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公开(公告)号：US06700273B1
公开(公告)日：2004-03-02
申请号：US09633139
申请日：2000-08-04
IPC分类号： H02K1700
CPC分类号： H02K5/128 , F04C18/00 , F04C29/0085 , F04C2220/10 , F04C2240/51 , H02K3/44
摘要： A gas transfer machine for use as a vacuum pump, for example, has a pump rotor mounted on a rotatable shaft for transferring a gas, and a reluctance-type motor for rotating the rotatable shaft. The reluctance-type motor has a stator, a motor rotor surrounded by the stator, and a shield member isolating the stator from the motor rotor. The motor rotor is directly coupled to the rotatable shaft and has a plurality of magnetic salient poles.
摘要翻译： 例如，用作真空泵的气体输送机具有安装在用于输送气体的旋转轴上的泵转子和用于旋转可旋转轴的磁阻型电动机。 磁阻型电动机具有定子，由定子包围的电机转子以及将定子与电动机转子隔离的屏蔽部件。 马达转子直接与可转动轴相连，并具有多个磁性突出极。
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公开(公告)号：US07645126B2
公开(公告)日：2010-01-12
申请号：US10887234
申请日：2004-07-09
CPC分类号： F04D29/058 , F04D17/168 , F04D19/046 , F04D23/008 , F04D29/266 , F04D29/30
摘要： To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum.A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
摘要翻译： 提供能够在大气压至高真空的压力范围内抽真空的真空泵，能够高速旋转以减小泵送性能并且能够产生完全无油的真空。 用于排出气体的真空泵包括：由轴承22可旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部分10具有安装在主轴5上的第一旋转叶片13，固定在第一壳体12中的第一固定叶片14和进气口11; 以及具有安装在主轴5上的第二旋转叶片33的第二排气部分30，固定在第二壳体32中的第二固定叶片34和排气口31.进气口11位于 主轴5和第一排气部10，轴承22和第二排气部30沿着主轴5轴向配置。
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公开(公告)号：US20050025640A1
公开(公告)日：2005-02-03
申请号：US10887234
申请日：2004-07-09
IPC分类号： F04D29/056 , F04D17/16 , F04D19/04 , F04D29/058 , F04B17/00
CPC分类号： F04D29/058 , F04D17/168 , F04D19/046 , F04D23/008 , F04D29/266 , F04D29/30
摘要： To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaft 5 rotatably supported by a bearing 22; a motor 23 for driving the main shaft 5 for rotation; a first exhaust section 10 having a first rotary vane 13 attached to the main shaft 5, a first fixed vane 14 fixed in a first casing 12, and an intake port 11; and a second exhaust section 30 having a second rotary vane 33 attached to the main shaft 5, a second fixed vane 34 fixed in a second casing 32, and an exhaust port 31. The intake port 11 is located in the vicinity of an end of the main shaft 5, and the first exhaust section 10, the bearing 22 and the second exhaust section 30 are arranged in this order axially along the main shaft 5.
摘要翻译： 提供能够在大气压至高真空的压力范围内抽真空的真空泵，能够高速旋转以减小泵送性能并且能够产生完全无油的真空。 用于排出气体的真空泵包括：由轴承22可旋转地支撑的主轴5; 用于驱动主轴5旋转的马达23; 第一排气部分10具有安装在主轴5上的第一旋转叶片13，固定在第一壳体12中的第一固定叶片14和进气口11; 以及具有安装在主轴5上的第二旋转叶片33的第二排气部分30，固定在第二壳体32中的第二固定叶片34和排气口31.进气口11位于 主轴5和第一排气部10，轴承22和第二排气部30沿着主轴5轴向配置。
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公开(公告)号：US07645116B2
公开(公告)日：2010-01-12
申请号：US11411896
申请日：2006-04-27
IPC分类号： F01D1/10
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008
摘要： A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
摘要翻译： 本发明的涡轮式真空泵包括：用于沿轴向抽吸气体的吸入部; 排出部，其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮，以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮，用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。
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公开(公告)号：US20060263205A1
公开(公告)日：2006-11-23
申请号：US11411896
申请日：2006-04-27
IPC分类号： F04D13/12
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008
摘要： A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.
摘要翻译： 本发明的涡轮式真空泵1具有：沿轴向抽吸气体的吸入部23A; 排出部50，其中旋转叶轮70,24和固定叶轮71,28交替布置; 用于旋转所述旋转叶轮70,24的旋转轴21; 固定在所述旋转轴21的吸附部侧端面15的涡轮叶轮部73; 所述旋转叶轮70,24包括用于沿所述轴向方向排出所述吸入气体的一个或多个涡轮叶轮70和位于所述一个或多个涡轮叶轮70下游的一个或多个离心式叶轮24，用于将所述排出气体进一步排出 离心拖曳效应; 并且所述一个或多个离心式叶轮24固定到通过其的所述旋转轴21; 所述一个或多个涡轮叶轮70包括在所述涡轮叶轮部分73中。
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16.发明授权公开(公告)号：US08066495B2
公开(公告)日：2011-11-29
申请号：US12613854
申请日：2009-11-06
IPC分类号： F04B35/04
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译： 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。
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17.发明申请公开(公告)号：US20100047096A1
公开(公告)日：2010-02-25
申请号：US12613854
申请日：2009-11-06
IPC分类号： F04D19/04 , F04D29/043 , F04D29/20
CPC分类号： F04D29/058 , F04D19/04 , F04D29/584
摘要： A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bearings for supporting the rotor blades, a motor for rotating the rotor blades; and a rotating shaft comprising a first rotating shaft to which the rotor blades are attached, and a second rotating shaft to which a motor rotor of the motor is attached.
摘要翻译： 涡轮真空泵适用于抽空腐蚀性工艺气体或排空含有反应产物的气体。 涡轮真空泵包括具有进气口的壳体，包括转子叶片和容纳在壳体中的定子叶片的泵部分，用于支撑转子叶片的轴承，用于旋转转子叶片的马达; 以及旋转轴，其包括安装有转子叶片的第一旋转轴和安装有马达的马达转子的第二旋转轴。
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公开(公告)号：US20090196734A1
公开(公告)日：2009-08-06
申请号：US12365314
申请日：2009-02-04
CPC分类号： F04D19/042 , F04D17/168 , F04D19/046
摘要： A turbo vacuum pump comprising a suction part 23A that sucks gas in an axial direction; a discharge part 50 that discharges the gas sucked by the suction part 23A, the discharge part 50 having a plurality of rotating impellers 70, 80 and a stationary impeller 71 arranged so as to be opposed to each of the plurality of rotating impellers 70, 80; and a rotating shaft 21 that rotates the plurality of rotating impellers 70, 80, wherein the plurality of rotating impellers 70, 80 include at least one stage of a first turbine impeller 70 for discharging the sucked gas in the axial direction, the first turbine impeller 70 being fixed to a suction-part-side end face 15 of the rotating shaft 21, and at least one stage of a second turbine impeller 80 fixed to the rotating shaft 21 that extends through the second turbine impeller 80, the second turbine impeller 80 being arranged downstream of the first turbine impeller 70.
摘要翻译： 涡轮真空泵，包括沿轴向吸入气体的吸入部23A; 排出部分50，其排出由抽吸部分23A吸入的气体，排出部分50具有多个旋转叶轮70,80和固定叶轮71，其被布置成与多个旋转叶轮70,80中的每一个相对 ; 以及旋转多个旋转叶轮70,80的旋转轴21，其中多个旋转叶轮70,80包括用于沿着轴向排出吸入气体的第一涡轮机叶轮70的至少一个级，第一涡轮叶轮 70被固定到旋转轴21的吸入部侧端面15，以及固定到旋转轴21上的第二涡轮机叶轮80的至少一个台阶，其延伸穿过第二涡轮机叶轮80，第二涡轮机叶轮80 布置在第一涡轮叶轮70的下游。
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19.发明申请Vacuum evacuation device and method, and substrate processing apparatus and method 审中-公开真空抽气装置及方法，以及基板处理装置及方法公开(公告)号：US20070048145A1
公开(公告)日：2007-03-01
申请号：US11501793
申请日：2006-08-10
申请人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
发明人： Katsutoshi Ishii , Ken Nakao , Takanobu Asano , Kota Umezawa , Hiroaki Ogamino , Tadashi Urata , Katsuaki Usui , Masafumi Inoue , Shinichi Sekiguchi , Hironobu Yamasaki
IPC分类号： F04B49/06
CPC分类号： F04D19/042 , F04D27/0261
摘要： A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.
摘要翻译： 本发明的真空排气装置2包括：真空泵4,5，用于在处理室21中排出气体G 2，工艺气体G 1引入到该气体G 2中并进行处理反应，以在所述 处理室21; 以及用于执行调节所述真空泵4,5的转速的第一控制的控制装置6，使得所述处理室21中的压力条件达到在所述处理反应期间适用于所述处理反应的压力条件，其中所述控制装置 图6基于与所述处理反应相关的处理信息计算出所述真空泵4,5的指定转速，并且执行使所述真空泵4,5在所述第一控制之前达到所述指定转速的第二控制。 真空排气装置2能够在不使真空泵4,5过载的情况下在短时间内将处理室21内的压力提高到目标压力，而与过程反应条件无关。
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公开(公告)号：US06929027B2
公开(公告)日：2005-08-16
申请号：US10863282
申请日：2004-06-09
申请人： Shinichi Sekiguchi
发明人： Shinichi Sekiguchi
CPC分类号： B01F15/0261 , B01F5/0413 , B01F5/0471 , B01F15/0201 , B01F2003/0896 , Y10T137/87281 , Y10T137/87627 , Y10T137/8766 , Y10T137/87676
摘要： A liquid diluting device, with a small and simple structure, is capable of reliably sealing and simply changing dilution concentration. Diluent passages are formed in a first body, and a connecting passage for introducing special liquid connects to these diluent passages. A cylindrical dial covering an opening section of the connecting passage is rotatably provided on an outer section of the first body, a plurality of jets passing through from the inside to the outside are formed in conjunction with this cylindrical dial, and the diameters of the plurality of jets are different. A liquid supply passage is set at a position opposite the connecting passage, so that the cylindrical dial is sandwiched between the liquid supply passage and the connecting passage, and the connecting passage and the liquid supply passage are connected by a jet having a diameter matching the dilution factor to introduce special liquid from the liquid supply passage to one of the diluent passages. In this way, by rotatably attaching the cylindrical dial in which the plurality of jets are formed to the first body, it is possible to have a small and simple structure, and also to easily change the dilution factor by merely turning the dial.
摘要翻译： 液体稀释装置结构简单，结构简单，能够可靠地密封，简单地改变稀释浓度。 稀释通道形成在第一体中，并且用于引入特殊液体的连接通道连接到这些稀释剂通道。 覆盖连接通道的开口部分的圆柱形表盘可旋转地设置在第一主体的外部部分上，与该圆柱形表盘一起形成从内向外穿过的多个喷嘴，并且多个 的喷气机是不同的。 液体供给通道设置在与连接通道相对的位置处，使得圆筒形表盘夹在液体供应通道和连接通道之间，连接通道和液体供应通道通过直径相匹配的喷嘴连接 稀释因子将特殊液体从液体供应通道引入其中一个稀释剂通道。 以这种方式，通过将形成有多个喷嘴的圆筒形表盘可旋转地附接到第一主体，可以具有小而简单的结构，并且也可以通过仅转动表盘容易地改变稀释系数。
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