公开(公告)号：US07057731B2

公开(公告)日：2006-06-06

申请号：US10669651

申请日：2003-09-25

申请人： Masayuki Naya

发明人： Masayuki Naya

IPC分类号： G01N21/55

CPC分类号： G01N21/553

摘要： A small-sized measuring apparatus having a stray light suppressing capability for detecting the distribution of optical intensities on the cross section of a light beam having a predetermined wavelength contained in a light beam reflected from a measuring surface by entering a collimated light beam having a large cross sectional area into the measuring surface. A collimated light beam having a sufficient cross sectional area is entered into the interface between a dielectric block and a thin metal film formed on the dielectric block at an angle that satisfies the conditions of total reflection. A light beam having a predetermined wavelength is selected from the light beam totally reflected at the interface to detect the distribution of optical intensities for the selected light beam by the wavelength selecting section capable of eliminating stray light.

摘要翻译： 一种小尺寸测量装置，具有用于检测由测量表面反射的光束中包含的具有预定波长的光束的横截面上的光强度分布的入射到具有大尺寸的准直光束的杂散光抑制能力 横截面积进入测量面。 具有足够横截面面积的准直光束以满足全反射条件的角度进入介质块和形成在介质块上的薄金属膜之间的界面。 从在界面处全反射的光束中选择具有预定波长的光束，以检测能够消除杂散光的波长选择部分对所选择的光束的光强度的分布。

公开(公告)号：US07027159B2

公开(公告)日：2006-04-11

申请号：US10328165

申请日：2002-12-26

申请人： Masayuki Naya

发明人： Masayuki Naya

IPC分类号： G01N21/55

CPC分类号： G01N21/05 ,  G01N21/553 ,  G01N33/54373

摘要： A sensor utilizing an evanescent wave and comprising a light source for emitting a light beam and a measuring chip formed into the shape of a well. The measuring chip has a dielectric block and a thin film layer formed on one surface of the dielectric block. The sensor also includes an optical system for making the light beam enter the dielectric block at angles of incidence so that a total internal reflection condition is satisfied at an interface between the dielectric block and the thin film layer. The sensor further includes a sample supply-discharge unit which is detachably installed within the measuring chip. The sample supply-discharge unit is used for continuously supplying the sample onto the surface of the thin film layer and continuously discharging the supplied sample from the surface of the thin film layer.

公开(公告)号：US20060018211A1

公开(公告)日：2006-01-26

申请号：US11185868

申请日：2005-07-21

申请人： Kiichi Ueyanagi ,  Masayuki Naya ,  Yuichi Tomaru

发明人： Kiichi Ueyanagi ,  Masayuki Naya ,  Yuichi Tomaru

IPC分类号： G11B7/00

CPC分类号： G11B7/1387

摘要： A near-field light-emitting element includes a transparent medium having a plane of incidence into which a laser beam enters, and a light-condensing plane on which the laser beam having entered the plane of incidence is concentrated, and a metal body provided on the light-condensing plane of the transparent medium having a first surface contacting the light-condensing plane, a second surface opposing the first surface, and an aperture which is formed to penetrate through the first and second surfaces at a position where the laser beam is concentrated and which emits a near-field light obtained from the laser beam. The metal body is arranged apart from a center of the aperture by a predetermined distance to connect together the first and second surfaces, and has a plasmon reflection plane that reflects toward the aperture a surface plasmon excited on the first and second surfaces by the laser beam concentrated at the aperture.

公开(公告)号：US06885454B2

公开(公告)日：2005-04-26

申请号：US10108258

申请日：2002-03-28

申请人： Masayuki Naya ,  Nobufumi Mori ,  Toshihito Kimura ,  Hitoshi Shimizu ,  Shu Sato

发明人： Masayuki Naya ,  Nobufumi Mori ,  Toshihito Kimura ,  Hitoshi Shimizu ,  Shu Sato

IPC分类号： G01N21/55 ,  G01N21/41 ,  G02B17/00 ,  G02B26/08 ,  H04J14/08

CPC分类号： G01N21/553

摘要： A measuring apparatus is disclosed which includes a measuring unit equipped with a dielectric block and a thin film layer; an incidence system for making a light beam enter the dielectric block so that a condition for total internal reflection is satisfied at an interface between the dielectric block and the thin film layer; and a photodetector for receiving the light beam totally reflected at the interface. The measuring unit is measured a plurality of times, and a change in the state of attenuated total reflection during the plurality of measurements is detected. The sensor further includes a tilt measurement section for measuring the longitudinal tilt of the interface which changes the incidence angles during the plurality of measurements, and a calculating section for obtaining a measured value in which errors due to the longitudinal tilt have been corrected.

摘要翻译： 公开了一种测量装置，其包括配备有介质块和薄膜层的测量单元; 用于使光束进入介质块的入射系统使得在介电块和薄膜层之间的界面处满足全内反射条件; 以及用于接收在界面处全反射的光束的光电检测器。 测量测量单元多次，并且检测在多个测量期间衰减的全反射状态的变化。 传感器还包括用于测量在多个测量期间改变入射角的界面的纵向倾斜的倾斜测量部分，以及用于获得校正了由于纵向倾斜引起的误差的测量值的计算部分。

公开(公告)号：US06497996B1

公开(公告)日：2002-12-24

申请号：US09562076

申请日：2000-05-01

申请人： Masayuki Naya ,  Shinji Sakaguchi

发明人： Masayuki Naya ,  Shinji Sakaguchi

IPC分类号： G03F736

CPC分类号： G03F7/095 ,  G03F7/0757

摘要： As shown in FIG. 1A, a first resist film 2 comprising organic high molecules and a second resist film 3 comprising a photosensitive material are sequentially applied to a substrate 1 by the spin coat method or the spray method for forming a two-layer resist. Then, a mask 4 with which a metallic fine opening pattern 6 is formed on a mask substrate 5 comprising a dielectric, such as glass, is tightly contacted with the two-layer resist. Then, light is projected onto the back of the mask substrate to carry out exposure with near field light 7 which is effused from the opening portions of the mask 4 where no metal is formed. Then, a pattern is formed by processing the second resist layer 3 for development with a developing solution. Thereafter, with the pattern in the second resist layer 3 being used as a mask, the first resist layer 2 is dry-etched with O2 plasma to form a fine pattern having a high aspect ratio, and with the pattern in the two-layer resist, the substrate is worked by etching, vapor deposition, or the like, before the two-layer resist is peeled off.

摘要翻译： 如图所示。 如图1A所示，通过旋涂法或用于形成双层抗蚀剂的喷涂方法将包含有机高分子的第一抗蚀剂膜2和包含感光材料的第二抗蚀剂膜3依次施加到基板1上。 然后，在包括诸如玻璃的电介质的掩模基板5上形成有金属细孔图案6的掩模4与双层抗蚀剂紧密接触。 然后，将光投射到掩模基板的背面上，以从未形成金属的掩模4的开口部分流出的近场光7进行曝光。 然后，通过用显影液处理用于显影的第二抗蚀剂层3来形成图案。 此后，利用第二抗蚀剂层3中的图案作为掩模，用O 2等离子体干蚀刻第一抗蚀剂层2，以形成具有高纵横比的精细图案，并且在两层抗蚀剂中的图案 在剥离两层抗蚀剂之前，通过蚀刻，蒸镀等进行基板的加工。

公开(公告)号：US06417925B1

公开(公告)日：2002-07-09

申请号：US09645355

申请日：2000-08-25

申请人： Masayuki Naya

发明人： Masayuki Naya

IPC分类号： G01N2141

CPC分类号： G01N21/553

摘要： A surface plasmon sensor which can be placed under a liquid sample or in a humid atmosphere during operation. The surface plasmon sensor is constituted of a dielectric block 11, a metal film 12 which is superposed on one surface of the dielectric block 11, a light source 14 for generating a light beam 13, a front optical system 15 which enables the light beam 13 to realize a variety of angles of incidence on an interface 11a between the dielectric block 11 and the metal film 12, each of the angles satisfying a condition for total reflection on the interface 11a, including those angles satisfying a condition for the surface plasmon resonance, and a photodetector 16 which detects a state of the surface plasmon resonance by measuring intensity of the light beam 13 after the light beam 13 is totally reflected at the interface 11a. The dielectric block 11, the light source 14, the front optical system 15 and the photodetector 16 of the surface plasmon sensor are housed in a box 20 having a waterproof structure keeping the metal film 12 on the dielectric block 11 in contact with an external atmosphere.

摘要翻译： 表面等离子体传感器，其可以在操作期间放置在液体样品下或潮湿气氛中。 表面等离子体激元传感器由介质块11，叠置在介质块11的一个表面上的金属膜12，用于产生光束13的光源14，使光束13 为了在介质块11和金属膜12之间的界面11a上实现各种入射角，每个角度满足在界面11a上的全反射条件，包括满足表面等离子体共振的条件的那些角度， 以及光检测器16，其通过在光束13在界面11a处被完全反射之后测量光束13的强度来检测表面等离子体共振的状态。 表面等离子体激元传感器的电介质块11，光源14，前光学系统15和光电检测器16容纳在具有防水结构的箱体20中，将金属膜12保持在与外部气氛接触的介质块11上 。

公开(公告)号：US06340448B1

公开(公告)日：2002-01-22

申请号：US09245068

申请日：1999-02-05

申请人： Masayuki Naya ,  Masami Hatori

发明人： Masayuki Naya ,  Masami Hatori

IPC分类号： G01N2101

CPC分类号： G01N21/553

摘要： A surface plasmon sensor is formed by a dielectric block, a metal film which is formed on one face of the dielectric block and is brought into contact with a sample, a light source emitting a light beam, an optical system which causes the light beam to enter the dielectric block so that the light beam is reflected in total reflection at the interface of the dielectric block and the metal film and various angles of incidence of the light beam to the interface of the dielectric block and the metal film including an angle of incidence at which surface plasmon is generated can be obtained, and a photodetector which is able to detect the intensity of the light beam reflected in total reflection from the interface for the various angles of incidence. A laser provided with an oscillation wavelength stabilizing system for stabilizing the wavelength at which the laser oscillates is used as the light source.

摘要翻译： 表面等离子体激元传感器由介质块，金属膜形成，该金属膜形成在介质块的一个面上并与样品接触，发射光束的光源，使光束向 进入介电块，使得光束在介电块和金属膜的界面处的全反射中被反射，并且光束到介质块和金属膜的界面的各种入射角包括入射角 可以获得在其上产生表面等离子体激元的光电检测器，以及能够检测从用于各种入射角的界面的全反射中反射的光束的强度的光电检测器。 设置有用于稳定激光器振荡的波长的振荡波长稳定系统的激光器被用作光源。

公开(公告)号：US5926284A

公开(公告)日：1999-07-20

申请号：US69166

申请日：1998-04-29

申请人： Masayuki Naya ,  Taizo Akimoto

发明人： Masayuki Naya ,  Taizo Akimoto

IPC分类号： G01N21/55

CPC分类号： G01N21/648 ,  G01N21/553 ,  G01N2021/212

摘要： A surface plasmon sensor comprises a prism, a metal film, which is formed on one surface of the prism and is brought into contact with a sample, and a light source for producing a light beam. An optical system causes the light beam to pass through the prism and to impinge upon an interface between the prism and the metal film such that various different angles of incidence may be obtained with respect to the interface. A photodetector detects an intensity of the light beam, which has been totally reflected from the interface, with respect to each of the various different angles of incidence. An electrode stands facing the metal film with a liquid sample intervening therebetween, and a DC voltage is applied across the electrode and the metal film. A substance contained in the liquid sample is thus analyzed quickly and with a high sensitivity.

公开(公告)号：US5278869A

公开(公告)日：1994-01-11

申请号：US921119

申请日：1992-07-29

申请人： Masayuki Naya ,  Yoji Okazaki

发明人： Masayuki Naya ,  Yoji Okazaki

IPC分类号： G02F1/37 ,  H01S3/082 ,  H01S3/109 ,  H01S5/00 ,  H01S5/06 ,  H01S3/13

CPC分类号： H01S5/14 ,  H01S3/082 ,  H01S3/083 ,  H01S3/109 ,  H01S5/0656 ,  H01S5/4006 ,  H01S5/5027

摘要： An optical wavelength converting apparatus comprises a semiconductor laser, which is capable of oscillating in a multiple longitudinal mode, and an external resonator for resonating a laser beam, which has been radiated out of the semiconductor laser and which serves as a fundamental wave. An optical wavelength converting device is located in an optical path of the fundamental wave, which has been resonated by the external resonator. A device feeds part of the fundamental wave, which has been resonated by the external resonator, back to the semiconductor laser. A wavelength-converted wave in a single longitudinal mode is thereby obtained, which wave has a high intensity and is stable.

摘要翻译： 光波长转换装置包括能够以多纵向模式振荡的半导体激光器和用于谐振已经被辐射出半导体激光器并用作基波的激光束的外部谐振器。 光波长转换装置位于由外部谐振器谐振的基波的光路中。 器件将已被外部谐振器谐振的基波的一部分馈送回半导体激光器。 从而获得单一纵模中的波长转换波，该波具有高强度并且稳定。

公开(公告)号：US5231643A

公开(公告)日：1993-07-27

申请号：US883196

申请日：1992-05-14

申请人： Masayuki Naya ,  Yoji Okazaki

发明人： Masayuki Naya ,  Yoji Okazaki

IPC分类号： G02F1/37 ,  H01S3/109 ,  H01S3/139 ,  H01S5/00 ,  H01S5/06

CPC分类号： H01S5/14 ,  H01S3/083 ,  H01S3/109 ,  H01S3/139 ,  H01S5/141

摘要： There is disclosed an optical frequency converter of a bulk resonator structure comprising a ring resonator or V-shaped resonator made of a nonlinear optical crystal. The converter is equipped with a means for returning a laser light emitted by a semiconductor laser resonating inside the resonator to the semiconductor laser. The ring resonator or V-shaped resonator is made small in size and compact. The converter is insusceptible to vibration and needs no adjustment. Returning laser light is produced at less locations. The loss of the output light inside the resonator is reduced. The second harmonic is generated at a high efficiency. Multiple reflection is produced inside the resonator to further enhance the efficiency of the generation of the second harmonic of the laser radiation. Also, the phase of the radiation can be made uniform. The optical density can be increased.

摘要翻译： 公开了一种体谐振器结构的光频变换器，其包括由非线性光学晶体制成的环形谐振器或V形谐振器。 转换器配备有用于将谐振器内谐振的半导体激光器发射的激光返回到半导体激光器的装置。 环形谐振器或V形谐振器的尺寸小巧且小巧。 转换器不易振动，无需调整。 在较少的位置产生返回的激光。 谐振器内的输出光的损失减小。 二次谐波以高效率产生。 在谐振器内产生多重反射，以进一步提高激光辐射的二次谐波的产生效率。 此外，可以使辐射的相位均匀。 可以增加光密度。