公开(公告)号：US11004712B2

公开(公告)日：2021-05-11

申请号：US16532920

申请日：2019-08-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung Yoon Ryu ,  Joonseo Song ,  Souk Kim ,  Younghoon Sohn ,  Yusin Yang ,  Chihoon Lee

IPC: H01L21/67 ,  G01B11/24 ,  G06T7/00

Abstract: Disclosed are methods of inspecting semiconductor wafers, inspection systems for performing the same, and methods of fabricating semiconductor devices using the same. A method of inspecting a semiconductor wafer including preparing a wafer including zones each having patterns, obtaining representative values for the patterns, scanning the patterns under an optical condition to obtain optical signals for the patterns, each of the optical signals including optical parameters, selecting a representative optical parameter that is one of the optical parameters that has a correlation with the representative values, obtaining a reference value of the representative optical parameter for a reference pattern, and obtaining a defect of an inspection pattern by comparing the reference value with an inspection value of the representative optical parameter for the inspection pattern.

公开(公告)号：US09417055B2

公开(公告)日：2016-08-16

申请号：US14799107

申请日：2015-07-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon Ryu ,  Sang-Kil Lee ,  Chung-Sam Jun ,  Woo-Seok Ko ,  Ho-Jeong Kwak ,  Souk Kim ,  Kwan-Woo Ryu ,  Yu-Sin Yang

IPC: G01B11/28 ,  G01B11/06

CPC classification number: G01B11/0633

Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.

Abstract translation: 提供了用于测量薄膜厚度的装置和系统。 该装置包括信号检测器，快速傅里叶变换（FFT）发生器，快速傅里叶逆变换（IFFT）发生器和厚度分析器。 信号检测器检测相对于从薄膜反射的反射光的电场信号。 FFT发生器相对于电场信号执行FFT，以将DC分量与电场信号的AC分量分离。 IFFT发生器接收电场信号的分离的AC分量，相对于AC分量执行IFFT，并提取AC分量的相位值。 厚度分析器使用提取的相位值来测量薄膜的厚度。