公开(公告)号：US20190279907A1

公开(公告)日：2019-09-12

申请号：US16082914

申请日：2017-11-08

Applicant: TDK CORPORATION

Inventor： Zhenyao TANG ,  Tomoyuki SASAKI

IPC: H01L21/8239 ,  H01L27/105 ,  G01R33/09 ,  H01L27/22 ,  H01L43/08 ,  H01L43/10

Abstract: A TMR element includes a magnetic tunnel junction, a side wall portion that covers a side surface of the magnetic tunnel junction, and a minute particle region that is disposed in the side wall portion. The side wall portion includes an insulation material. The minute particle region includes the insulation material and a plurality of minute magnetic metal particles that are dispersed in the insulation material. The minute particle region is electrically connected in parallel with the magnetic tunnel junction.

公开(公告)号：US20230354621A1

公开(公告)日：2023-11-02

申请号：US18344150

申请日：2023-06-29

Applicant: TDK CORPORATION

Inventor： Zhenyao TANG ,  Tomoyuki SASAKI

IPC: H10B99/00 ,  H10N50/10 ,  H01L27/105 ,  G01R33/09 ,  H10B61/00 ,  H10N50/85

CPC classification number: H10B99/00 ,  G01R33/093 ,  G01R33/098 ,  H01L27/105 ,  H10B61/22 ,  H10N50/10 ,  H10N50/85

Abstract: A TMR element includes a magnetic tunnel junction, a side wall portion that covers a side surface of the magnetic tunnel junction, and a minute particle region that is disposed in the side wall portion. The side wall portion includes an insulation material. The minute particle region includes the insulation material and a plurality of minute magnetic metal particles that are dispersed in the insulation material. The minute particle region is electrically connected in parallel with the magnetic tunnel junction.

公开(公告)号：US20220301935A1

公开(公告)日：2022-09-22

申请号：US17835458

申请日：2022-06-08

Applicant: TDK CORPORATION

Inventor： Zhenyao TANG ,  Tomoyuki SASAKI

IPC: H01L21/8239 ,  G01R33/09 ,  H01L27/105 ,  H01L27/22 ,  H01L43/08 ,  H01L43/10

Abstract: A TMR element includes a magnetic tunnel junction, a side wall portion that covers a side surface of the magnetic tunnel junction, and a minute particle region that is disposed in the side wall portion. The side wall portion includes an insulation material. The minute particle region includes the insulation material and a plurality of minute magnetic metal particles that are dispersed in the insulation material. The minute particle region is electrically connected in parallel with the magnetic tunnel junction.

公开(公告)号：US20190214549A1

公开(公告)日：2019-07-11

申请号：US16082913

申请日：2017-11-08

Applicant: TDK CORPORATION

Inventor： Zhenyao TANG ,  Tomoyuki SASAKI

IPC: H01L43/08 ,  H01L27/22 ,  G11C11/16

CPC classification number: H01L43/08 ,  G11C11/161 ,  H01L27/222 ,  H01L43/02 ,  H01L43/10

Abstract: A TMR element includes a magnetic tunnel junction, a side wall portion that is disposed on a side surface of the magnetic tunnel junction, a cap layer that covers a top surface of the magnetic tunnel junction and a surface of the side wall portion, and an upper electrode layer that is disposed on the cap layer. The cap layer includes an upper surface and a lower surface. The upper surface has a protruding shape that protrudes in a direction away from the magnetic tunnel junction in a first region which is positioned immediately above the top surface of the magnetic tunnel junction. The upper surface has a recess that is recessed in a direction toward the side wall portion in a second region which is positioned immediately above the surface of the side wall portion.