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    ELASTIC WAVE DEVICE
    11.
    发明申请
    ELASTIC WAVE DEVICE 有权

    公开(公告)号：US20210066575A1

    公开(公告)日：2021-03-04

    申请号：US17097011

    申请日：2020-11-13

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO ,  Tetsuya KIMURA

    IPC: H01L41/107 ,  H03H9/02 ,  H01L41/047 ,  H03H9/17 ,  H03H9/56

    Abstract: An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.

    PIEZOELECTRIC DEVICE
    15.
    发明申请
    PIEZOELECTRIC DEVICE 有权

    公开(公告)号：US20230043420A1

    公开(公告)日：2023-02-09

    申请号：US17965867

    申请日：2022-10-14

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO

    IPC: H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

    Abstract: A single crystal piezoelectric layer includes a first recess in a first opposing surface opposing a first main surface of a base. The single crystal piezoelectric layer is bonded to the first main surface of the base at a portion of the first opposing surface other than the first recess. A lower electrode layer defining at least a portion of a pair of electrode layers and extending over a surface of the single crystal piezoelectric layer opposing the base is at least partially located in the first recess. A second opposing surface of the lower electrode layer opposing the first main surface of the base has surface roughness greater than the surface roughness of the first opposing surface of the single crystal piezoelectric layer.

    PIEZOELECTRIC DEVICE
    16.
    发明申请
    PIEZOELECTRIC DEVICE 有权

    公开(公告)号：US20220384707A1

    公开(公告)日：2022-12-01

    申请号：US17883739

    申请日：2022-08-09

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Masashi OMURA

    IPC: H01L41/083 ,  H01L41/047

    Abstract: In a piezoelectric device, when viewed in a direction perpendicular to one main surface, an outer shape of a recess is a polygonal shape or a circular shape. When n represents a number of sides of the polygonal shape, r represents a radius of a circumscribed circle of an imaginary regular polygon including n sides with a length identical to a length of a shortest of the sides, and d represents a maximum thickness of a membrane portion, which is located above the recess, of a multilayer portion, r≤197.7dn−0.6698 when 3≤n≤7, and r≤52.69d when 8≤n or when the outer shape of the recess is a circular shape.

    MEMS DEVICE
    17.
    发明申请
    MEMS DEVICE 有权

    公开(公告)号：US20210147217A1

    公开(公告)日：2021-05-20

    申请号：US17161724

    申请日：2021-01-29

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Katsumi FUJIMOTO ,  Tetsuya KIMURA ,  Fumiya KUROKAWA

    IPC: B81B3/00 ,  B81B7/02

    Abstract: A MEMS device includes a membrane portion, a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, a second electrode on a second surface of the piezoelectric layer opposite to the first direction, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in the membrane portion. Each of the first electrode and the second electrode has a tapered cross-sectional shape with a width which decreases with increasing distance from the piezoelectric layer on a cross section along a plane vertical to the surface in the first direction.

    PIEZOELECTRIC DEVICE
    18.
    发明申请
    PIEZOELECTRIC DEVICE 有权

    公开(公告)号：US20210057634A1

    公开(公告)日：2021-02-25

    申请号：US16907400

    申请日：2020-06-22

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Masayuki SUZUKI ,  Fumiya KUROKAWA

    IPC: H01L41/083 ,  H01L41/18 ,  H01L41/047

    Abstract: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

    ELASTIC WAVE DEVICE AND METHOD FOR PRODUCING THE SAME
    19.
    发明申请
    ELASTIC WAVE DEVICE AND METHOD FOR PRODUCING THE SAME 审中-公开

    公开(公告)号：US20190068155A1

    公开(公告)日：2019-02-28

    申请号：US16167614

    申请日：2018-10-23

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Tetsuya KIMURA ,  Yutaka KISHIMOTO ,  Masashi OMURA

    IPC: H03H3/08 ,  H03H9/25 ,  H03H9/05 ,  H03H9/02 ,  H03H9/145

    Abstract: An elastic wave device includes a supporting substrate including an upper surface including a recessed portion, a piezoelectric thin film on the supporting substrate to cover the recessed portion of the supporting substrate, an IDT electrode on a main surface of the piezoelectric thin film, the main surface being adjacent to the supporting substrate, and an intermediate layer on a main surface of the piezoelectric thin film, the main surface being remote from the supporting substrate. A space is defined by the supporting substrate and the piezoelectric thin film. The IDT electrode faces the space. Through holes are provided in the piezoelectric thin film and the intermediate layer to extend from a main surface of the intermediate layer to the space, the main surface being remote from the piezoelectric thin film. The elastic wave device further includes a cover member on the intermediate layer and covering opening ends of the through holes.

    ACOUSTIC WAVE DEVICE
    20.
    发明申请
    ACOUSTIC WAVE DEVICE 审中-公开

    公开(公告)号：US20170373663A1

    公开(公告)日：2017-12-28

    申请号：US15604737

    申请日：2017-05-25

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Yutaka KISHIMOTO ,  Masashi OMURA ,  Tetsuya KIMURA

    IPC: H03H9/02 ,  H03H9/25

    Abstract: An acoustic wave device includes a support substrate, a piezoelectric laminate, and first and second interdigital transducer electrodes. The piezoelectric laminate includes an intermediate layer provided directly or indirectly on the support substrate and a piezoelectric thin film provided on the intermediate layer. The first and second interdigital transducer electrodes are provided on the piezoelectric thin film of the piezoelectric laminate so as to be disposed in an identical or substantially identical plane. In the piezoelectric laminate, a thickness of a portion where the first interdigital transducer electrode is provided is different from a thickness of a portion where the second interdigital transducer electrode is provided.

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