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公开(公告)号:US20130045589A1
公开(公告)日:2013-02-21
申请号:US13562826
申请日:2012-07-31
申请人: Seokhoon Kim , Sangsu Kim , Chung Geun Koh , Byeongchan Lee , Sunghil Lee , Jinyeong Joe
发明人: Seokhoon Kim , Sangsu Kim , Chung Geun Koh , Byeongchan Lee , Sunghil Lee , Jinyeong Joe
IPC分类号: H01L21/20 , H01L21/425
CPC分类号: H01L29/165 , H01L21/26506 , H01L21/26586 , H01L21/26593 , H01L21/30604 , H01L21/30608 , H01L21/324 , H01L21/76237 , H01L29/0847 , H01L29/1037 , H01L29/6653 , H01L29/66545 , H01L29/6659 , H01L29/66621 , H01L29/66636 , H01L29/7834 , H01L29/7835 , H01L29/7848
摘要: A method of manufacturing a transistor of a semiconductor device, the method including forming a gate pattern on a semiconductor substrate, forming a spacer on a sidewall of the gate pattern, wet etching the semiconductor substrate to form a first recess in the semiconductor substrate, wherein the first recess is adjacent to the spacer, and wet etching the first recess to form a second recess in the semiconductor substrate.
摘要翻译: 一种制造半导体器件的晶体管的方法,所述方法包括在半导体衬底上形成栅极图案,在栅极图案的侧壁上形成间隔物,湿蚀刻半导体衬底以在半导体衬底中形成第一凹部,其中 所述第一凹部邻近所述间隔件,并且湿蚀刻所述第一凹部以在所述半导体衬底中形成第二凹部。
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12.
公开(公告)号:US20110263965A1
公开(公告)日:2011-10-27
申请号:US12904584
申请日:2010-10-14
申请人: Jihoon Kang , Yong Choi , Key Jo Hong , Wei Hu , Yoon Suk Huh , Hyun Keong Lim , Sangsu Kim
发明人: Jihoon Kang , Yong Choi , Key Jo Hong , Wei Hu , Yoon Suk Huh , Hyun Keong Lim , Sangsu Kim
CPC分类号: G01T1/2985 , A61B5/055 , A61B6/037 , A61B6/4258 , A61B6/508 , A61B6/5235 , G01R33/481 , G01T1/2935
摘要: Provided is a positron emission tomography (PET) detector module using Geiger-mode avalanche photodiode (GAPD) as a photosensor. The PET detector module includes: a PET detector unit comprising a scintillation crystal detecting gamma rays emitted from a living body and converting them into a flash of light and a first GAPD photosensor and a second GAPD photosensor each being connected to either end of the scintillation crystal and converting the light flash into an electrical signal; and a reaction depth determination unit receiving the signals from the PET detector unit and comparing amplitude of the signals detected by the first GAPD photosensor and the second GAPD photosensor, thereby determining the position where the gamma rays are incident on the scintillation crystal (reaction depth). The disclosed PET detector module can provide high energy and high energy and reaction depth data while maintaining linearity.
摘要翻译: 提供了使用盖革模式雪崩光电二极管(GAPD)作为光电传感器的正电子发射断层摄影(PET)检测器模块。 PET检测器模块包括:PET检测器单元,其包括检测从活体发射的γ射线并将其转换成闪光的闪烁晶体,以及第一GAPD光电传感器和第二GAPD光电传感器,每个连接到闪烁晶体的任一端 并将闪光灯转换成电信号; 以及反应深度确定单元,接收来自PET检测器单元的信号,并比较由第一GAPD光传感器和第二GAPD光传感器检测的信号的幅度,从而确定伽马射线入射到闪烁晶体上的位置(反应深度) 。 所公开的PET检测器模块可以提供高能量和高能量和反应深度数据,同时保持线性。
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