MICROPROCESSING TREATMENT AGENT AND MICROPROCESSING TREATMENT METHOD

    公开(公告)号:US20240240084A1

    公开(公告)日:2024-07-18

    申请号:US18559459

    申请日:2021-06-11

    CPC classification number: C09K13/08 H01L21/31111

    Abstract: Provided are a micromachining processing agent and a micromachining processing method that enable favorable micromachining while suppressing remaining of fine particles on an object to be processed having at least a silicon-containing insulating film. The micromachining processing agent according to the present invention is a micromachining processing agent for micromachining an object to be processed having at least a silicon-containing insulating film, the micromachining processing agent containing: a compound represented by a chemical formula (1) below; hydrogen fluoride; ammonium fluoride; and water,




    wherein Rf represents perfluoroalkyl group having 1 to 4 carbon atoms, and M+ represents a hydrogen ion or an ammonium ion, wherein a content of the compound is 0.001 mass % or more and 0.5 mass % or less with respect to a total mass of the micromachining processing agent, a content of the hydrogen fluoride is 0.05 mass % or more and 25 mass % or less with respect to a total mass of the micromachining processing agent, a content of the ammonium fluoride is 0.5 mass % or more and 40 mass % or less with respect to a total mass of the micromachining processing agent, and the content of the hydrogen fluoride and the content of the ammonium fluoride satisfy a relational expression (1) below:







    Y




    -

    0
    .
    8



    X

    +

    4

    0






    (
    1
    )







    wherein X represents a concentration (mass %) of hydrogen fluoride and Y represents a concentration (mass %) of ammonium fluoride.

    FUEL CELL CATALYST, MEMBRANE ELECTRODE ASSEMBLY FOR FUEL CELL, AND FUEL CELL INCLUDING THE SAME

    公开(公告)号:US20210036334A1

    公开(公告)日:2021-02-04

    申请号:US17043753

    申请日:2019-04-15

    Abstract: A fuel cell catalyst which has high power output characteristics and suppresses degradation of power generation performance due to starting, stopping or load variation; a manufacturing method thereof; a membrane electrode assembly for fuel cell; and a fuel cell including the same. The fuel cell catalyst includes at least catalytically active species and a carrier supporting the catalytically active species. The catalytically active species are at least one selected from the group consisting of platinum, a platinum alloy, and a core-shell catalyst in which a core of a metal different from platinum is coated with a shell containing platinum, the carrier is a carbon material, and at least one of the catalytically active species and the carrier contain(s) fluorine atoms.

    NONAQUEOUS ELECTROLYTE SOLUTION FOR SECONDARY BATTERIES AND SECONDARY BATTERY PROVIDED WITH SAME
    14.
    发明申请
    NONAQUEOUS ELECTROLYTE SOLUTION FOR SECONDARY BATTERIES AND SECONDARY BATTERY PROVIDED WITH SAME 审中-公开
    用于二次电池和二次电池的非电解电解质

    公开(公告)号:US20170054178A1

    公开(公告)日:2017-02-23

    申请号:US15118827

    申请日:2015-02-16

    Abstract: A phosphodiester salt is added to the electrolytic solution to form a nonaqueous electrolytic solution for a secondary battery. The nonaqueous electrolytic solution has excellent storage characteristics in a temperature load environment. Deterioration of the charge-discharge characteristics of the nonaqueous electrolytic solution and increase in internal resistance of the nonaqueous electrolytic solution are suppressed during storage. A secondary battery having a positive electrode and a negative electrode makes use of this electrolytic solution.

    Abstract translation: 向电解液中加入磷酸二酯盐,形成二次电池用非水电解液。 非水电解液在温度负荷环境下具有优良的储存特性。 储存期间,抑制了非水电解液的充放电特性的劣化和非水电解液的内阻增加。 具有正极和负极的二次电池利用该电解液。

    LIQUID DISPERSION OF FLUORIDE PARTICLES AND METHOD FOR PRODUCING SAME, AND OPTICAL FILM

    公开(公告)号:US20230038554A1

    公开(公告)日:2023-02-09

    申请号:US17788140

    申请日:2020-11-11

    Abstract: Provided are a liquid dispersion of fluoride particles, which has low viscosity and excellent dispersibility, and is suitable for producing an optical film such as an antireflection film; a method for producing the same; and an optical film using the same. The liquid dispersion of fluoride particles according to the present invention is that in which particles of a fluoride represented by the chemical formula AxCFy (wherein A represents sodium or potassium, C represents silicon or boron, x is 1 or 2, and y is 4 or 6) are dispersed in an aprotic organic solvent having a relative permittivity of 5 to 40, and the optical film according to the present invention is produced by using the liquid dispersion of fluoride particles.

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