公开(公告)号：US20180158703A1

公开(公告)日：2018-06-07

申请号：US15809537

申请日：2017-11-10

Applicant: Samsung Display Co. Ltd.

Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Young Geun CHO ,  Gyoo Wan HAN

IPC: H01L21/67 ,  G02B19/00 ,  G02B27/12 ,  G02B27/00 ,  G02B26/08 ,  G02B27/09 ,  H01L27/12 ,  H01L21/02 ,  B23K26/06

CPC classification number: H01L21/67115 ,  B23K26/0648 ,  B23K26/0676 ,  B23K2103/56 ,  G02B3/0006 ,  G02B19/0009 ,  G02B19/0047 ,  G02B26/0875 ,  G02B27/0025 ,  G02B27/0927 ,  G02B27/123 ,  H01L21/02686 ,  H01L27/1274

Abstract: A laser processing apparatus includes a laser beam generating unit which emits a laser beam, a lens unit which divides the laser beam into a plurality of laser beams, and a light condensing unit which condenses the plurality of laser beams. The lens unit includes a first lens array having a first central axis and a second lens array having a second central axis, and wherein at least one of the first lens array and the second lens array reciprocates such that the first central axis and the second central axis are deviated from each other.

公开(公告)号：US20210325639A1

公开(公告)日：2021-10-21

申请号：US17361560

申请日：2021-06-29

Applicant: Samsung Display Co., Ltd.

Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Kyung Hoon CHUNG ,  Gyoo Wan HAN

IPC: G02B13/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/082

Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

公开(公告)号：US20220214531A1

公开(公告)日：2022-07-07

申请号：US17509300

申请日：2021-10-25

Applicant: Samsung Display Co., LTD.

Inventor： Akifumi SANGU ,  Je Kil RYU ,  Cheol Ho PARK ,  Hae Sook LEE ,  Jin Hong JEUN ,  Young Su CHAE ,  Gyoo Wan HAN

IPC: G02B17/00 ,  H01L21/67 ,  B23K26/50

Abstract: A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.

公开(公告)号：US20180157006A1

公开(公告)日：2018-06-07

申请号：US15793698

申请日：2017-10-25

Applicant: Samsung Display Co. Ltd.

Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Kyung Hoon CHUNG ,  Gyoo Wan HAN

IPC: G02B13/00 ,  G02B26/10 ,  B23K26/06

Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.