摘要:
Of a substrate-facing surface 24 of an atmosphere blocking member 2, a central area 241 which is faced with an approximately central portion of a substrate S is a flat surface while a periphery edge area 242 which is faced with a periphery edge of the substrate S is an angled surface which becomes closer to the substrate S with a distance toward a periphery edge of the substrate-facing surface 24. Hence, a micro-space SP between the substrate S and the atmosphere blocking member 2 becomes gradually narrower in a direction R which is toward the periphery edge of the substrate S. As an atmosphere gas is fed into the micro-space SP, the atmosphere gas is compressed in the vicinity of a periphery edge of the micro-space SP and a pressure rises. As a result, the micro-space SP becomes positively pressurized as compared with a mist-splashed atmosphere, which effectively prevents a mist from invading other major surface S2 of the substrate S.
摘要:
A method of reducing surface tackiness of a silicone rubber cured product is provided. The method includes coating the surface of a cured product of a curable silicone rubber composition, which has a molar ratio within the composition of hydrogen atoms bonded to silicon atoms relative to alkenyl groups bonded to silicon atoms of 1.0 or greater, and which, following curing, exhibits a type A hardness prescribed in JIS K6253 of no more than 20, with a curable silicone resin layer which, following curing, exhibits a type D hardness prescribed in JIS K6253 of 30 or greater; and subsequently curing the silicone resin to form a cured resin layer with a thickness of no more than 0.5 mm. Adhesion of dirt to the surface can be prevented.
摘要:
The invention provides a thin film magnetic head which is capable of improving the reliability of a head by preventing an element structure from being contacted with a recording medium during a recording and a reproducing operations and capable of coping with a high recording density while favorably maintaining a low floating distance, and a method of manufacturing the same. The thin film magnetic head includes a slider that floats from a surface of a recording medium by an airflow generated on the surface of the recording medium to be rotated, and a thin film magnetic head element structure that is formed on an air discharging end face of the slider. A thermal plastic deformation portion is provided in the vicinity of the air discharging end face on a back surface of a recording medium facing surface of a slider so that a part of the thin film magnetic head element structure is further spaced from the surface of the recording medium than the recording medium facing surface of the slider.
摘要:
In a substrate cleaning apparatus, first cleaning solution is applied onto a substrate from a cleaning nozzle and the substrate is scrubbed with a brush, whereby the substrate is cleaned. While cleaning of the substrate is not performed, second cleaning solution is applied to the brush from a cleaning solution nozzle provided in a container to clean the brush. Since the second cleaning solution used in the substrate cleaning apparatus is almost neutral at hydrogen ion exponent pH of 6.5, and a zeta potential of the brush in the second cleaning solution has the same polarity as a zeta potential of particles which have adhered to the brush while cleaning the substrate, it is possible to efficiently remove particles adhering to the brush during cleaning of the substrate with suppressing deterioration of the brush.
摘要:
A substrate is supported at a plurality of edge positions thereof, to be in horizontal posture, by support pins erected on a spin chuck. A two-fluid nozzle is fixed to a position spaced from and directly over edges of the substrate to clean the edges. Substantially simultaneously therewith, a cleaning brush cleans the substrate while swinging over, in direct contact with, areas other than the edges of the substrate. The two-fluid nozzle delivers mist in a small quantity and in minute droplets. The mist is restrained from rebounding and scattering from the plurality of edge positions supported by the support pins of the spin chuck. The mist may be supplied to clean such positions.
摘要:
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During cleaning, it follows that both nozzles discharge detergents while keeping relative layout relation. Therefore, the discharged cleaning mist and rinsing deionized water do not interfere with each other before reaching the substrate but the used detergents are entirely horizontally splashed and recovered in a cup. Thus, the cleaning mist is prevented from scattering and adhering to the periphery.
摘要:
A cleaning nozzle includes a mixing portion with inner walls thereof formed of quartz given smoothing treatment. As a result, the inner walls of the mixing portion have smooth surfaces. This construction effectively suppresses abrasion of the inner walls of the mixing portion, and particle generation from the cleaning nozzle. Further, the cleaning nozzle has a supply pipe surrounding a gas introduction pipe. This reduces areas of contact in the mixing portion between a gas and inner walls of the cleaning nozzle, to suppress particle generation with increased effect.
摘要:
A circuit board assembly containing two pluralities of busbars or wires arranged in a lattice configuration, there being electrical continuity at each of the intersecting points. Slits are provided on each of the busbars which engage each other to complete the lattice. In the case of wires, they are bonded to each other. The conductive member thus formed may be sandwiched between two insulative films and is placed on an insulative plate which, in turn, is enclosed by an electrical connection box. The configuration provides substantial advantages in economy of production, simplified equipment required, and ease of altering the circuitry.
摘要:
A circuit board assembly containing two pluralities of busbars or wires arranged in a lattice configuration, there being electrical continuity at each of the intersecting points. Slits are provided on each of the busbars which engage each other to complete the lattice. In the case of wires, they are bonded to each other. The conductive member thus formed may be sandwiched between two insulative films and is placed on an insulative plate which, in turn, is enclosed by an electrical connection box. The configuration provides substantial advantages in economy of production, simplified equipment required, and ease of altering the circuitry.
摘要:
In a tape recorder provided with a power jack which includes a rod-like conductive member, a relay conductive member insulated from the rod-like conductive member, and an elastic conductive member having elasticity and being capable of moving a first position, at which the elastic conductive member is separated from the relay conductive member by inserting a plug to the power jack, and a second position, at which is in contact with and electrically connected to the relay conductive member, a main switch for the tape recorder comprises a cylindrical rotary member having an inner periphery, an outer periphery and a recess formed in the outer periphery. The rotary member is adapted to snugly fit on the rod-like conductive member of the power jack when inserted thereinto, and is rotatable on and about the rod-like conductive member between a first position, at which the outer periphery and the elastic conductive member are in contact with each other and the elastic conductive member is located in the first position, and a second position, at which the recess corresponds to and face the elastic conductive member to locate the elastic conductive member in the second position.