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15 条记录 (耗时 0.026 秒)

    Rotational rate sensor
    13.
    发明授权
    Rotational rate sensor 有权
    转速传感器

    公开(公告)号：US07313958B2

    公开(公告)日：2008-01-01

    申请号：US10471635

    申请日：2002-09-25

    申请人： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

    发明人： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

    IPC分类号： G01C19/00

    CPC分类号： G01C19/5747

    摘要： A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

    摘要翻译： 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

    Micromechanical component
    14.
    发明授权
    Micromechanical component 有权
    微机械部件

    公开(公告)号：US07270868B2

    公开(公告)日：2007-09-18

    申请号：US10618791

    申请日：2003-07-14

    申请人： Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

    发明人： Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

    IPC分类号： B32B3/00 ,  B32B3/10 ,  B32B3/18 ,  H01L21/00 ,  H01L29/84

    CPC分类号： B81C1/00595 ,  Y10T428/24612 ,  Y10T428/24628

    摘要： A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.

    摘要翻译： 描述了具有包含可移动元件和不可移动元件的表面微机械结构的部件及其制造方法。 组件的表面微机械结构在功能层中产生，功能层通过至少一个不导电的第一绝缘层和至少一个第一牺牲层连接到基板。 通过去除第一牺牲层来暴露表面微机械结构的可移动元件。 第一绝缘层由不会被去除第一牺牲层的过程基本上受到攻击的材料制成。 因此，可以以设计控制的方式限制牺牲层的去除。 同时，确保表面微机械结构相对于部件的基板的可靠的电绝缘以及表面微机械结构的不动元件到基板的可靠的机械紧固。

    Method of manufacturing a micromechanical component
    15.
    发明授权
    Method of manufacturing a micromechanical component 失效
    微机械部件的制造方法

    公开(公告)号：US06905615B2

    公开(公告)日：2005-06-14

    申请号：US10057455

    申请日：2002-01-24

    申请人： Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

    发明人： Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

    IPC分类号： B81B3/00 ,  B81C1/00 ,  C23F1/00 ,  B44C1/22

    CPC分类号： B81C1/00896 ,  B81C2201/053

    摘要： A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.

    摘要翻译： 微机械部件的制造方法具有以下步骤：提供具有正面和背面的基板; 构造衬底的前侧; 至少部分地用包含锗的保护层覆盖所述基板的结构化正面; 构造衬底的背面; 并且从所述基板的结构化正面至少部分地去除含有锗的保护层。