MODE-LOCKED SEMICONDUCTOR LASER DEVICE AND DRIVING METHOD THEREOF
    13.
    发明申请
    MODE-LOCKED SEMICONDUCTOR LASER DEVICE AND DRIVING METHOD THEREOF 有权
    模式锁定半导体激光器件及其驱动方法

    公开(公告)号:US20110216788A1

    公开(公告)日:2011-09-08

    申请号:US13035540

    申请日:2011-02-25

    IPC分类号: H01S3/098

    摘要: Provided is a driving method of a mode-locked semiconductor laser device comprising a laminated structure in which a first compound semiconductor layer, a third compound semiconductor layer having an emission region and a second compound semiconductor layer are successively laminated, a second electrode, and a first electrode. The laminated structure is formed on a compound semiconductor substrate having polarity, the third compound semiconductor layer includes a quantum well structure having a well layer and a barrier layer. The well layer has a depth of 1 nm or more and 10 nm or less. The barrier layer has an impurity doping density of 2×1018 cm−3 or more and 1×1020 cm−3 or less. An optical pulse is generated in the emission region by passing a current from the second electrode to the first electrode via the laminated structure.

    摘要翻译: 提供了一种锁模半导体激光器件的驱动方法,其包括层叠结构,其中第一化合物半导体层,具有发射区域的第三化合物半导体层和第二化合物半导体层被连续层压,第二电极和 第一电极。 层叠结构形成在具有极性的化合物半导体基板上,第三化合物半导体层包括具有阱层和阻挡层的量子阱结构。 阱层的深度为1nm以上且10nm以下。 势垒层的杂质掺杂密度为2×1018cm-3以上且1×1020cm-3以下。 通过将电流从第二电极通过层压结构传递到第一电极,在发射区域中产生光脉冲。

    Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same
    16.
    发明授权
    Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same 有权
    双段半导体激光装置及其制造方法及其驱动方法

    公开(公告)号:US08575626B2

    公开(公告)日:2013-11-05

    申请号:US13553380

    申请日:2012-07-19

    IPC分类号: H01L27/15 H01L21/00

    摘要: A method for manufacturing a bi-section semiconductor laser device includes the steps of (A) forming a stacked structure obtained by stacking, on a substrate in sequence, a first compound semiconductor layer of a first conductivity type, a compound semiconductor layer that constitutes a light-emitting region and a saturable absorption region, and a second compound semiconductor layer of a second conductivity type; (B) forming a belt-shaped second electrode on the second compound semiconductor layer; (C) forming a ridge structure by etching at least part of the second compound semiconductor layer using the second electrode as an etching mask; and (D) forming a resist layer for forming a separating groove in the second electrode and then forming the separating groove in the second electrode by wet etching so that the separating groove separates the second electrode into a first portion and a second portion.

    摘要翻译: 一种制造双相半导体激光器件的方法包括以下步骤:(A)形成叠层结构,其通过在基板上依次层叠第一导电类型的第一化合物半导体层,构成第一导电类型的化合物半导体层 发光区域和可饱和吸收区域;以及第二导电类型的第二化合物半导体层; (B)在第二化合物半导体层上形成带状的第二电极; (C)通过使用所述第二电极作为蚀刻掩模蚀刻所述第二化合物半导体层的至少一部分来形成脊结构; 和(D)在第二电极中形成用于形成分隔槽的抗蚀剂层,然后通过湿蚀刻在第二电极中形成分隔槽,使得分离槽将第二电极分离成第一部分和第二部分。

    Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same
    18.
    发明授权
    Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same 有权
    双段半导体激光装置及其制造方法及其驱动方法

    公开(公告)号:US08329483B2

    公开(公告)日:2012-12-11

    申请号:US12726524

    申请日:2010-03-18

    IPC分类号: H01L21/00

    摘要: A method for manufacturing a bi-section semiconductor laser device includes the steps of (A) forming a stacked structure obtained by stacking, on a substrate in sequence, a first compound semiconductor layer of a first conductivity type, a compound semiconductor layer that constitutes a light-emitting region and a saturable absorption region, and a second compound semiconductor layer of a second conductivity type; (B) forming a belt-shaped second electrode on the second compound semiconductor layer; (C) forming a ridge structure by etching at least part of the second compound semiconductor layer using the second electrode as an etching mask; and (D) forming a resist layer for forming a separating groove in the second electrode and then forming the separating groove in the second electrode by wet etching so that the separating groove separates the second electrode into a first portion and a second portion.

    摘要翻译: 一种制造双相半导体激光器件的方法包括以下步骤:(A)形成叠层结构,其通过在基板上依次层叠第一导电类型的第一化合物半导体层,构成第一导电类型的化合物半导体层 发光区域和可饱和吸收区域;以及第二导电类型的第二化合物半导体层; (B)在第二化合物半导体层上形成带状的第二电极; (C)通过使用所述第二电极作为蚀刻掩模蚀刻所述第二化合物半导体层的至少一部分来形成脊结构; 和(D)在第二电极中形成用于形成分隔槽的抗蚀剂层,然后通过湿蚀刻在第二电极中形成分隔槽,使得分离槽将第二电极分离成第一部分和第二部分。

    BI-SECTION SEMICONDUCTOR LASER DEVICE, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR DRIVING THE SAME
    19.
    发明申请
    BI-SECTION SEMICONDUCTOR LASER DEVICE, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR DRIVING THE SAME 有权
    双分半导体激光器件,其制造方法及其驱动方法

    公开(公告)号:US20120281726A1

    公开(公告)日:2012-11-08

    申请号:US13553380

    申请日:2012-07-19

    IPC分类号: H01S5/02

    摘要: A method for manufacturing a bi-section semiconductor laser device includes the steps of (A) forming a stacked structure obtained by stacking, on a substrate in sequence, a first compound semiconductor layer of a first conductivity type, a compound semiconductor layer that constitutes a light-emitting region and a saturable absorption region, and a second compound semiconductor layer of a second conductivity type; (B) forming a belt-shaped second electrode on the second compound semiconductor layer; (C) forming a ridge structure by etching at least part of the second compound semiconductor layer using the second electrode as an etching mask; and (D) forming a resist layer for forming a separating groove in the second electrode and then forming the separating groove in the second electrode by wet etching so that the separating groove separates the second electrode into a first portion and a second portion.

    摘要翻译: 一种制造双相半导体激光器件的方法包括以下步骤:(A)形成叠层结构,其通过在基板上依次层叠第一导电类型的第一化合物半导体层,构成第一导电类型的化合物半导体层 发光区域和可饱和吸收区域;以及第二导电类型的第二化合物半导体层; (B)在第二化合物半导体层上形成带状的第二电极; (C)通过使用所述第二电极作为蚀刻掩模蚀刻所述第二化合物半导体层的至少一部分来形成脊结构; 和(D)在第二电极中形成用于形成分隔槽的抗蚀剂层,然后通过湿蚀刻在第二电极中形成分隔槽,使得分离槽将第二电极分离成第一部分和第二部分。