公开(公告)号：US07925076B2

公开(公告)日：2011-04-12

申请号：US11836452

申请日：2007-08-09

申请人： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

发明人： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

IPC分类号： G06K9/00

CPC分类号： G06K9/6203 ,  G06K2209/19 ,  G06T7/32 ,  G06T2207/10056 ,  G06T2207/30148

摘要： An inspection apparatus performing template matching of a search image capable of outputting a correct matching position even if a pattern similar to a template exists in the search image is provided. The inspection apparatus includes a template cutout means for cutting out a template from a template selection image, a marginal similarity calculation means for calculating marginal similarity distribution information, which is a similarity distribution of the template selection image to the template, a search image similarity calculation part for calculating search image similarity distribution information, which is a similarity distribution of the search image to the template, a similarity distribution-to-similarity distribution similarity calculation means for calculating similarity distribution-to-similarity distribution similarity information between the marginal similarity distribution information and the search image similarity distribution information, and a matching position determination part for determining a matching position based on the similarity distribution-to-similarity distribution similarity.

摘要翻译： 提供了即使在搜索图像中存在类似于模板的图案，也能够执行能够输出正确的匹配位置的搜索图像的模板匹配的检查装置。 所述检查装置包括用于从模板选择图像切割模板的模板切除装置，用于计算作为模板选择图像与模板的相似度分布的边缘相似度分布信息的边缘相似度计算装置，搜索图像相似度计算 用于计算搜索图像与模板的相似度分布的搜索图像相似度分布信息的部分，用于计算边缘相似度分布信息之间的相似度分布 - 相似度分布相似度信息的相似度分布 - 相似度分布相似度计算装置 以及搜索图像相似度分布信息，以及匹配位置确定部分，用于基于相似度分布与相似度分布相似度来确定匹配位置。

公开(公告)号：US08041104B2

公开(公告)日：2011-10-18

申请号：US11207936

申请日：2005-08-22

申请人： Yasutaka Toyoda ,  Mitsuji Ikeda ,  Atsushi Takane

发明人： Yasutaka Toyoda ,  Mitsuji Ikeda ,  Atsushi Takane

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G01R31/307 ,  G06K9/3216 ,  G06T7/74 ,  G06T2207/30148 ,  H01J2237/2817

摘要： A pattern matching apparatus comprising: means for storing photographed image data of a semiconductor device; means for storing CAD data of said semiconductor device; an information input means for inputting information on the white band width contained in said image data; a pattern extracting means for extracting a pattern on the semiconductor device from said image data by using the white band width information; and a matching means for matching said pattern with the CAD data.

摘要翻译： 一种图案匹配装置，包括：用于存储半导体器件的摄影图像数据的装置; 用于存储所述半导体器件的CAD数据的装置; 信息输入装置，用于输入包含在所述图象数据中的白带宽的信息; 模式提取装置，用于通过使用白色带宽信息从所述图像数据中提取半导体装置上的图案; 以及用于将所述图案与CAD数据相匹配的匹配装置。

公开(公告)号：US20130170757A1

公开(公告)日：2013-07-04

申请号：US13807666

申请日：2011-05-13

申请人： Shinichi Shinoda ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda ,  Hiroyuki Ushiba

发明人： Shinichi Shinoda ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda ,  Hiroyuki Ushiba

IPC分类号： G06K9/00

CPC分类号： G06K9/00 ,  G06K9/6202 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： Disclosed is a method for creating a template for the purpose of performing pattern matching on the basis of a template image having high contrast. Also disclosed is an image processing apparatus. In the method for creating the template, design data is partially extracted, and on the basis of the extracted partial region, the template for template matching is created. In the image processing apparatus, such method is performed. In the method and the apparatus, a density of edges that belong to a predetermined region in the design data equivalent to the region to be searched for in the template matching is obtained.

摘要翻译： 公开了一种用于基于具有高对比度的模板图像来进行模式匹配的目的来创建模板的方法。 还公开了一种图像处理装置。 在创建模板的方法中，部分提取设计数据，并且基于提取的部分区域，创建用于模板匹配的模板。 在图像处理装置中，执行这种方法。 在该方法和装置中，获得属于与模板匹配中要搜索的区域等同的设计数据中的预定区域的边缘的密度。

公开(公告)号：US20060045326A1

公开(公告)日：2006-03-02

申请号：US11207936

申请日：2005-08-22

申请人： Yasutaka Toyoda ,  Mitsuji Ikeda ,  Atsushi Takane

发明人： Yasutaka Toyoda ,  Mitsuji Ikeda ,  Atsushi Takane

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G01R31/307 ,  G06K9/3216 ,  G06T7/74 ,  G06T2207/30148 ,  H01J2237/2817

摘要： A pattern matching apparatus comprising: means for storing photographed image data of a semiconductor device; means for storing CAD data of said semiconductor device; an information input means for inputting information on the white band width contained in said image data; a pattern extracting means for extracting a pattern on the semiconductor device from said image data by using the white band width information; and a matching means for matching said pattern with the CAD data.

摘要翻译： 一种图案匹配装置，包括：用于存储半导体器件的摄影图像数据的装置; 用于存储所述半导体器件的CAD数据的装置; 信息输入装置，用于输入包含在所述图象数据中的白带宽的信息; 模式提取装置，用于通过使用白色带宽信息从所述图像数据中提取半导体装置上的图案; 以及用于将所述图案与CAD数据相匹配的匹配装置。

公开(公告)号：US10535129B2

公开(公告)日：2020-01-14

申请号：US13981963

申请日：2011-12-07

申请人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

发明人： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC分类号： G06T7/00

摘要： It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

公开(公告)号：US20110129140A1

公开(公告)日：2011-06-02

申请号：US13055870

申请日：2009-06-29

申请人： Masahiro Kitazawa ,  Mitsuji Ikeda

发明人： Masahiro Kitazawa ,  Mitsuji Ikeda

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： Provided is a defect review device enabling identification of a defect and a defect coordinate 33. The defect review device comprises a distance inspection image generation unit 5 for generating, on the basis of an inspection image 28, a distance inspection image 29 in which distance values between pixels constituting the contour of an actual pattern 28a and pixels lying in a direction normal to the contour are set in respect of the individual pixels, a distance design image generation unit 6 for generating a distance design image 27 in which values between pixels constituting the contour of a design pattern 26a corresponding to the actual pattern 28a and pixels lying in a direction normal to the contour are set in respect of the individual pixels, a distance difference image generation unit 9 for generating a distance difference image 30 in which differences in distance value between the distance design image 27 and the distance inspection image 29 are set in respect of the individual pixels, and a defect coordinate identifying unit 10 for identifying, on the basis of the distance difference image 30, a defect coordinate 33 at which a defect 28b takes place.

摘要翻译： 提供了能够识别缺陷和缺陷坐标33的缺陷检查装置。缺陷检查装置包括距离检查图像生成单元5，用于基于检查图像28生成距离检查图像29，其中距离值 构成实际图案28a的轮廓的像素和与轮廓垂直的方向的像素相对于各个像素设置距离设计图像生成单元6，用于生成距离设计图像27，其中构成 相对于各个像素设置与实际图案28a对应的设计图案26a的轮廓和垂直于轮廓的方向的像素，距离差图像生成单元9，用于生成距离差图像30，其中距离差 距离设计图像27和距离检查图像29之间的值相对于个体被设定 像素，以及缺陷坐标识别单元10，用于基于距离差图像30识别发生缺陷28b的缺陷坐标33。

公开(公告)号：US20080205769A1

公开(公告)日：2008-08-28

申请号：US12010763

申请日：2008-01-29

申请人： Junichi Taguchi ,  Mitsuji Ikeda

发明人： Junichi Taguchi ,  Mitsuji Ikeda

IPC分类号： G06K9/62

CPC分类号： G06K9/6202 ,  G06K9/685

摘要： A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

摘要翻译： 通过自相关选择具有高相关性的类似图像，执行从为模板拍摄的图像中选择的模板原始图像，并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘，形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能，以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值，使得错误地识别与要检测的图像相似的图像的概率 。

公开(公告)号：US5538574A

公开(公告)日：1996-07-23

申请号：US177549

申请日：1994-01-05

申请人： Mitsuji Ikeda ,  Ryoichi Mine ,  Masayuki Nozaki ,  Tadashi Sugiura

发明人： Mitsuji Ikeda ,  Ryoichi Mine ,  Masayuki Nozaki ,  Tadashi Sugiura

IPC分类号： B29C70/84 ,  G02B6/36 ,  G02B6/44 ,  B29C63/18 ,  B29C65/02

CPC分类号： G02B6/442 ,  B29C70/84 ,  B29L2031/3412 ,  G02B6/3644

摘要： A method is disclosed for producing an optical fiber composite insulator, including the steps of: preliminarily heating the insulator body in its entirety at not less than 70.degree. C., then filling said organic insulating material into the through hole while said at least one optical fiber is being stretched straight, and then curing the organic insulating material by heating in a temperature range of not less than 75.degree. C. but not more than 90.degree. C. while at least one optical fiber is kept stretched straight.

摘要翻译： 公开了一种用于制造光纤复合绝缘体的方法，包括以下步骤：将绝缘体整体预先加热至不低于70℃，然后将所述有机绝缘材料填充到通孔中，同时所述至少一个光学 纤维被拉伸直，然后在不低于75℃但不超过90℃的温度范围内加热固化有机绝缘材料，同时保持至少一根光纤被拉直。

公开(公告)号：US5127083A

公开(公告)日：1992-06-30

申请号：US669006

申请日：1991-03-13

申请人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

发明人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

IPC分类号： G02B6/46 ,  G02B6/00 ,  G02B6/44 ,  H01B17/00 ,  H01B19/00

CPC分类号： G02B6/442

摘要： An excellent optical fiber built-in type composite insulator is provided having a reliable and durable sealing portion in a central axis penetration hole of the insulator for sealing the optical fiber in a very quick, simple and economical way with reduced members, devices and production steps. The composite insulator includes a ceramic insulator having a penetration hole in its central axis portion, at least one optical fiber inserted in the penetration hole, and sealing portions made of inorganic glass arranged at both ends of the penetration hole for sealing the optical fiber therein, and comprises recessed portions of the ceramic insulator arranged around the ends of the penetration hole, and heat generating elements arranged in the recessed portions for heating and melting the inorganic glass to form the sealing portions at the both ends of the penetration hole. The present invention provides also a method of producing the composite insulator.

公开(公告)号：US5090793A

公开(公告)日：1992-02-25

申请号：US683076

申请日：1991-04-10

申请人： Shoji Seike ,  Toshiyuki Mima ,  Masayuki Nozaki ,  Naoki Tani ,  Mitsuji Ikeda

发明人： Shoji Seike ,  Toshiyuki Mima ,  Masayuki Nozaki ,  Naoki Tani ,  Mitsuji Ikeda

IPC分类号： G02B6/44 ,  H01B17/00

CPC分类号： G02B6/4463 ,  G02B6/442 ,  H01B17/005

摘要： An optical fiber composite insulator including a hollow insulator body having an axial through-hole and at least one optical fiber extended through the through-hole and hermetically sealed to the inner surface of the through-hole by a sealing material. A relationship between a condition of the inner surface of the through-hole and the sealing material, a relationship between the inner diameters of the through-hole and the outer diameter of the hollow insulator body or a coating material on the optical fiber are selected to provide high insulating property, mechanical strength and airtight property of the optical fiber composite insulator.