公开(公告)号：US20110151676A1

公开(公告)日：2011-06-23

申请号：US13039724

申请日：2011-03-03

申请人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

发明人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

IPC分类号： H01L21/31

CPC分类号： H01L21/67253 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/3105 ,  H01L21/31116 ,  H01L21/76232

摘要： A method for forming a semiconductor structure includes forming a plurality of features across a surface of a substrate, with at least one space being between two adjacent features. A first dielectric layer is formed on the features and within the at least one space. A portion of the first dielectric layer interacts with a reactant derived from a first precursor and a second precursor to form a first solid product. The first solid product is decomposed to substantially remove the portion of the first dielectric layer. A second dielectric layer is formed to substantially fill the at least one space.

摘要翻译： 一种用于形成半导体结构的方法包括跨越衬底的表面形成多个特征，其中至少一个空间位于两个相邻特征之间。 第一电介质层形成在特征上并且在至少一个空间内。 第一介电层的一部分与衍生自第一前体和第二前体的反应物相互作用以形成第一固体产物。 第一固体产物被分解以基本上除去第一介电层的部分。 形成第二电介质层以基本上填充至少一个空间。

公开(公告)号：US20080182382A1

公开(公告)日：2008-07-31

申请号：US11947674

申请日：2007-11-29

申请人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

发明人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

IPC分类号： H01L21/762

CPC分类号： H01L21/67253 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/3105 ,  H01L21/31116 ,  H01L21/76232

摘要： A method for forming a semiconductor structure includes forming a plurality of features across a surface of a substrate, with at least one space being between two adjacent features. A first dielectric layer is formed on the features and within the at least one space. A portion of the first dielectric layer interacts with a reactant derived from a first precursor and a second precursor to form a first solid product. The first solid product is decomposed to substantially remove the portion of the first dielectric layer. A second dielectric layer is formed to substantially fill the at least one space.

摘要翻译： 一种用于形成半导体结构的方法包括跨越衬底的表面形成多个特征，其中至少一个空间位于两个相邻特征之间。 第一电介质层形成在特征上并且在至少一个空间内。 第一介电层的一部分与衍生自第一前体和第二前体的反应物相互作用以形成第一固体产物。 第一固体产物被分解以基本上除去第一介电层的部分。 形成第二电介质层以基本上填充至少一个空间。

公开(公告)号：US07939422B2

公开(公告)日：2011-05-10

申请号：US11947674

申请日：2007-11-29

申请人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

发明人： Nitin K. Ingle ,  Jing Tang ,  Yi Zheng ,  Zheng Yuan ,  Zhenbin Ge ,  Xinliang Lu ,  Chien-Teh Kao ,  Vikash Banthia ,  William H. McClintock ,  Mei Chang

IPC分类号： H01L21/76

CPC分类号： H01L21/67253 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/3105 ,  H01L21/31116 ,  H01L21/76232

摘要： A method for forming a semiconductor structure includes forming a plurality of features across a surface of a substrate, with at least one space being between two adjacent features. A first dielectric layer is formed on the features and within the at least one space. A portion of the first dielectric layer interacts with a reactant derived from a first precursor and a second precursor to form a first solid product. The first solid product is decomposed to substantially remove the portion of the first dielectric layer. A second dielectric layer is formed to substantially fill the at least one space.

摘要翻译： 一种用于形成半导体结构的方法包括跨越衬底的表面形成多个特征，其中至少一个空间位于两个相邻特征之间。 第一电介质层形成在特征上并且在至少一个空间内。 第一介电层的一部分与衍生自第一前体和第二前体的反应物相互作用以形成第一固体产物。 第一固体产物被分解以基本上除去第一介电层的部分。 形成第二电介质层以基本上填充至少一个空间。

公开(公告)号：US20130297329A1

公开(公告)日：2013-11-07

申请号：US13672508

申请日：2012-11-08

申请人： Vikash Banthia ,  Vishal Banthia

发明人： Vikash Banthia ,  Vishal Banthia

IPC分类号： G06Q50/22

CPC分类号： G06Q30/0615 ,  G06Q10/1095 ,  G06Q30/08 ,  G06Q50/22

摘要： A method for brokering purchases of procedural services between a buyer and at least one professional service provider is a software-based system that negotiates transactions between potential clients and professional service providers by receiving, verifying, and negotiating appointment availabilities and appointment offers while providing privacy to both parties until a transaction is conducted. The system comprises the steps of receiving and indexing appointment openings from providers, receiving and indexing appointment offers from buyers, matching appointment opening with appointment offers, anonymizing appointment offers, and negotiating the exchange of personal information between both parties when a transaction is conducted, as well as provide ancillary product suggestions. The system provides functionality to match a submitted appointment offer anonymously with at least one professional service provider. Additionally, the system provides automated features that improve matching of the appointment opening and the appointment offer by user submitted parameters of system derived value optimums.

摘要翻译： 买方和至少一个专业服务提供者间接购买程序服务的方法是一种基于软件的系统，通过接收，验证和协商潜在客户和专业服务提供商之间的交易，同时提供隐私权 双方直到进行交易。 该系统包括以下步骤：接收和索引提供者的约会开放，接收和索引来自买方的约会提议，匹配约会开放与约会提议，匿名约会提供，以及在进行交易时双方交流个人信息，作为 以及提供配套产品建议。 该系统提供了与至少一个专业服务提供商匿名提交的约会提供的功能。 此外，该系统提供自动化功能，可改善用户提交的系统派生值最优参数的约会开放和约会提供的匹配。

公开(公告)号：US20140304021A1

公开(公告)日：2014-10-09

申请号：US14227312

申请日：2014-03-27

申请人： Vikash Banthia ,  Vishal Banthia

发明人： Vikash Banthia ,  Vishal Banthia

IPC分类号： G06Q30/06 ,  G06Q10/10

CPC分类号： G06Q30/0615 ,  G06Q10/1095 ,  G06Q30/08 ,  G06Q50/22

摘要： A method for brokering purchases of procedural services between a buyer and at least one professional service provider is a software-based system that negotiates transactions between potential clients and professional service providers by receiving, verifying, and negotiating appointment availabilities and appointment offers while providing privacy to both parties until a transaction is conducted. The system comprises the steps of receiving and indexing appointment openings from providers, receiving and indexing appointment offers from buyers, matching appointment opening with appointment offers, anonymizing appointment offers, and negotiating the exchange of personal information between both parties when a transaction is conducted, as well as provide ancillary product suggestions. The system provides functionality to match a submitted appointment offer anonymously with at least one professional service provider. Additionally, the system provides automated features that improve matching of the appointment opening and the appointment offer by user submitted parameters of system derived value optimums.

摘要翻译： 买方和至少一个专业服务提供者间接购买程序服务的方法是一种基于软件的系统，通过接收，验证和协商潜在客户和专业服务提供商之间的交易，同时提供隐私权 双方直到进行交易。 该系统包括以下步骤：接收和索引提供者的约会开放，接收和索引来自买方的约会提议，匹配约会开放与约会提议，匿名约会提供，以及在进行交易时双方交流个人信息，作为 以及提供配套产品建议。 该系统提供了与至少一个专业服务提供商匿名提交的约会提供的功能。 此外，该系统提供自动化功能，可改善用户提交的系统派生值最优参数的约会开放和约会提供的匹配。