公开(公告)号：US20230051876A1

公开(公告)日：2023-02-16

申请号：US17975749

申请日：2022-10-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Patrick TURNER ,  Robert HAMMOND ,  Minefumi OUCHI

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/13 ,  H03H9/60 ,  H03H9/02

Abstract: Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a piezoelectric plate having opposed front and back surfaces. A first electrode and a second electrode are formed on the front surface of the piezoelectric plate, the first and second electrodes and the piezoelectric plate configured such that a radio frequency signal applied between the first and second electrodes excites a shear primary acoustic mode in the piezoelectric plate. The first electrode and the second electrode have trapezoidal cross-sectional shapes. A sidewall angle of at least one side surface of the first electrode and a sidewall angle of at least one side surface of the second electrode are greater than or equal to 70 degrees and less than or equal to 110 degrees.

公开(公告)号：US20240162886A1

公开(公告)日：2024-05-16

申请号：US18410699

申请日：2024-01-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Patrick TURNER ,  Robert HAMMOND ,  Bryant GARCIA ,  Ventsislav YANTCHEV ,  Neal FENZI ,  Julius KOSKELA

IPC: H03H9/54 ,  H03H3/04 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/547 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132

Abstract: An acoustic resonator device, filter devices, and methods of making the same. An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, where the back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. The device further includes an interdigital transducer formed on the front surface of the piezoelectric plate, where interleaved fingers of the IDT disposed on the diaphragm are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers include a first layer adjacent the diaphragm and a second layer over the first layer, the second layer having a narrower width than the first layer.

公开(公告)号：US20240154597A1

公开(公告)日：2024-05-09

申请号：US18412131

申请日：2024-01-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Greg DYER ,  Bryant GARCIA ,  Doug JACHOWSKI ,  Robert HAMMOND ,  Neal FENZI ,  Ryo WAKABAYASHI

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/205 ,  H03H9/54

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H9/02133 ,  H03H9/174 ,  H03H9/205 ,  H03H9/54

Abstract: An acoustic resonator is provided that includes a substrate; a piezoelectric layer having a portion that forms a diaphragm over a cavity; and IDT on the piezoelectric layer that includes a first conductor level including first and second busbars disposed on respective portions of the piezoelectric layer, a first set of elongated fingers extending from the first bus bar onto the diaphragm, and a second set of elongated fingers extending from the second bus bar onto the diaphragm, the second set of elongated fingers interleaved with the first set of elongated fingers. The acoustic resonator also includes a second conductor level over the piezoelectric layer and covering at least portions of the first and second busbars.