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公开(公告)号：US20200241578A9
公开(公告)日：2020-07-30
申请号：US16124669
申请日：2018-09-07
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US20200081459A1
公开(公告)日：2020-03-12
申请号：US16124669
申请日：2018-09-07
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US10126760B2
公开(公告)日：2018-11-13
申请号：US14209216
申请日：2014-03-13
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC: G05D7/06
Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
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公开(公告)号：US20170199529A1
公开(公告)日：2017-07-13
申请号：US15419047
申请日：2017-01-30
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
CPC classification number: G05D7/0635 , G01F1/88 , G01F15/002 , G01F15/005 , G01F25/003 , G01F25/0053 , Y10T137/776
Abstract: A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.
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公开(公告)号：US20230127693A1
公开(公告)日：2023-04-27
申请号：US17452030
申请日：2021-10-22
Applicant: MKS Instruments, Inc.
Inventor： Chad David Wilson , Gerardo A. Brucker , Junhua Ding
Abstract: Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output representative of a relative concentration of one gas of the binary gas mixture is provided. The relative concentration is determined as a function of the sensed mass flow rate and the sensed total pressure.
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Patent Agency Ranking
公开(公告)号：US11513542B2
公开(公告)日：2022-11-29
申请号：US16898016
申请日：2020-06-10
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
IPC: G05D7/06 , G01F1/36 , G01F15/00 , C23C16/455
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US20220161288A1
公开(公告)日：2022-05-26
申请号：US17455626
申请日：2021-11-18
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Pulsed gas delivery is obtained with mass flow control using a thermal mass flow sensor and control valve. The controller is augmented for pressure control with a downstream pressure sensor. In separate control modes of operation, the control valve is controlled in response to the flow sensor during pulse gas delivery mode and controlled in response to the downstream pressure sensor during pressure control mode of operation.
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公开(公告)号：US20210263541A1
公开(公告)日：2021-08-26
申请号：US16800363
申请日：2020-02-25
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
Abstract: A system and method for dividing a single mass flow into secondary flows of a desired ratio. The system and method include paths for the secondary flows that include a laminar flow element and two pressure sensors. The nonlinear relationship between flow and pressure upstream and downstream of the laminar flow elements can be transformed into a function comprised of the upstream and downstream pressure that has a linear relationship with the flow. This transformation allows for flow ratio control applications using signals from pressure sensors even if there is no information the fluid species and the flow rate into the flow ratio controller.
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公开(公告)号：US09952078B2
公开(公告)日：2018-04-24
申请号：US14304463
申请日：2014-06-13
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Kaveh H. Zarkar
CPC classification number: G01F1/80 , G01F5/00 , G01F25/00 , G01F25/0038 , G01F25/0053
Abstract: This disclosure relates to mass flow verification systems for and methods of measuring and verifying the mass flow through a mass flow delivery/measurement device such as a mass flow controller. A mass flow verification system comprises a preset volume, a temperature sensor, and a pressure sensor. The measured verified flow determined by the mass flow verification system can be adjusted to compensate for errors resulting from a dead volume within the mass flow measurement device.
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20.发明申请Method and Apparatus for Self Verification of Pressured Based Mass Flow Controllers 审中-公开基于压力的质量流量控制器的自我验证方法和装置公开(公告)号：US20140083514A1
公开(公告)日：2014-03-27
申请号：US13626432
申请日：2012-09-25
Applicant: MKS INSTRUMENTS, INC.
Inventor： Junhua Ding
IPC: F17D3/01
CPC classification number: G01F1/363 , G01F1/86 , G01F1/88 , G01F15/022 , G01F15/024 , G01F15/043 , G01F15/046 , G01F25/0007 , G05D7/0647 , Y10T137/0379 , Y10T137/7761
Abstract: A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.
Abstract translation: 当控制进入过程的流量时，质量流量控制系统可以自我验证其精度。 该系统包括：控制阀，用于根据控制信号控制通过系统的流体的流动; 用于产生控制信号的控制器，其作为通过系统的流体的测量流量和目标流量设定点的函数; 用于测量用于测量和验证流量的控制流体压力的压力传感器; 以及用于提供已知体积的流体的流体源，用于在流量控制过程的步骤之间随时验证系统精度。
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