公开(公告)号：US11558027B2

公开(公告)日：2023-01-17

申请号：US16362743

申请日：2019-03-25

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Dae Hun Jeong ,  Sung Wook Kim ,  Sang Uk Son ,  Sang Heon Han ,  Won Han

IPC: H01L41/00 ,  H02N2/00 ,  H03H9/02 ,  H03H9/17 ,  H03H9/13

Abstract: A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer.

公开(公告)号：US11558025B2

公开(公告)日：2023-01-17

申请号：US17074978

申请日：2020-10-20

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Jeong Hoon Ryou ,  Sang Uk Son ,  Sung Wook Kim ,  Won Han ,  Dae Hun Jeong ,  Sang Heon Han

IPC: H03H9/02 ,  H03H9/13 ,  H03H9/17

Abstract: A bulk-acoustic wave resonator includes: a first electrode; a piezoelectric layer at least partially disposed on an upper portion of the first electrode; and a second electrode disposed to cover at least a portion of the piezoelectric layer. The second electrode includes a frame disposed at an edge of an active region of the bulk-acoustic wave resonator, and the first electrode, the piezoelectric layer and the second electrode are disposed to overlap one another at the edge of the active region. The frame includes a wall disposed at the edge of the active region and a trench formed on an internal side of the wall. An internal boundary line of the trench has a concave-convex shape in a plane parallel to an upper surface of the frame.

公开(公告)号：US11277113B2

公开(公告)日：2022-03-15

申请号：US16936807

申请日：2020-07-23

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Seung Wook Park ,  Jae Hyun Jung ,  Jae Chang Lee ,  Dae Hun Jeong ,  Sang Uk Son ,  Seong Hun Na

IPC: H03H9/13 ,  H03H9/02 ,  H03H9/17

Abstract: A bulk-acoustic wave resonator includes: a substrate; a first electrode disposed on the substrate; a piezoelectric layer disposed to cover at least a portion of the first electrode; a second electrode disposed to cover at least a portion of the piezoelectric layer; a metal pad connected to the first electrode and the second electrode; and a connection member connected an upper surface of the metal pad. A lower end portion of the connection member includes a tapered portion decreasing in a diameter in a direction toward a lower end of the connection member, and an angle between an inclined surface of the tapered portion and the upper surface of the metal pad is 45° to 80°.

公开(公告)号：US10396751B2

公开(公告)日：2019-08-27

申请号：US15384385

申请日：2016-12-20

Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.

Inventor： Won Han ,  Tae Hun Lee ,  Dae Hun Jeong ,  Moon Chul Lee ,  Sang Uk Son

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/54

Abstract: An acoustic wave filter device includes a lower electrode disposed between a substrate and a piezoelectric layer, an upper electrode disposed on the piezoelectric layer, and an insulating layer disposed on the upper electrode. The insulating layer exposes portions of the upper electrode.

公开(公告)号：US09857258B2

公开(公告)日：2018-01-02

申请号：US14933043

申请日：2015-11-05

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Hun Lee ,  Chang Hyun Lim ,  June Kyoo Lee ,  Dae Hun Jeong

IPC: G01L9/06 ,  G01L9/00 ,  G01L19/06

CPC classification number: G01L9/0054 ,  G01L19/0618

Abstract: A pressure sensor includes a sensor, an elastic support portion, a membrane, and a pressure detector. The sensor is accommodated in a frame of a base substrate. The elastic support portion is elastically connecting the sensor to the frame. The membrane is disposed on a surface of the sensor. The pressure detector is disposed on the membrane and configured to detect a variation in pressure based on a movement of the membrane.