Abstract:
Provided are a micromachining processing agent and a micromachining processing method that enable favorable micromachining while suppressing remaining of fine particles on an object to be processed having at least a silicon-containing insulating film. The micromachining processing agent according to the present invention is a micromachining processing agent for micromachining an object to be processed having at least a silicon-containing insulating film, the micromachining processing agent containing: a compound represented by a chemical formula (1) below; hydrogen fluoride; ammonium fluoride; and water,
wherein Rf represents perfluoroalkyl group having 1 to 4 carbon atoms, and M+ represents a hydrogen ion or an ammonium ion, wherein a content of the compound is 0.001 mass % or more and 0.5 mass % or less with respect to a total mass of the micromachining processing agent, a content of the hydrogen fluoride is 0.05 mass % or more and 25 mass % or less with respect to a total mass of the micromachining processing agent, a content of the ammonium fluoride is 0.5 mass % or more and 40 mass % or less with respect to a total mass of the micromachining processing agent, and the content of the hydrogen fluoride and the content of the ammonium fluoride satisfy a relational expression (1) below:
Y ≦
-
0 . 8
X
+
4 0
( 1 )
wherein X represents a concentration (mass %) of hydrogen fluoride and Y represents a concentration (mass %) of ammonium fluoride.
Abstract:
A fuel cell catalyst which has high power output characteristics and suppresses degradation of power generation performance due to starting, stopping or load variation; a manufacturing method thereof; a membrane electrode assembly for fuel cell; and a fuel cell including the same. The fuel cell catalyst includes at least catalytically active species and a carrier supporting the catalytically active species. The catalytically active species are at least one selected from the group consisting of platinum, a platinum alloy, and a core-shell catalyst in which a core of a metal different from platinum is coated with a shell containing platinum, the carrier is a carbon material, and at least one of the catalytically active species and the carrier contain(s) fluorine atoms.
Abstract:
A nonaqueous electrolytic solution exhibits excellent storage characteristics even in high-temperature environments. The solution for the secondary battery includes at least one of boron complex salts, boric acid esters, acid anhydrides, cyclic carbonates having an unsaturated bond, cyclic carbonates having a halogen atom, cyclic sulfonic acid esters, and amines having an acetoacetyl group. A secondary battery having a positive electrode and a negative electrode makes use of this electrolytic solution.
Abstract:
A phosphodiester salt is added to the electrolytic solution to form a nonaqueous electrolytic solution for a secondary battery. The nonaqueous electrolytic solution has excellent storage characteristics in a temperature load environment. Deterioration of the charge-discharge characteristics of the nonaqueous electrolytic solution and increase in internal resistance of the nonaqueous electrolytic solution are suppressed during storage. A secondary battery having a positive electrode and a negative electrode makes use of this electrolytic solution.
Abstract:
Provided are a liquid dispersion of fluoride particles, which has low viscosity and excellent dispersibility, and is suitable for producing an optical film such as an antireflection film; a method for producing the same; and an optical film using the same. The liquid dispersion of fluoride particles according to the present invention is that in which particles of a fluoride represented by the chemical formula AxCFy (wherein A represents sodium or potassium, C represents silicon or boron, x is 1 or 2, and y is 4 or 6) are dispersed in an aprotic organic solvent having a relative permittivity of 5 to 40, and the optical film according to the present invention is produced by using the liquid dispersion of fluoride particles.
Abstract:
A nonaqueous electrolytic solution for a secondary battery exhibits excellent cycle characteristics even in a high temperature environment. The solution can be included in a secondary battery. The solution includes at least one component (A) represented by the following chemical formula: in which Mn+ represents at least one of a hydrogen ion, an alkali metal ion, an alkaline earth metal ion, an aluminum ion, a transition metal ion and an onium ion, X represents a halogen atom, R1 represents a hydrocarbon group having 1 to 20 carbon atoms, or a hydrocarbon group having 1 to 20 carbon atoms and having at least any one of a halogen atom, a heteroatom or an unsaturated bond, and n represents a valence.
Abstract:
A nonaqueous electrolytic solution for a secondary battery exhibits excellent cycle characteristics even in high-temperature environments. The solution INCLUDES at least one of boron complex salts, boric acid esters, acid anhydrides, cyclic carbonates having an unsaturated bond, cyclic carbonates having a halogen atom, cyclic sulfonic acid esters, and amines having an acetoacetyl group. A secondary battery having a positive electrode and a negative electrode makes use of this electrolytic solution.