公开(公告)号：US06705164B2

公开(公告)日：2004-03-16

申请号：US10258336

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

公开(公告)号：US07270868B2

公开(公告)日：2007-09-18

申请号：US10618791

申请日：2003-07-14

Applicant: Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

Inventor： Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

IPC: B32B3/00 ,  B32B3/10 ,  B32B3/18 ,  H01L21/00 ,  H01L29/84

CPC classification number: B81C1/00595 ,  Y10T428/24612 ,  Y10T428/24628

Abstract: A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.

Abstract translation: 描述了具有包含可移动元件和不可移动元件的表面微机械结构的部件及其制造方法。 组件的表面微机械结构在功能层中产生，功能层通过至少一个不导电的第一绝缘层和至少一个第一牺牲层连接到基板。 通过去除第一牺牲层来暴露表面微机械结构的可移动元件。 第一绝缘层由不会被去除第一牺牲层的过程基本上受到攻击的材料制成。 因此，可以以设计控制的方式限制牺牲层的去除。 同时，确保表面微机械结构相对于部件的基板的可靠的电绝缘以及表面微机械结构的不动元件到基板的可靠的机械紧固。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P9/04

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US06905615B2

公开(公告)日：2005-06-14

申请号：US10057455

申请日：2002-01-24

Applicant: Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

Inventor： Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

IPC: B81B3/00 ,  B81C1/00 ,  C23F1/00 ,  B44C1/22

CPC classification number: B81C1/00896 ,  B81C2201/053

Abstract: A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.

Abstract translation: 微机械部件的制造方法具有以下步骤：提供具有正面和背面的基板; 构造衬底的前侧; 至少部分地用包含锗的保护层覆盖所述基板的结构化正面; 构造衬底的背面; 并且从所述基板的结构化正面至少部分地去除含有锗的保护层。

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P1514

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。