公开(公告)号：US20200099318A1

公开(公告)日：2020-03-26

申请号：US16584567

申请日：2019-09-26

Applicant: MEMS Drive, Inc.

Inventor： Guiqin Wang ,  Matthew Ng ,  Xiaolei Liu

IPC: H02N2/02 ,  H02N1/00 ,  H02K41/035 ,  G03B13/36 ,  G02B7/09 ,  G02B27/64 ,  G03B5/02 ,  G03B5/04 ,  G02B5/20 ,  G03B11/00

Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.

公开(公告)号：US20190308871A1

公开(公告)日：2019-10-10

申请号：US16385486

申请日：2019-04-16

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US10322925B2

公开(公告)日：2019-06-18

申请号：US15165893

申请日：2016-05-26

Applicant: MEMS DRIVE, INC.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B7/02 ,  H01H3/60 ,  B81B7/00 ,  B81B3/00 ,  H02N1/00

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US20190157988A1

公开(公告)日：2019-05-23

申请号：US16252042

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

IPC: H02N1/00

Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

公开(公告)号：US20180076739A1

公开(公告)日：2018-03-15

申请号：US15699201

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Xiaolei Liu ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  H01L41/053

Abstract: INVENTION #7A micro-electrical-mechanical system (MEMS) device includes one or more slidable connection assemblies for releasably coupling the micro-electrical-mechanical system (MEMS) device to a wafer from which the micro-electrical-mechanical system (MEMS) device was made.

公开(公告)号：US20180076738A1

公开(公告)日：2018-03-15

申请号：US15699137

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Matthew Ng ,  Xiaolei Liu

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00

Abstract: A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

公开(公告)号：US20180076737A1

公开(公告)日：2018-03-15

申请号：US15698917

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang

IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00

Abstract: A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.

公开(公告)号：US20200152856A1

公开(公告)日：2020-05-14

申请号：US16679219

申请日：2019-11-10

Applicant: MEMS Drive, Inc.

Inventor： Guiqin Wang ,  Xiaolei Liu ,  Mahmood Samiee ,  Yufeng Wang

IPC: H01L41/09 ,  H01L41/253 ,  H01L41/29 ,  H01L41/317 ,  H01L41/316 ,  H01L41/332

Abstract: A method of generating a piezoelectric actuator includes: forming a piezoelectric member upon a rigid substrate; and removing one or more portions of the rigid substrate to form one or more gaps in the rigid substrate, thus defining at least one deformable portion of the piezoelectric member and at least one rigid portion of the piezoelectric member

公开(公告)号：US10523134B2

公开(公告)日：2019-12-31

申请号：US14656618

申请日：2015-03-12

Applicant: MEMS DRIVE, INC.

Inventor： Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez

IPC: H02N1/00 ,  B81B3/00

Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

公开(公告)号：US20190152765A1

公开(公告)日：2019-05-23

申请号：US16251933

申请日：2019-01-18

Applicant: MEMS Drive, Inc.

Inventor： Gerardo Morabito ,  Xiaolei Liu ,  Guiqin Wang ,  Roman Gutierrez ,  Matthew Ng

IPC: B81B3/00 ,  H02N1/00 ,  B81B7/00

Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.