SiC crystal and semiconductor device
    13.
    发明授权
    SiC crystal and semiconductor device 有权
    SiC晶体和半导体器件

    公开(公告)号:US07855385B2

    公开(公告)日:2010-12-21

    申请号:US12152016

    申请日:2008-05-12

    IPC分类号: H01L31/0312

    摘要: The present invention discloses a SiC crystal, comprising: acceptor impurities that are in a concentration greater than 5×1017 cm−3; donor impurities that are in a concentration less than 1×1019 cm−3 and greater than the concentration of the acceptor impurities. The present invention discloses a semiconductor device, comprising: a SiC fluorescent layer having acceptor impurities that are in a concentration greater than 5×1017 cm−3 and donor impurities that are in a concentration less than 1×1019 cm−3 and greater than the concentration of the acceptor impurities; and a light emission layer that is layered on the SiC fluorescent layer and emits excitation light for the SiC fluorescent layer.

    摘要翻译: 本发明公开了一种SiC晶体,其包含:浓度大于5×1017cm-3的受主杂质; 供体杂质浓度小于1×1019 cm-3,大于受主杂质的浓度。 本发明公开了一种半导体器件,包括:具有浓度大于5×1017cm-3的受主杂质的SiC荧光层和浓度小于1×1019 cm -3并且大于 受体杂质浓度; 以及层叠在SiC荧光层上并发射用于SiC荧光层的激发光的发光层。

    Method and apparatus for forming nitrided silicon film
    15.
    发明申请
    Method and apparatus for forming nitrided silicon film 审中-公开
    形成氮化硅膜的方法和装置

    公开(公告)号:US20050255713A1

    公开(公告)日:2005-11-17

    申请号:US10520815

    申请日:2003-07-04

    摘要: A method for forming a silicon nitride film which comprises heating a substrate (2) placed in the inner space (3) of a chamber (4) to a desired temperature, feeding a hexamethyl disilazane gas and a gas containing active species formed by the plasma excitation of an N2 gas to the chamber (4) holding the substrate (2), to thereby deposit a reaction product formed by the reaction of the hexaalkyldisilazan gas with the above active species and form the silicon nitride film. The method allows the formation of a silicon nitride film being reduced in the contents of carbon and hydrogen with safety and good efficiency.

    摘要翻译: 一种形成氮化硅膜的方法,其包括将放置在室(4)的内部空间(3)中的衬底(2)加热到所需温度,将六甲基二硅氮烷气体和包含由等离子体形成的活性物质的气体 将N 2 O 2气体激发到保持基板(2)的室(4),从而沉积由六烷基二硅氮烷气体与上述活性物质反应形成的反应产物,并形成氮化硅 电影。 该方法允许形成氮化硅膜,其安全性和效率降低了碳和氢的含量。

    Electronic component
    16.
    发明申请
    Electronic component 失效
    电子元器件

    公开(公告)号:US20050046517A1

    公开(公告)日:2005-03-03

    申请号:US10926289

    申请日:2004-08-26

    摘要: An electronic component of the invention has: a substrate; first to third terminal portions disposed on the substrate; and at least one spiral conductor portion disposed between the first and second terminal portions. The third terminal portion is not electrically connected to other portions of the substrate, and the first and second terminal portions are electrically connected to or disconnected from each other. In the electronic component, the number of production steps is smaller, the cost is lower, and a more highly accurate inductor component is realized as compared with a laminated electronic component in which emphasis is put on increase of the capacitor component. It is possible to realize an electronic component having accurate band- or low-pass filter characteristics.

    摘要翻译: 本发明的电子部件具有:基板; 设置在基板上的第一至第三端子部分; 以及设置在第一和第二端子部分之间的至少一个螺旋导体部分。 第三端子部分不与衬底的其它部分电连接,并且第一和第二端子部分彼此电连接或断开。 在电子部件中,与层叠电子部件相比,制造步骤的数量更少,成本更低,并且与重视电容器部件的增加的层叠电子部件相比,实现更高精度的电感器部件。 可以实现具有精确的带通或低通滤波特性的电子部件。

    Mist generator, film formation apparatus, and method of forming film using the film formation apparatus

    公开(公告)号:US11534791B2

    公开(公告)日:2022-12-27

    申请号:US15931968

    申请日:2020-05-14

    IPC分类号: B05B17/06 B05B7/00 H01L21/02

    摘要: A mist generator may include a reservoir storing a solution, a plurality of ultrasonic vibrators, a mist delivery path, and a mist collector. The plurality of ultrasonic vibrators may be disposed under the reservoir and configured to apply ultrasonic vibration to the solution stored in the reservoir to generate mist of the solution in the reservoir. The mist delivery path may be configured to deliver the mist from an inside of the reservoir to an outside of the reservoir. The mist collector may be disposed above the solution in the reservoir, wherein an upper end of the mist collector may be connected to an upstream end of the mist delivery path, a lower end of the mist collector may include an opening, and a width of the mist collector may increase from the upper end toward the opening. The plurality of ultrasonic vibrators may be located directly under the opening.

    Method and circuit for asynchronous transmission
    20.
    发明授权
    Method and circuit for asynchronous transmission 有权
    用于异步传输的方法和电路

    公开(公告)号:US07936792B2

    公开(公告)日:2011-05-03

    申请号:US11063196

    申请日:2005-02-22

    IPC分类号: H04J3/06

    CPC分类号: H04L25/40 H04L25/38

    摘要: The present invention relates to serial asynchronous transmission of data of fixed length in which a start bit and a stop bit are inserted at the head and tail, respectively, of the data. The insertion of a fixed bit having a predetermined logical value every predetermined number of bits of the data allows an idle state period to be reduced up to the predetermined number of bits plus 1 bit, resulting in considerable improvement in transmission efficiency.

    摘要翻译: 本发明涉及固定长度的数据的串行异步传输,其中起始位和停止位分别插入数据的头部和尾部。 每隔预定数量的位数插入具有预定逻辑值的固定位允许将空闲状态周期减少到预定位数加上1位,导致传输效率显着提高。