Substrate processing apparatus and substrate processing system
    11.
    发明授权
    Substrate processing apparatus and substrate processing system 失效
    基板加工装置及基板处理系统

    公开(公告)号:US07531039B2

    公开(公告)日:2009-05-12

    申请号:US10669520

    申请日:2003-09-24

    IPC分类号: B05C11/02 B05C13/02 B05B1/28

    摘要: Of a substrate-facing surface 24 of an atmosphere blocking member 2, a central area 241 which is faced with an approximately central portion of a substrate S is a flat surface while a periphery edge area 242 which is faced with a periphery edge of the substrate S is an angled surface which becomes closer to the substrate S with a distance toward a periphery edge of the substrate-facing surface 24. Hence, a micro-space SP between the substrate S and the atmosphere blocking member 2 becomes gradually narrower in a direction R which is toward the periphery edge of the substrate S. As an atmosphere gas is fed into the micro-space SP, the atmosphere gas is compressed in the vicinity of a periphery edge of the micro-space SP and a pressure rises. As a result, the micro-space SP becomes positively pressurized as compared with a mist-splashed atmosphere, which effectively prevents a mist from invading other major surface S2 of the substrate S.

    摘要翻译: 在大气阻挡构件2的面向基板的表面24中,面对基板S的大致中心部分的中心区域241是平坦表面,而面向基板的周边边缘的周边边缘区域242 S是朝向与基板相对的表面24的周边的距离更靠近基板S的成角度的表面。因此,基板S和气氛阻挡构件2之间的微空间SP在方向上逐渐变窄 R朝向基板S的周边边缘。当气氛气体被馈送到微空间SP中时,气氛气体在微空间SP的周边边缘附近被压缩并且压力上升。 结果,微雾SP与雾化气氛相比变得积极加压,这有效地防止了雾侵入基片S的其它主表面S2。

    Thin film magnetic head and manufacturing the same
    13.
    发明申请
    Thin film magnetic head and manufacturing the same 失效
    薄膜磁头和制造相同

    公开(公告)号:US20070025021A1

    公开(公告)日:2007-02-01

    申请号:US11486779

    申请日:2006-07-14

    IPC分类号: G11B5/60

    摘要: The invention provides a thin film magnetic head which is capable of improving the reliability of a head by preventing an element structure from being contacted with a recording medium during a recording and a reproducing operations and capable of coping with a high recording density while favorably maintaining a low floating distance, and a method of manufacturing the same. The thin film magnetic head includes a slider that floats from a surface of a recording medium by an airflow generated on the surface of the recording medium to be rotated, and a thin film magnetic head element structure that is formed on an air discharging end face of the slider. A thermal plastic deformation portion is provided in the vicinity of the air discharging end face on a back surface of a recording medium facing surface of a slider so that a part of the thin film magnetic head element structure is further spaced from the surface of the recording medium than the recording medium facing surface of the slider.

    摘要翻译: 本发明提供了一种薄膜磁头,其能够通过在记录和再现操作期间防止元件结构与记录介质接触而提高头的可靠性,并且能够处理高记录密度,同时有利地保持 低浮动距离及其制造方法。 薄膜磁头包括滑块,其通过在要旋转的记录介质的表面上产生的气流从记录介质的表面漂浮;以及薄膜磁头元件结构,形成在空气排出端面上 滑块。 在滑块的记录介质相对表面的后表面上的排气端面附近设置热塑性变形部分,使得薄膜磁头元件结构的一部分与记录表面进一步间隔开 比介于滑块的面向记录介质的介质。

    Substrate cleaning apparatus and substrate cleaning method
    14.
    发明申请
    Substrate cleaning apparatus and substrate cleaning method 审中-公开
    基板清洗装置和基板清洗方法

    公开(公告)号:US20060213536A1

    公开(公告)日:2006-09-28

    申请号:US11396435

    申请日:2006-03-24

    申请人: Masanobu Sato

    发明人: Masanobu Sato

    IPC分类号: B08B7/04 A47L25/00

    摘要: In a substrate cleaning apparatus, first cleaning solution is applied onto a substrate from a cleaning nozzle and the substrate is scrubbed with a brush, whereby the substrate is cleaned. While cleaning of the substrate is not performed, second cleaning solution is applied to the brush from a cleaning solution nozzle provided in a container to clean the brush. Since the second cleaning solution used in the substrate cleaning apparatus is almost neutral at hydrogen ion exponent pH of 6.5, and a zeta potential of the brush in the second cleaning solution has the same polarity as a zeta potential of particles which have adhered to the brush while cleaning the substrate, it is possible to efficiently remove particles adhering to the brush during cleaning of the substrate with suppressing deterioration of the brush.

    摘要翻译: 在基板清洗装置中,将第一清洗液从清洗喷嘴施加到基板上,用刷子擦洗基板,清洗基板。 在不进行基板的清洗的同时,将第二清洗液从设置在容器中的清洗液喷嘴施加到刷子上以清洁刷子。 由于在氢离子指数pH为6.5时在基板清洗装置中使用的第二清洗液几乎是中性的,所以第二清洗液中的刷子的ζ电位具有与粘附到刷子上的粒子的ζ电位相同的极性 在清洁基板的同时,可以在清洁基板的同时有效地去除附着在刷子上的颗粒,同时抑制刷子的劣化。

    Substrate cleaning apparatus and method
    15.
    发明授权
    Substrate cleaning apparatus and method 有权
    基板清洗装置及方法

    公开(公告)号:US06942737B2

    公开(公告)日:2005-09-13

    申请号:US10155643

    申请日:2002-05-22

    申请人: Masanobu Sato

    发明人: Masanobu Sato

    摘要: A substrate is supported at a plurality of edge positions thereof, to be in horizontal posture, by support pins erected on a spin chuck. A two-fluid nozzle is fixed to a position spaced from and directly over edges of the substrate to clean the edges. Substantially simultaneously therewith, a cleaning brush cleans the substrate while swinging over, in direct contact with, areas other than the edges of the substrate. The two-fluid nozzle delivers mist in a small quantity and in minute droplets. The mist is restrained from rebounding and scattering from the plurality of edge positions supported by the support pins of the spin chuck. The mist may be supplied to clean such positions.

    摘要翻译: 基板通过支撑在支架上的支撑销支撑在其多个边缘位置处以处于水平姿态。 双流体喷嘴固定在与衬底的边缘隔开并直接在衬底的边缘上方的位置,以清洁边缘。 与此同时,清洁刷在与基板的边缘以外的区域直接接触的同时摆动地清洗基板。 双流体喷嘴以少量和微小的液滴传送雾。 抑制从旋转卡盘的支撑销支撑的多个边缘位置的反弹和散射。 可以提供雾气来清理这些位置。

    Cleaning nozzle and substrate cleaning apparatus
    17.
    发明授权
    Cleaning nozzle and substrate cleaning apparatus 有权
    清洗喷嘴和基材清洗装置

    公开(公告)号:US06729561B2

    公开(公告)日:2004-05-04

    申请号:US09976134

    申请日:2001-10-11

    IPC分类号: B05B704

    摘要: A cleaning nozzle includes a mixing portion with inner walls thereof formed of quartz given smoothing treatment. As a result, the inner walls of the mixing portion have smooth surfaces. This construction effectively suppresses abrasion of the inner walls of the mixing portion, and particle generation from the cleaning nozzle. Further, the cleaning nozzle has a supply pipe surrounding a gas introduction pipe. This reduces areas of contact in the mixing portion between a gas and inner walls of the cleaning nozzle, to suppress particle generation with increased effect.

    摘要翻译: 清洁喷嘴包括具有由其进行平滑处理的由石英形成的内壁的混合部分。 结果,混合部分的内壁具有光滑的表面。 这种结构有效地抑制了混合部分的内壁磨损,并且从清洗喷嘴产生颗粒。 此外,清洁喷嘴具有围绕气体导入管的供给管。 这减少了气体与清洁喷嘴的内壁之间的混合部分的接触面积,从而以增加的效果抑制了颗粒的产生。

    Lattice-shaped circuit board
    18.
    发明授权

    公开(公告)号:US06593533B2

    公开(公告)日:2003-07-15

    申请号:US09902363

    申请日:2001-07-10

    IPC分类号: H01R1204

    摘要: A circuit board assembly containing two pluralities of busbars or wires arranged in a lattice configuration, there being electrical continuity at each of the intersecting points. Slits are provided on each of the busbars which engage each other to complete the lattice. In the case of wires, they are bonded to each other. The conductive member thus formed may be sandwiched between two insulative films and is placed on an insulative plate which, in turn, is enclosed by an electrical connection box. The configuration provides substantial advantages in economy of production, simplified equipment required, and ease of altering the circuitry.

    Lattice-shaped circuit board
    19.
    发明授权
    Lattice-shaped circuit board 失效
    格状电路板

    公开(公告)号:US06353190B1

    公开(公告)日:2002-03-05

    申请号:US09416021

    申请日:1999-10-08

    IPC分类号: H01R1204

    摘要: A circuit board assembly containing two pluralities of busbars or wires arranged in a lattice configuration, there being electrical continuity at each of the intersecting points. Slits are provided on each of the busbars which engage each other to complete the lattice. In the case of wires, they are bonded to each other. The conductive member thus formed may be sandwiched between two insulative films and is placed on an insulative plate which, in turn, is enclosed by an electrical connection box. The configuration provides substantial advantages in economy of production, simplified equipment required, and ease of altering the circuitry.

    摘要翻译: 一种电路板组件,其包含布置成格子构型的两组母线或导线,每个相交点处具有电连续性。 在彼此接合以完成格子的每个汇流排上设置有狭缝。 在电线的情况下,它们彼此结合。 如此形成的导电部件可以夹在两个绝缘膜之间,并且被放置在绝缘板上,绝缘板又由电接线盒包围。 该配置在生产经济性方面提供了显着的优势,需要简化的设备以及易于改变电路。

    Main switch for tape recorder
    20.
    发明授权
    Main switch for tape recorder 失效
    录音机主开关

    公开(公告)号:US4380691A

    公开(公告)日:1983-04-19

    申请号:US301224

    申请日:1981-09-11

    申请人: Masanobu Sato

    发明人: Masanobu Sato

    摘要: In a tape recorder provided with a power jack which includes a rod-like conductive member, a relay conductive member insulated from the rod-like conductive member, and an elastic conductive member having elasticity and being capable of moving a first position, at which the elastic conductive member is separated from the relay conductive member by inserting a plug to the power jack, and a second position, at which is in contact with and electrically connected to the relay conductive member, a main switch for the tape recorder comprises a cylindrical rotary member having an inner periphery, an outer periphery and a recess formed in the outer periphery. The rotary member is adapted to snugly fit on the rod-like conductive member of the power jack when inserted thereinto, and is rotatable on and about the rod-like conductive member between a first position, at which the outer periphery and the elastic conductive member are in contact with each other and the elastic conductive member is located in the first position, and a second position, at which the recess corresponds to and face the elastic conductive member to locate the elastic conductive member in the second position.

    摘要翻译: 在具有电源插座的磁带录音机中,该电源插座包括杆状导电部件,与棒状导电部件绝缘的中继导电部件,以及具有弹性且能够移动第一位置的弹性导电部件, 弹性导电构件通过将插头插入电源插座而与继电器导电构件分离,并且在与继电器导电构件接触并电连接的第二位置处,用于磁带录音机的主开关包括圆柱形旋转 具有形成在外周的内周,外周和凹部的构件。 旋转构件适于在插入其中时紧密配合在电源插座的棒状导电构件上,并且可以在杆状导电构件之间和周围在第一位置和第二位置之间旋转,在该第一位置处,外周和弹性导电构件 彼此接触并且弹性导电构件位于第一位置,并且第二位置处,凹部对应于并面对弹性导电构件,以将弹性导电构件定位在第二位置。