公开(公告)号：US20240186983A1

公开(公告)日：2024-06-06

申请号：US18414205

申请日：2024-01-16

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Patrick TURNER ,  Viktor PLESSKI ,  Julius KOSKELA ,  Robert B. HAMMOND

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/60 ,  H10N30/87

CPC classification number: H03H9/568 ,  H03H9/02015 ,  H03H9/02031 ,  H03H9/02062 ,  H03H9/02228 ,  H03H9/132 ,  H03H9/174 ,  H03H9/176 ,  H03H9/562 ,  H03H9/564 ,  H03H9/605 ,  H03H3/02 ,  H03H2003/023 ,  H03H9/02039 ,  H10N30/877

Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of an edge of the diaphragm is at an oblique angle to the fingers.

公开(公告)号：US20240162886A1

公开(公告)日：2024-05-16

申请号：US18410699

申请日：2024-01-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Patrick TURNER ,  Robert HAMMOND ,  Bryant GARCIA ,  Ventsislav YANTCHEV ,  Neal FENZI ,  Julius KOSKELA

IPC: H03H9/54 ,  H03H3/04 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/547 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132

Abstract: An acoustic resonator device, filter devices, and methods of making the same. An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, where the back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. The device further includes an interdigital transducer formed on the front surface of the piezoelectric plate, where interleaved fingers of the IDT disposed on the diaphragm are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers include a first layer adjacent the diaphragm and a second layer over the first layer, the second layer having a narrower width than the first layer.

公开(公告)号：US20230291388A1

公开(公告)日：2023-09-14

申请号：US18313779

申请日：2023-05-08

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Viktor PLESSKI ,  Bryant GARCIA

IPC: H03H9/56 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17

CPC classification number: H03H9/568 ,  H03H9/02228 ,  H03H9/02031 ,  H03H9/132 ,  H03H9/174 ,  H03H9/562 ,  H03H9/176 ,  H03H9/02015 ,  H03H9/02062 ,  H03H9/564 ,  H03H9/02039 ,  H03H2003/023

Abstract: Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a lithium niobate plate having front and back surfaces, wherein Euler angles of the lithium niobate plate are [0°, β, 0° ], where β is greater than or equal to 0° and less than or equal to 60°, and an acoustic Bragg reflector between the surface of the substrate and the back surface of the lithium niobate plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. At least one finger of the IDT is disposed in a groove in the lithium niobate plate.