：US07278813B2
公开(公告)日：2007-10-09
申请号：US10334688
申请日：2002-12-30
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67781 , H01L21/68707 , Y10S414/137
摘要： An automated processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress wafers or articles. Process chambers are located in the process bay. A transfer robot moves wafers from a pod unsealed at a docking station into a carrier at a transfer station. The carrier has tapered or stepped outside surfaces engaging corresponding inside surfaces on a rotor within a process chamber. A process robot moves between the indexer bay and process bay to carry wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.
摘要翻译： 自动处理系统具有与清洁空气封闭体内的处理室垂直对准的分度器托架。 索引器托架中的索引器提供放置或存储用于正在进行的晶片或物品。 过程室位于过程托架中。 传送机器人将来自对接站的密封件中的晶片从传送站移动到载体中。 载体具有与处理室内的转子上的相应内表面接合的锥形或阶梯状的外表面。 过程机器人在分度器托架和过程间隔之间移动以将晶片运送到处理室和从处理室运送晶片。 过程机器人具有可沿着升降轨道垂直移动的机器人手臂。 晶片从机器人手臂偏移，以更好地避免污染。 自动化系统紧凑，需要较少的洁净室空间。
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公开(公告)号：US06723174B2
公开(公告)日：2004-04-20
申请号：US10163837
申请日：2002-06-05
IPC分类号： B08B302
CPC分类号： H01L21/68707 , H01L21/67742 , H01L21/67754 , H01L21/67769 , H01L21/67772 , H01L21/67775 , H01L21/67778 , H01L21/67781 , Y10S414/137
摘要： An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are located in the process bay: A process robot moves between the indexer bay and process bay to carry semi-conductor wafers to and from the process chambers. The process robot has a robot arm vertically moveable along a lift rail. Semiconductor wafers are carried offset from the robot arm, to better avoid contamination. The automated system is compact and requires less clean room floor space.
摘要翻译： 自动半导体处理系统具有与清洁空气封闭体内的工艺间隔垂直对准的分度器托架。 索引器托架中的索引器为进行中的半导体晶片提供放样或存储。 过程室位于过程室中：过程机器人在分度器托架和过程间隔之间移动，以将半导体晶片运送到过程室和从处理室运送。 过程机器人具有可沿着升降轨道垂直移动的机器人手臂。 半导体晶片从机器人手臂偏移，以更好地避免污染。 自动化系统紧凑，需要较少的洁净室空间。
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公开(公告)号：US06432214B1
公开(公告)日：2002-08-13
申请号：US09113440
申请日：1998-07-10
IPC分类号： B08B704
摘要： A machine for cleaning containers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor. Used cleaning solution is diverted to a reclaim tank for reuse, thereby allowing low-cost cleaning with concentrated chemicals, and with the creation of less liquid waste requiring disposal. In a method for removing contaminants from flat media or silicon wafer containers or carriers, a mixture of surfactant and de-ionized water is sprayed onto containers on a spinning rotor. The used cleaning solution is collected, filtered and reused.
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公开(公告)号：US06412502B1
公开(公告)日：2002-07-02
申请号：US09611642
申请日：2000-07-07
申请人： Daniel P. Bexten , Jerry R. Norby
发明人： Daniel P. Bexten , Jerry R. Norby
IPC分类号： B08B300
CPC分类号： H01L21/67051 , B08B3/12 , B08B9/0861 , B08B9/32 , H01L21/6704 , Y10S134/902
摘要： A cleaning system for cleaning boxes or containers used to carry semiconductor wafers has box holder assemblies and a box door holder assembly attached to a rotor within an enclosure. Upper and lower hooks on the box holder and box door holder assemblies hold boxes and doors as the rotor spins. Boxes and their doors, such as front opening unified pods (FOUP) are both efficiently cleaned and handled.
摘要翻译： 用于运送半导体晶片的清洁盒或容器的清洁系统具有盒保持器组件和附接到外壳内的转子的盒门保持器组件。 当转子旋转时，箱体支架和箱门支架组件上的上下钩卡住框和门。 箱子和门，如前开口统一荚（FOUP）都有效地清理和处理。
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公开(公告)号：US5594290A
公开(公告)日：1997-01-14
申请号：US473175
申请日：1995-06-07
CPC分类号： H01R39/26 , H02K23/20 , H02K5/145 , H02K2213/03
摘要： A multi-speed, direct current motor (120) incorporates a high speed (24) brush disposed between the low speed (22) and the common ground (26) brushes and having a non-arcuate end face (25) which, unlike the conventional arcuate brush end face (23,27), is not subject to speed-drift erosion. The non-arcuate end face (25) is configured of two offset surfaces (55,65 & 57,67) which intersect to provide a line of contact (43) between the end face (25) of the high speed brush (24) and the commutator (40) which is displaced from the center line of the high speed brush (24) in a direction counter to the direction of rotation of the motor, that is toward the leading edge (21) of the brush (24). The intersecting surfaces (55,65 & 57,67) may comprise either flat planar surfaces or contoured surfaces.
摘要翻译： 多速直流电动机（120）包括设置在低速（22）和公共地面（26）电刷之间的高速（24）电刷，并且具有非弧形端面（25），其不同于 常规弧形刷端面（23,27），不受速度漂移侵蚀。 非弧形端面（25）由两个偏移表面（55,65和57,67）构成，它们相交以在高速电刷（24）的端面（25）之间提供接触线（43） 以及与电动机的旋转方向相反的方向（即朝向电刷24的前缘21）从高速电刷24的中心线偏移的换向器40。 相交表面（55,65和57,67）可以包括平坦平面或轮廓表面。
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公开(公告)号：US5485049A
公开(公告)日：1996-01-16
申请号：US248777
申请日：1994-05-25
CPC分类号： H01R39/26 , H02K23/20 , H02K5/145 , H02K2213/03
摘要： A multi-speed, direct current motor (120) incorporates a high speed (24) brush disposed between the low speed (22) and the common ground (26) brushes and having a non-arcuate end face (25) which, unlike the conventional arcuate brush end face (23,27), is not subject to speed-drift erosion. The non-arcuate end face (25) is configured of two offset surfaces (55,65 & 57,67) which intersect to provide a line of contact (43) between the end face (25) of the high speed brush (24) and the commutator (40) which is displaced from the center line of the high speed brush (24) in a direction counter to the direction of rotation of the motor, that is toward the leading edge (21) of the brush (24). The intersecting surfaces (55,65 & 57,67) may comprise either flat planar surfaces or contoured surfaces.
摘要翻译： 多速直流电动机（120）包括设置在低速（22）和公共地面（26）电刷之间的高速（24）电刷，并且具有非弧形端面（25），其不同于 传统弧形刷端面（23,27），不受速度漂移侵蚀。 非弧形端面（25）由两个偏移表面（55,65和57,67）构成，它们相交以在高速电刷（24）的端面（25）之间提供接触线（43） 以及与电动机的旋转方向相反的方向（即朝向电刷24的前缘21）从高速电刷24的中心线偏移的换向器40。 相交表面（55,65和57,67）可以包括平坦平面或轮廓表面。
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