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公开(公告)号：US20090153880A1
公开(公告)日：2009-06-18
申请号：US11719561
申请日：2005-11-16
IPC分类号： G01B11/00
CPC分类号： G03F7/70775 , G03F9/7003 , G03F9/7049
摘要： The invention relates to a system (1) for detecting motion of a body (2), said body comprising a first diffraction pattern (3A) and a second diffraction pattern (3B) with a predetermined orientation relative to said first diffraction pattern. The system comprises optical means (4A, 4B) adapted to provide at least a first incident beam to said first diffraction pattern to obtain a first diffracted beam from said first diffraction pattern and at least a second incident beam, with a predetermined orientation relative to said first incident beam, to said second diffraction pattern to obtain a second diffracted beam from said second diffraction pattern. The system has means for detecting motion of said body on the basis of the phase difference between at least one of said first diffracted beam and said second diffracted beam. Accordingly a larger in-plane rotation range is obtained for detecting motion of the body (2). The invention also relates to a wafer (2) provided with two-dimensional diffraction patterns (3A,3B) and a method for detecting motion of a body.
摘要翻译： 本发明涉及一种用于检测主体（2）的运动的系统（1），所述主体包括相对于所述第一衍射图案具有预定取向的第一衍射图案（3A）和第二衍射图案（3B）。 该系统包括适于将至少第一入射光束提供给所述第一衍射图案以获得来自所述第一衍射图案的第一衍射光束和至少第二入射光束的光学装置（4A，4B），具有相对于所述第一衍射图案的预定取向 第一入射光束到所述第二衍射图案，以从所述第二衍射图案获得第二衍射光束。 该系统具有用于基于所述第一衍射光束和所述第二衍射光束中的至少一个之间的相位差来检测所述主体的运动的装置。 因此，为了检测身体（2）的运动，获得更大的面内旋转范围。 本发明还涉及具有二维衍射图案（3A，3B）的晶片（2）和用于检测身体运动的方法。
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公开(公告)号：US20090147265A1
公开(公告)日：2009-06-11
申请号：US11719563
申请日：2005-11-17
IPC分类号： G01B9/02
CPC分类号： G01D5/38
摘要： The invention relates to a system (1) for detecting a translation (T) of a body (2) with a diffraction pattern (3) applied to said body. The system comprises means (4) for providing an incident light beam (I) to said diffraction pattern and to obtain a diffracted light beam (D) from said diffraction pattern; means (4) for measuring a phase difference by interference between said incident light beam and said diffracted beam an means (4) for detecting said translation on the basis of said measured phase difference. The invention further relates to a method for detecting a translation of a body (2); a redirection arrangement 6 and a frequency multiplexing system.
摘要翻译： 本发明涉及一种用于利用应用于所述身体的衍射图案（3）检测身体（2）的平移（T）的系统（1）。 该系统包括用于向所述衍射图案提供入射光束（I）并从所述衍射图案获得衍射光束（D）的装置（4） 用于通过所述入射光束和所述衍射光束之间的干涉测量相位差的装置（4），用于基于所述测量的相位差检测所述平移的装置（4）。 本发明还涉及一种用于检测身体（2）的平移的方法。 重定向装置6和频率复用系统。
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公开(公告)号：US20090127938A1
公开(公告)日：2009-05-21
申请号：US11577818
申请日：2005-10-20
IPC分类号： H02K41/03
CPC分类号： H02K41/031 , H02K3/04 , H02K3/47
摘要： An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in cooperation with said magnet track (53) and having a plurality of concentrated multi-turn coils (31 a-f, 41 a-d, 51 a-k), wherein the end windings (31E) of the coils (31 a-f, 41 a-e) are substantially rounded, the coil part (31 S) between the end windings (31E) is straight and the coils (31 a-f, 41a-d, 51a-k) are arranged in an overlapping manner, wherein the end windings (31E) are pressed together, is provided. The coil assembly has the advantage to be flat, thus being easy to handle, and leading to a high steepness.
摘要翻译： 一种无铁线性电动机（5），包括磁体轨道（53）和与所述磁体轨道（53）配合操作的线圈组件（50），并且具有多个集中的多匝线圈（31f，41d，51ak ），其中所述线圈（31 af，41a）的端部绕组（31E）基本上是圆形的，所述端部绕组（31E）之间的线圈部分（31S）是直的，并且所述线圈（31f1，41a-d， 51a-k）以重叠的方式布置，其中端部绕组（31E）被压在一起。 线圈组件具有平坦的优点，因此易于处理并且导致高陡度。
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公开(公告)号：US07375479B2
公开(公告)日：2008-05-20
申请号：US10539371
申请日：2003-12-15
申请人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
发明人： Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
CPC分类号： F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要： A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) v the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译： 一种设备在精确控制的位置处理诸如半导体晶片的物体（19）。 物体（19）由可沿着路径移动的工作平台（12）支撑。 安装在工作平台（12）上的悬架致动器部件（14）包含一个软磁芯（24），该软磁芯（24）具有面向沿该路径的支撑结构上的软磁元件（34）表面的磁极和一个绕组（20） 用于施加电流以产生穿过磁芯（24）的磁场，并通过软磁元件（34）返回磁极。 传感器（17）相对于位置参考元件（16）感测悬架致动器部件（14）的测量位置。 控制电路包括外部控制电路（40）和内部控制电路（42）。 外部控制电路（40）接收感测结果并且确定力设定点信息以将致动器部件（14）的测量位置调节到所需值。 内部控制电路（42）接收力设定点信息并根据力设定点信息控制电流以实现致动器部件（14）和支撑结构（10）之间的力。
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15.发明授权Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby 失效位移装置，研磨装置，装置制造方法以及由此制造的装置公开(公告)号：US07161267B2
公开(公告)日：2007-01-09
申请号：US10855962
申请日：2004-05-28
IPC分类号： H02K41/025 , H02N15/02 , G03F7/20
CPC分类号： H02K7/09 , H02K41/025 , H02K2201/18 , H02N15/02 , Y10S414/135
摘要： A displacement apparatus comprising a first part and a second part, which can be displaced relative to each other in first and second different directions. The apparatus being suitable for use in a lithographic apparatus for positioning the mask holder with respect to the projection beam and for positioning the wafer substrate table with respect to the patterned beam. The first part comprises a first and second coil system in which an alternating current is provided by a power supply. The second part comprises a conductive platen which is disposed in a zone in which a magnetic field is induced when power is supplied to the coil systems. The coil system and platen are arranged with respect to each other so that when currents are passed through the coils, a magnetic field induced in the platen causes displacement between the platen and the coils in the first and second different directions.
摘要翻译： 一种位移设备，包括可在第一和第二不同方向上相对于彼此移位的第一部分和第二部分。 该设备适用于光刻设备中，用于相对于投影光束定位掩模保持器并且相对于图案化的光束定位晶片衬底台。 第一部分包括第一和第二线圈系统，其中交流电由电源提供。 第二部分包括导电台板，该导电台板设置在向线圈系统供电时引起磁场的区域。 线圈系统和压板相对于彼此布置，使得当电流通过线圈时，在压板中感应的磁场引起压板和线圈在第一和第二不同方向上的位移。
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公开(公告)号：US06891600B2
公开(公告)日：2005-05-10
申请号：US10457788
申请日：2003-06-10
CPC分类号： G03F7/70758 , H02K3/18 , H02K3/325 , H02K41/03 , H02K41/031 , H02K2201/18
摘要： A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.
摘要翻译： 用于光刻投影装置中的致动器的线圈。 线圈由卷绕在绕组轴上的导电片材材料条形成。 片状材料带的各匝由不导电层分开。
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