公开(公告)号：US10062590B2

公开(公告)日：2018-08-28

申请号：US15676687

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180040492A1

公开(公告)日：2018-02-08

申请号：US15676687

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20180019142A1

公开(公告)日：2018-01-18

申请号：US15673030

申请日：2017-08-09

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20170117170A1

公开(公告)日：2017-04-27

申请号：US15138097

申请日：2016-04-25

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US10427307B2

公开(公告)日：2019-10-01

申请号：US15667577

申请日：2017-08-02

Applicant: Lam Research Corporation

Inventor： Damon Tyrone Genetti ,  Jon McChesney ,  Alex Paterson ,  Derek John Witkowicki ,  Austin Ngo

IPC: B25J15/00 ,  H01L21/67 ,  B25J11/00 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

公开(公告)号：US20190252234A1

公开(公告)日：2019-08-15

申请号：US16398107

申请日：2019-04-29

Applicant: Lam Research Corporation

Inventor： Damon Tyrone Genetti ,  Jon McChesney ,  Alex Paterson ,  Derek John Witkowicki ,  Austin Ngo

IPC: H01L21/687 ,  H01L21/673 ,  H01L21/677 ,  H01L21/67

Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

公开(公告)号：US10190865B2

公开(公告)日：2019-01-29

申请号：US15087899

申请日：2016-03-31

Applicant: Lam Research Corporation

Inventor： Silvia Rocio Aguilar Amaya ,  Derek John Witkowicki ,  Damon Tyrone Genetti

IPC: G01B7/34

Abstract: Methods, kits, systems, and apparatuses, for measuring and/or verifying end effector flatness using electrical continuity are provided.

公开(公告)号：US20180068879A1

公开(公告)日：2018-03-08

申请号：US15676613

申请日：2017-08-14

Applicant: Lam Research Corporation

Inventor： Scott Wong ,  Damon Tyrone Genetti ,  Derek John Witkowicki ,  Alex Paterson ,  Richard H. Gould ,  Austin Ngo ,  Marc Estoque

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67303 ,  H01L21/6732 ,  H01L21/67369 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67742 ,  H01L21/68707

Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

公开(公告)号：US20170330786A1

公开(公告)日：2017-11-16

申请号：US15668673

申请日：2017-08-03

Applicant: Lam Research Corporation

Inventor： Damon Tyrone Genetti ,  Jon McChesney ,  Alex Paterson ,  Derek John Witkowicki ,  Austin Ngo

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/683

CPC classification number: H01L21/6875 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67386 ,  H01L21/67742 ,  H01L21/6838 ,  H01L21/68707 ,  H01L21/68735 ,  H01L21/68785

Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

公开(公告)号：US20170113355A1

公开(公告)日：2017-04-27

申请号：US15048940

申请日：2016-02-19

Applicant: Lam Research Corporation

Inventor： Damon Tyrone Genetti ,  Jon McChesney ,  Alex Paterson ,  Derek John Witkowicki ,  Austin Ngo

IPC: B25J15/00

CPC classification number: B25J15/0014 ,  B25J11/0095 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67383 ,  H01L21/67742 ,  H01L21/68707

Abstract: A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.