公开(公告)号：US11137592B2

公开(公告)日：2021-10-05

申请号：US16248379

申请日：2019-01-15

Applicant: STMicroelectronics S.r.l.

Inventor： Luca Lamagna ,  Stefano Losa ,  Silvia Rossini ,  Federico Vercesi ,  Elena Cianci ,  Graziella Tallarida ,  Claudia Wiemer

IPC: G02B26/08 ,  G02B1/18 ,  G02B1/14 ,  B81B1/00 ,  G02B5/08

Abstract: A micromechanical mirror structure includes a mirror element designed to reflect an incident light radiation and a protective structure arranged over the mirror element to provide mechanical protection for the mirror element and to increase the reflectivity of the mirror element with respect to the incident light radiation. The protective structure has a first protective layer and a second protective layer which are stacked on the mirror element. The second protective layer is arranged on the first protective layer and the first protective layer is arranged on the mirror element. The layers include a respective dielectric material and having respective refractive indexes that jointly increase the reflectivity of the mirror element in a range of wavelengths of interest.

公开(公告)号：US10555091B2

公开(公告)日：2020-02-04

申请号：US16128288

申请日：2018-09-11

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Matteo Perletti ,  Federico Vercesi ,  Silvia Adorno ,  Giorgio Allegato

IPC: H01L41/09 ,  H04R19/04 ,  B81B7/00 ,  H04R19/00 ,  B81C1/00 ,  H04R31/00 ,  H04R1/08 ,  H04R1/28

Abstract: A method for manufacturing a filtering module comprising the steps of: forming a multilayer body comprising a filter layer of semiconductor material and having a thickness of less than 10 μm, a first structural layer coupled to a first side of the filter layer, and a second structural layer coupled to a second side, opposite to the first side, of the filter layer; forming a recess in the first structural layer, which extends throughout its thickness; removing selective portions, exposed through the recess, of the filter layer to form a plurality of openings, which extend throughout the thickness of the filter layer; and completely removing the second structural layer to connect fluidically the first and second sides of the filter layer, thus forming a filtering membrane designed to inhibit passage of contaminating particles.

公开(公告)号：US20180059405A1

公开(公告)日：2018-03-01

申请号：US15245805

申请日：2016-08-24

Applicant: STMicroelectronics S.r.l.

Inventor： Giorgio Allegato ,  Sonia Costantini ,  Federico Vercesi ,  Roberto Carminati

IPC: G02B26/08 ,  B81C1/00 ,  B81B7/00 ,  G02B26/10

CPC classification number: G02B26/105 ,  B81B2201/042 ,  B81C1/00317 ,  B81C2203/0109 ,  B81C2203/019 ,  G02B26/0833

Abstract: Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.