公开(公告)号：US11662205B2

公开(公告)日：2023-05-30

申请号：US17504994

申请日：2021-10-19

Applicant: STMicroelectronics, Inc.

Inventor： Deyou Fang ,  Chao-Ming Tsai ,  Milad Alwardi ,  Yamu Hu ,  David McClure

IPC: G01C19/5726 ,  G01C25/00 ,  G01C19/5733

CPC classification number: G01C19/5726 ,  G01C19/5733 ,  G01C25/005

Abstract: A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

公开(公告)号：US20210405085A1

公开(公告)日：2021-12-30

申请号：US17472126

申请日：2021-09-10

Applicant: STMicroelectronics, Inc.

Inventor： Davy Choi ,  Yamu Hu ,  Deyou Fang

IPC: G01P21/00 ,  G01P15/125 ,  G01R19/10 ,  G01R31/28

Abstract: In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.

公开(公告)号：US20180335446A1

公开(公告)日：2018-11-22

申请号：US15599234

申请日：2017-05-18

Applicant: STMicroelectronics, Inc.

Inventor： Davy Choi ,  Yamu Hu ,  Deyou Fang

IPC: G01P21/00 ,  G01P15/125 ,  G01R19/10 ,  G01R27/26 ,  G01R19/165

Abstract: In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.