公开(公告)号：US20190207581A1

公开(公告)日：2019-07-04

申请号：US15857906

申请日：2017-12-29

Applicant: Texas Instruments Incorporated

Inventor： Ting-Ta Yen ,  Brian Goodlin ,  Ricky Alan Jackson ,  Nicholas Stephen Dellas

IPC: H03H9/02 ,  B81C1/00 ,  B81B7/00 ,  H03H3/007

CPC classification number: H03H9/02433 ,  B81B7/0016 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/012 ,  B81C1/0015 ,  B81C2203/0785 ,  H03H3/0073 ,  H03H9/02133 ,  H03H2009/0248

Abstract: In described examples of a micromechanical system (MEMS), a rigid cantilevered platform is formed on a base substrate. The cantilevered platform is anchored to the base substrate by only a single anchor point. A MEMS resonator is formed on the cantilevered platform.

公开(公告)号：US09503047B2

公开(公告)日：2016-11-22

申请号：US14692481

申请日：2015-04-21

Applicant: Texas Instruments Incorporated

Inventor： Stuart M. Jacobsen ,  Brian Goodlin

IPC: H03H9/17 ,  H01L41/08 ,  H01L41/047 ,  H03B28/00 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/17 ,  H01L41/047 ,  H01L41/0805 ,  H03B5/326 ,  H03B28/00 ,  H03B2200/0022 ,  H03H9/02055 ,  H03H9/131 ,  H03H9/175

Abstract: A bulk acoustic wave (BAW) resonator includes a substrate having a top side surface and a bottom side surface. A Bragg mirror is on the top side surface of the substrate. A bottom electrode layer is on the Bragg mirror, and a piezoelectric layer is on the bottom electrode layer. A top dielectric layer is on the piezoelectric layer, and a top electrode layer is on the top dielectric layer. The bottom side surface of the substrate has a surface roughness of at least 1 μm root mean square (RMS).

Abstract translation: 体声波（BAW）谐振器包括具有顶侧表面和底侧表面的基底。 布拉格反射镜位于基板的顶侧表面。 底部电极层位于布拉格反射镜上，压电层位于底部电极层上。 顶部电介质层位于压电层上，顶部电极层位于顶部电介质层上。 基板的底面具有至少1μm的均方根（RMS）的表面粗糙度。