公开(公告)号：US20230201969A1

公开(公告)日：2023-06-29

申请号：US18111940

申请日：2023-02-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sung Yong LEE ,  Toshinaru SUZUKI ,  Seung Ho MYOUNG ,  Gyeong Hee HAN ,  Gyoo Wan HAN

IPC: B23K26/38 ,  B23K26/70 ,  B23K26/12 ,  B23K101/40

CPC classification number: B23K26/38 ,  B23K26/706 ,  B23K26/1224 ,  B23K26/127 ,  B23K2101/40

Abstract: A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

公开(公告)号：US20210325639A1

公开(公告)日：2021-10-21

申请号：US17361560

申请日：2021-06-29

Applicant: Samsung Display Co., Ltd.

Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Kyung Hoon CHUNG ,  Gyoo Wan HAN

IPC: G02B13/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/082

Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

公开(公告)号：US20190187416A1

公开(公告)日：2019-06-20

申请号：US16114712

申请日：2018-08-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Emil ASLANOV ,  Alexander VORONOV ,  Gyoo Wan HAN

IPC: G02B13/00 ,  G02B27/00 ,  G02B27/42

CPC classification number: G02B13/0005 ,  G02B13/22 ,  G02B27/0031 ,  G02B27/4211 ,  G02B27/4227

Abstract: An F-theta lens includes a diffractive optical element and a plurality of spherical lenses. The diffractive optical element includes multi-level diffractive structure having three or more levels and defined on a surface thereof, and the diffractive optical element is arranged before the spherical lenses on a path of a laser beam.

公开(公告)号：US20180149604A1

公开(公告)日：2018-05-31

申请号：US15825842

申请日：2017-11-29

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Alexander VORONOV ,  Gyoo Wan HAN ,  Ku Hyun KANG

IPC: G01N21/956 ,  B23K26/00 ,  B23K26/03

CPC classification number: G01N21/956 ,  B23K26/032 ,  B23K26/359 ,  G01N2021/9513

Abstract: A patterning apparatus includes a laser generator, at least one lens, a detector, and a controller. The laser generator generates a first laser beam and a second laser beam having different intensities. The at least one lens irradiates the first laser beam to form a pattern in a substrate, irradiates a second laser beam to determine a defect of the pattern, and condenses reflected beams generated as the second laser beam is reflected from the substrate. The detector converts the reflected beams to electrical signals. The controller determines a defect of the pattern based on the electrical signals.