Abstract:
A droplet ejection apparatus includes a reservoir tank that retains liquid crystal, a substrate stage on which a mother substrate is mounted, and an ejection head that opposes the substrate stage. The ejection head and the stage are movable relative to each other. The ejection head includes a nozzle plate in which nozzles are defined. The ejection head pressurizes the liquid crystal supplied from the reservoir tank and thus ejects the liquid crystal from the nozzles onto the mother substrate. An ejection heat heater is provided around the ejection head for regulating the temperature of the liquid crystal. The ejection head heater has a projecting portion that projects from the nozzle plate toward the substrate stage. The projecting portion encompasses the nozzle plate. This maintains the viscosity of the liquid crystal in the vicinity of the nozzles at a sufficiently low level.
Abstract:
A film-forming line is for forming a film on a substrate, and includes a surface-improving treatment device, a film-forming solution applicator, and a timer controller. The surface-improving treatment device is configured to perform a surface-improving treatment on the substrate. The film-forming solution applicator is configured to apply to the substrate a film-forming solution, which is for forming the film, after the substrate has been subjected to the surface-improving treatment by the surface-improving treatment device. The time controller is configured to obtain a time period since the time the surface-improving treatment is conducted by the surface-improving treatment device on the substrate. The present invention allows a film with a substantially uniform thickness to be formed on a substrate.
Abstract:
A droplet discharge device includes a head for discharging a functional liquid, a driving voltage generation unit for generating a driving voltage to drive the head, first and second temperature acquisition units, a temperature difference computing unit, and a driving voltage correction unit. The first and second temperature acquisition units are configured to acquire temperature of the functional liquid in the head as first and second temperatures, respectively, when the head is in a head waiting state and in a head driven state, respectively. The temperature difference computing unit is configured to compute a temperature difference between the first and second temperatures. The driving voltage correction unit is configured to correct the driving voltage based on the temperature difference. The driving voltage generation unit is configured to generate the corrected driving voltage to the head when the head is in the head driven state.
Abstract:
A droplet discharge device includes: a discharge unit discharging a droplet and being moved relatively to a discharged object, on which the droplet is discharged, so as to form a predetermined pattern on the discharged object; a discharge amount measurement unit measuring a discharge amount of the droplet discharged from the discharge unit; a temperature acquisition unit acquiring a temperature of the discharge unit in the formation of the predetermined pattern; a temperature adjustment unit adjusting the temperature of the discharge unit; and a discharge amount adjustment unit adjusting the discharge amount of the discharge unit. In the device, the temperature adjustment unit adjusts a temperature of the discharge unit in the measurement of the discharge amount by the discharge amount measurement unit to the temperature in the formation of the predetermined pattern.
Abstract:
A film-forming method of forming a film on a substrate includes performing a surface-improving treatment on the substrate, determining whether a predetermined amount of time has passed since the surface-improving treatment has been performed on the substrate, applying a film-forming solution to the substrate when it is determined that the predetermined amount of time has not passed, and repeating the surface-improving treatment on the substrate when it is determined that the predetermined amount of time has passed.
Abstract:
Temperature adjustment means is provided to a chamber for accommodating a stage, a discharge head, and a maintenance device. The temperature adjustment means adjusts the temperature of the maintenance area at least while the transport device has the discharge head positioned in the maintenance area, so that the temperature is equal to or greater than the temperature of the drawing area while the transport device has the discharge head positioned in the drawing area.
Abstract:
A deposit forming method including ejecting droplets of a deposit forming material onto a substrate, thereby forming a deposit by the droplets on the substrate, is provided. The droplets are ejected along a direction inclined at a predetermined angle in a predetermined direction with respect to a normal line of the substrate and at a predetermined pitch in the predetermined direction. The predetermined angle is set in correspondence with the diameter of each of the droplets and the predetermined pitch in such a manner that the dimension of a dot formed by each droplet on the substrate in the predetermined direction becomes greater than or equal to the predetermined pitch.
Abstract:
A method of forming a thin film includes: forming a thin film on a substrate by discharging liquid material as a droplet; discharging the liquid material to a liquid material disposing-region that is wider than a thin film forming region; and drying the liquid material thereby to dispose a raising portion at the edge of the thin film in the outside of the thin film forming region.
Abstract:
In a microwave delay equalizer for an input signal of a microwave frequency having an inevitable delay distortion, a directional coupler and a pair of resonators are placed, respectively, on a center area of a conductive base member and on those side areas thereof which lie on both sides of the center area. The coupler comprises a pair of distributed-constant elements electromagnetically coupled to each other either with an air space or a dielectric plate interposed therebetween and to the respective resonators to derive from the input signal supplied to one of the elements a delay equalized output signal in the other element. Each element has a length equal to an odd multiple of a quarter wavelength of the signal travelling therealong. Each resonator consists of at least one resonance piece. For a dielectric base member, the elements possessed preferably of corrugated sides opposing each other with a zigzag-shaped area of the center area left therebetween and the resonance pieces are formed directly on the center and side areas by conductive patterns together with a pair of conductors which are connected to one end each of the resonance pieces and are to be grounded.