公开(公告)号：US20250125783A1

公开(公告)日：2025-04-17

申请号：US18989375

申请日：2024-12-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Julius KOSKELA

IPC: H03H9/02 ,  H03H9/205 ,  H03H9/56

Abstract: An acoustic resonator device is provided that includes a piezoelectric layer; and an interdigital transducer (IDT) at a surface of the piezoelectric layer, the IDT comprising interleaved fingers. At least one interleaved finger of the interleaved fingers comprises a first layer and a second layer over the first layer, wherein the first layer is between the piezoelectric layer and the second layer. Moreover, a shape of the second layer varies with respect to at least one other interleaved finger of the interleaved fingers. A thickness of the first layer is less than a thickness of the second layer.

公开(公告)号：US20240291461A1

公开(公告)日：2024-08-29

申请号：US18656141

申请日：2024-05-06

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Viktor PLESSKI ,  Bryant GARCIA ,  Julius KOSKELA ,  Patrick TURNER

IPC: H03H9/02 ,  H03H3/04 ,  H03H9/13 ,  H03H9/54

CPC classification number: H03H9/02338 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132 ,  H03H9/547

Abstract: There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.

公开(公告)号：US20240186983A1

公开(公告)日：2024-06-06

申请号：US18414205

申请日：2024-01-16

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ventsislav YANTCHEV ,  Patrick TURNER ,  Viktor PLESSKI ,  Julius KOSKELA ,  Robert B. HAMMOND

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/60 ,  H10N30/87

CPC classification number: H03H9/568 ,  H03H9/02015 ,  H03H9/02031 ,  H03H9/02062 ,  H03H9/02228 ,  H03H9/132 ,  H03H9/174 ,  H03H9/176 ,  H03H9/562 ,  H03H9/564 ,  H03H9/605 ,  H03H3/02 ,  H03H2003/023 ,  H03H9/02039 ,  H10N30/877

Abstract: Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces. The back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. At least a portion of an edge of the diaphragm is at an oblique angle to the fingers.

公开(公告)号：US20240162886A1

公开(公告)日：2024-05-16

申请号：US18410699

申请日：2024-01-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Patrick TURNER ,  Robert HAMMOND ,  Bryant GARCIA ,  Ventsislav YANTCHEV ,  Neal FENZI ,  Julius KOSKELA

IPC: H03H9/54 ,  H03H3/04 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/547 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132

Abstract: An acoustic resonator device, filter devices, and methods of making the same. An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, where the back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. The device further includes an interdigital transducer formed on the front surface of the piezoelectric plate, where interleaved fingers of the IDT disposed on the diaphragm are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers include a first layer adjacent the diaphragm and a second layer over the first layer, the second layer having a narrower width than the first layer.