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公开(公告)号：US20180337334A1
公开(公告)日：2018-11-22
申请号：US15724082
申请日：2017-10-03
Applicant: Samsung Display Co., Ltd.
Inventor： Jeongkuk KIM , Youngmin MOON , Sungsoon IM , Kyuhwan HWANG
Abstract: A method of manufacturing a deposition mask includes forming a coating layer on a surface of a mask substrate, irradiating a laser beam onto the coating layer to form pattern openings in the mask substrate, and removing a residual film of the coating layer.
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12.发明申请公开(公告)号：US20170162833A1
公开(公告)日：2017-06-08
申请号：US15196055
申请日：2016-06-29
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin MOON , Sungsoon IM , Kyuhwan HWANG , Minho MOON
CPC classification number: H01L51/56 , B23K26/382 , B23K2101/36 , C25D1/08 , C25D1/10 , C25D1/20 , C25D3/562 , G03F7/20 , H01L27/3244 , H01L51/0011 , H01L2227/323
Abstract: A method of manufacturing a mask assembly includes forming, via an electroforming process, a base material including at least one opening on an electrode plate; and reprocessing the at least one opening using a laser to form at least one reprocessed opening.
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13.发明申请公开(公告)号：US20170141314A1
公开(公告)日：2017-05-18
申请号：US15175640
申请日：2016-06-07
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin MOON , Minho MOON , Sungsoon IM , Soonchul CHANG , Kyuhwan HWANG
CPC classification number: H01L51/0011 , C23C14/042 , C23C14/24 , H01L27/3244 , H01L51/0023 , H01L51/5237 , H01L51/5256 , H01L51/56
Abstract: A mask assembly includes: a mask frame; and a mask sheet disposed on the mask frame, wherein the mask sheet is stretched by applying tensile force and affixed onto the mask frame, wherein the mask sheet includes a pattern including a plurality of openings, and wherein a thickness of the pattern is different from thicknesses of other portions of the mask sheet.
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