公开(公告)号：US10926452B2

公开(公告)日：2021-02-23

申请号：US15990155

申请日：2018-05-25

Applicant: Magic Leap, Inc.

Inventor： Roy Patterson ,  Charles Scott Carden ,  Satish Sadam ,  Ryan Christiansen ,  Matthew S. Shafran ,  Christopher John Fleckenstein ,  Vikramjit Singh ,  Michael Nevin Miller ,  Kang Luo

IPC: B29C59/04 ,  B29C43/22 ,  B29C43/28 ,  B29C43/30 ,  B29C43/34 ,  B29C43/48 ,  B29C43/50 ,  B29C43/52 ,  B29C43/58 ,  G03F7/00

Abstract: Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.

公开(公告)号：US12204258B2

公开(公告)日：2025-01-21

申请号：US18014327

申请日：2021-08-06

Applicant: Magic Leap, Inc.

Inventor： Jeremy Lee Sevier ,  Satish Sadam ,  Joseph Michael Imhof ,  Kang Luo ,  Kangkang Wang ,  Roy Matthew Patterson ,  Qizhen Xue ,  Brett William Best ,  Charles Scott Carden ,  Matthew S. Shafran ,  Michael Nevin Miller

IPC: G03F9/00 ,  G03F7/00

Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

公开(公告)号：US12083733B2

公开(公告)日：2024-09-10

申请号：US17938550

申请日：2022-10-06

Applicant: Magic Leap, Inc.

Inventor： Roy Patterson ,  Charles Scott Carden ,  Satish Sadam ,  Ryan Christiansen ,  Matthew S. Shafran ,  Christopher John Fleckenstein ,  Vikramjit Singh ,  Michael Nevin Miller ,  Kang Luo

IPC: B29C59/04 ,  B29C43/22 ,  B29C43/28 ,  B29C43/30 ,  B29C43/34 ,  B29C43/48 ,  B29C43/50 ,  B29C43/52 ,  B29C43/58 ,  B29C51/26 ,  G03F7/00

CPC classification number: B29C59/04 ,  B29C43/222 ,  B29C43/28 ,  B29C43/305 ,  B29C43/34 ,  B29C43/48 ,  B29C43/50 ,  B29C43/52 ,  B29C43/58 ,  B29C51/262 ,  G03F7/0002 ,  B29C2043/3433

Abstract: Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.

公开(公告)号：US20180339437A1

公开(公告)日：2018-11-29

申请号：US15990155

申请日：2018-05-25

Applicant: Magic Leap, Inc.

Inventor： Roy Patterson ,  Charles Scott Carden ,  Satish Sadam ,  Ryan Christiansen ,  Matthew S. Shafran ,  Christopher John Fleckenstein ,  Vikramjit Singh ,  Michael Nevin Miller ,  Kang Luo

IPC: B29C43/30 ,  B29C43/58 ,  G03F7/00 ,  B29C43/22 ,  B29C43/28 ,  B29C43/52 ,  B29C43/34 ,  B29C43/48 ,  B29C43/50

Abstract: Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.