公开(公告)号：US4652755A

公开(公告)日：1987-03-24

申请号：US690301

申请日：1985-01-10

Applicant: Peter R. Solomon ,  Robert M. Carangelo ,  Philip E. Best

Inventor： Peter R. Solomon ,  Robert M. Carangelo ,  Philip E. Best

IPC: G01N21/62 ,  G01J3/453 ,  G01N15/00 ,  G01N15/02 ,  G01N15/14 ,  G01N21/35 ,  G01N21/39 ,  G01N21/53 ,  G01N21/37 ,  G01N21/51 ,  G01N21/59

CPC classification number: G01N21/532 ,  G01J3/453 ,  G01N15/0205 ,  G01N2015/0026 ,  G01N2015/0046 ,  G01N2021/391

Abstract: The method and apparatus permit analyses, by optical means, of properties of gaseous suspensions of particles, by measuring radiation that is emitted, transmitted or scattered by the particles. Determinations of composition, size, temperature and spectral emittance can be performed either in-situ or by sampling, and Fourier-transform infrared spectrometric techniques are most effectively used. Apparatus specifically adapted for performing radiation scattering analyses, and for collecting radiation from different sources, are provided.

Abstract translation: 该方法和装置允许通过光学方式通过测量由颗粒发射，传播或散射的辐射来分析颗粒的气态悬浮液的性质。 组成，尺寸，温度和光谱发射率的测定可以原位或采样进行，最有效地使用傅里叶变换红外光谱技术。 提供专门用于进行辐射散射分析和收集来自不同来源的辐射的装置。

公开(公告)号：US4453226A

公开(公告)日：1984-06-05

申请号：US283599

申请日：1981-07-15

Applicant: Robert H. Hobbs ,  Peter R. Solomon

Inventor： Robert H. Hobbs ,  Peter R. Solomon

IPC: G01N15/02 ,  G01N33/22 ,  G01N27/00

CPC classification number: G01N15/02 ,  G01N33/222

Abstract: A method and apparatus for determining the size distribution of certain particles, of a particular composition, such as iron sulfide (pyrites), in a sample of host material, such as coal. Data representative of the amount of at least one predetermined elemental constituent of the particles is obtained for each of numerous similarly-sized subsamples of the sample. The "constituent amount" data for each subsample is sorted into bins, each representative of a respective constituent amount range in a series of constituent amount ranges. Respective scaler representations of the fraction of the constituent amounts, represented by each bin range, are provided to yield an approximate representation of the distribution function of the amounts of the constituent in the subsamples of the coal. Those scaler representations collectively may provide a histogram. A selected multi-parameter distribution function, such as joint distribution function using both Gaussian and Poisson distributions, is fitted to the peaks of the binned grouping of representations forming the histogram, as by a least squares fitting technique, to obtain a best fit. The resulting values for two or more of the parameters of that function characterize the underlying size distribution of the certain particles in the sample. Three parameters include mean particle number density in the subsamples, mean particle radius which is a function of the mean normalized strength of the microprobe signal, and the variance in the radius.

Abstract translation: 用于确定在诸如煤的主体材料的样品中特定组合物（例如硫化铁（黄铁矿））的某些颗粒的尺寸分布的方法和装置。 对于样品的许多相似尺寸的子样品中的每一个获得表示颗粒的至少一个预定元素成分的量的数据。 每个子样本的“构成数量”数据被分类成各个表示各成分量范围的一组成分量范围的表。 提供由每个仓范围表示的构成量的分数的相应缩放器表示，以产生煤的子样品中成分的量的分布函数的近似表示。 这些缩放器表示集体可以提供直方图。 所选择的多参数分布函数，例如使用高斯和泊松分布的联合分布函数，通过最小二乘法拟合技术，适合于形成直方图的表示方式的组合分组的峰值，以获得最佳拟合。 该函数的两个或多个参数的结果值表征样本中某些粒子的基本大小分布。 三个参数包括子样本中的平均粒子数密度，作为微探针信号的平均归一化强度的函数的平均粒子半径以及半径的方差。

公开(公告)号：US06192287B1

公开(公告)日：2001-02-20

申请号：US09158380

申请日：1998-09-22

Applicant: Peter R. Solomon ,  Peter A. Rosenthal ,  Martin L. Spartz ,  Chad M. Nelson

Inventor： Peter R. Solomon ,  Peter A. Rosenthal ,  Martin L. Spartz ,  Chad M. Nelson

IPC: G06F1900

CPC classification number: H01L22/20 ,  H01J37/32935

Abstract: A fault detection and classification system for wafer etching, tool cleaning, and other fabrication processes employs exhaust gas composition data from a Fourier transform infrared spectrometer in addition to machine-state and other process-state data. Process control may be initiated based upon the classification of a fault.

Abstract translation: 用于晶片蚀刻，工具清洁和其它制造工艺的故障检测和分类系统除了机器状态和其他过程状态数据之外还使用来自傅里叶变换红外光谱仪的废气组成数据。 可以基于故障的分类来启动过程控制。

公开(公告)号：US6161054A

公开(公告)日：2000-12-12

申请号：US156277

申请日：1998-09-17

Applicant: Peter A. Rosenthal ,  Peter R. Solomon ,  Anthony S. Bonanno ,  William J. Eikleberry

Inventor： Peter A. Rosenthal ,  Peter R. Solomon ,  Anthony S. Bonanno ,  William J. Eikleberry

IPC: C23C14/54 ,  C23C16/52 ,  H01L21/00 ,  G06F19/00

CPC classification number: H01L21/67276 ,  C23C14/547 ,  C23C16/52

Abstract: An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.

Abstract translation: 用于半导体晶片制造的传感器驱动的运行中运行过程控制的实现将坚固的自动傅立叶变换红外反射计集成到晶片制造集群工具上。 电池控制器软件通过SECS端口，传感器控制，数据归档和图形用户界面集成了一个自适应的运行到运行的控制器，流程工具配方上传和下载。

公开(公告)号：US5675412A

公开(公告)日：1997-10-07

申请号：US562418

申请日：1995-11-24

Applicant: Peter R. Solomon

Inventor： Peter R. Solomon

IPC: G01B9/02

CPC classification number: G01J3/4535

Abstract: A moving mirror interferometer consists of a back-to-back double mirror, operatively interposed in the paths of beams from a beamsplitter/parallel reflecting mirror combiner, and a corner cube retroreflector. One beam component from the combiner is directed toward the retroreflector, and arrives therefrom at one side of the double mirror rotated 180.degree. about its central axis; the other component from the combiner arrives at the opposite side of the double mirror without axial rotation. Alignment in the interferometer is insensitive to shearing or tilting of the optical components; the components may be semi-rigidly mounted for resilient deflection, so as to isolate them against distortion of the supporting structure, and dynamic beam path-length variation may optimally be produced by moving the corner cube retroreflector, the back-to-back double mirror, or both.

Abstract translation: 移动镜干涉仪由背对背双反射镜组成，可操作地插入在来自分束器/平行反射镜组合器的光束的路径中，以及角立方后视反射器。 来自组合器的一个光束分量被引向后向反射器，并且从双镜的一侧到达其从其中心轴旋转180°的一个; 来自组合器的另一个部件到达双镜子的相对侧，而不会轴向旋转。 干涉仪中的对准对光学部件的剪切或倾斜不敏感; 组件可以半刚性地安装成用于弹性偏转，以便将它们与支撑结构的变形隔离开，并且可以通过移动角立方后视反射器，背靠背双镜来最佳地产生动态光束路径长度变化 ， 或两者。

公开(公告)号：US5403433A

公开(公告)日：1995-04-04

申请号：US116295

申请日：1993-09-03

Applicant: Philip W. Morrison ,  Peter R. Solomon ,  Robert M. Carangelo ,  David G. Hamblen

Inventor： Philip W. Morrison ,  Peter R. Solomon ,  Robert M. Carangelo ,  David G. Hamblen

IPC: G01J3/453 ,  G01J5/00 ,  G01J5/60 ,  G01N21/17 ,  G01N21/55 ,  G01N21/59 ,  G01N21/00

CPC classification number: G01J5/0003 ,  G01J5/0044 ,  G01J5/08 ,  G01J5/0846 ,  G01J5/601 ,  G01N21/17 ,  G01J3/453 ,  G01N21/55 ,  G01N21/59

Abstract: The method and apparatus of the invention permit in situ determinations to be made of the temperature and optical constants of a substrate surface that is being treated, by measurements of radiance, reflectance and transmittance. These determinations in turn provide, at any given instant during processing, compositional and other information, thereby affording highly effective feedback control of the processing conditions. The apparatus comprises an integrated, small and relatively inexpensive instrument for process monitoring.

Abstract translation: 本发明的方法和装置允许通过辐射度，反射率和透射率的测量来原位测定待处理的基底表面的温度和光学常数。 这些确定依次在处理过程中的任何给定时刻提供组成和其他信息，从而提供对处理条件的高效反馈控制。 该装置包括用于过程监控的集成的，小且相对便宜的仪器。

公开(公告)号：US5196902A

公开(公告)日：1993-03-23

申请号：US773225

申请日：1991-10-09

Applicant: Peter R. Solomon

Inventor： Peter R. Solomon

IPC: G01B9/02

CPC classification number: G01J3/0291 ,  G01J3/453

Abstract: A two-beam interferometer for Fourier spectroscopy comprises one or two reflecting channels, each having at least one relatively movable wall to vary the path length of a beam traversing the same. A beam passing through the channel makes multiple reflections therewithin, impinges upon a retroreflector, and is transferred back through the channel along the same path to recombine with a second beam, which can be similarly reflected. The multiple reflections that occur within the channel allow a large total path length change to be accomplished with a small degree of motion of the movable wall, to thereby achieve high levels of resolution.

Abstract translation: 用于傅立叶光谱的双光束干涉仪包括一个或两个反射通道，每个反射通道具有至少一个相对可移动的壁，以改变穿过该光束的光束的路径长度。 通过通道的光束在其中进行多次反射，照射到后向反射器上，并且沿着相同的路径被传送回通过通道以与可以类似地反射的第二光束重新组合。 在通道内发生的多次反射允许通过可移动壁的较小程度的运动来实现大的总路径长度变化，从而实现高水平的分辨率。