公开(公告)号：US20240410744A1

公开(公告)日：2024-12-12

申请号：US18810850

申请日：2024-08-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shozo OTERA ,  Yutaka ISHIURA ,  Jun ENDO ,  Michio WADA

IPC: G01H11/08

Abstract: A vibration device that includes a support member, an actuator, and a sensor that detects a force applied to a vibrated member and displacement of the vibrated member in a left-right direction. The support member includes a fixing portion, a vibration portion, and an elastically deformable portion connecting the fixing portion and the vibration portion. The actuator is attached to the fixing portion and the vibration portion. The sensor is attached to the elastically deformable portion. The elastically deformable portion has a first elastic modulus in the left-right direction, a second elastic modulus in a front-rear direction, and a third elastic modulus in an up-down direction. The first elastic modulus is smaller than the second elastic modulus. The third elastic modulus is smaller than the second elastic modulus.

公开(公告)号：US20230049072A1

公开(公告)日：2023-02-16

申请号：US17974322

申请日：2022-10-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takashi INOUE ,  Shozo OTERA ,  Yutaka ISHIURA ,  Jun ENDO ,  Yoshihiko NISHIZAWA

IPC: H01L41/08 ,  H01L41/047

Abstract: A substrate that includes a film-shaped member that has a first main surface and a second main surface; a first electrode that has a third main surface and a fourth main surface, the third main surface facing the second main surface of the film-shaped member, the first electrode having a first patterning region with a first part where the film-shaped member is exposed from the first electrode and a second part where the film-shaped member is not exposed from the first electrode; and an adhesive tape facing the fourth main surface of the first electrode and the second main surface of the film-shaped member such that the adhesive tape is disposed across the first part and the second part in the first patterning region.

公开(公告)号：US20140167570A1

公开(公告)日：2014-06-19

申请号：US14186948

申请日：2014-02-21

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Shozo OTERA

IPC: H01L41/047 ,  H01L41/277 ,  H01L41/314 ,  H01L41/09

CPC classification number: H01L41/0471 ,  H01L41/0472 ,  H01L41/0474 ,  H01L41/09 ,  H01L41/193 ,  H01L41/277 ,  H01L41/293 ,  H01L41/314

Abstract: An actuator device and a manufacturing method for the actuator device with which an outer electrode electrically connected to an inner electrode can be reliably formed even when using a film made of an electrostrictive material. An actuator device includes a plurality of stacked electrostrictive films each of which is made of an electrostrictive material and includes inner electrodes formed on one surface or both surfaces of the film. Lead electrodes are formed to be led out respectively from the inner electrodes toward the outside of the electrostrictive film 31. At least one cut portion is formed in each of the lead electrodes, and conductive ink is applied to the cut portion. The conductive ink reaches, from the cut portions, the lead electrodes formed on the electrostrictive film.

Abstract translation: 即使使用由电致伸缩材料制成的膜，致动器装置和致动器装置的制造方法也可以可靠地形成与内部电极电连接的外部电极。 致动器装置包括多个堆叠的电致伸缩膜，每个膜由电致伸缩材料制成，并且包括形成在膜的一个表面或两个表面上的内部电极。 引线电极被分别从内电极引导到电致伸缩膜31的外部。在每个引线电极中形成至少一个切割部分，并且将导电油墨施加到切割部分。 导电油墨从切割部分到达形成在电致伸缩膜上的引线电极。