DIFFERENTIAL MEASUREMENT OF IR ABSORPTION IN PLASMONIC MEMS SENSORS

    公开(公告)号:US20250076190A1

    公开(公告)日:2025-03-06

    申请号:US18950734

    申请日:2024-11-18

    Abstract: In some examples, an apparatus comprises a chopper, a first microelectromechanical system (MEMS) device, a second MEMS device, and a processing circuit. The chopper configured is to repeatedly switch states to enable and disable provision of a light signal. The first MEMS device is configured to provide first and second irradiance signals when the chopper is in, respectively, first and second states The second MEMS device is configured to provide first and second reference signals when the chopper is in, respectively, the first and second states. The processing circuit is configured to generate a first signal based on the first irradiance signal and the first reference signal, generate a second signal based on the second irradiance signal and the second reference signal, and provide a third signal at the processing output representing an irradiance measurement of the light source based on a difference between the first and second signals.

    PACKAGE FOR MILLIMETER WAVE MOLECULAR CLOCK

    公开(公告)号:US20220209779A1

    公开(公告)日:2022-06-30

    申请号:US17246300

    申请日:2021-04-30

    Abstract: In a described example, an apparatus includes: a package substrate having a device side surface and a board side surface opposite the device side surface; a physics cell mounted on the device side surface having a first end and a second end; a first opening extending through the package substrate and lined with a conductor, aligned with the first end; a second opening extending through the package substrate and lined with the conductor, aligned with the second end; a millimeter wave transmitter module on the board side, having a millimeter wave transfer structure including a transmission line coupled to an antenna aligned with the first opening; and a millimeter wave receiver module mounted on the board side surface of the package substrate and having a millimeter wave transfer structure including a transmission line coupled to an antenna for receiving millimeter wave signals, aligned with the second opening.

    DIFFERENTIAL MEASUREMENT OF IR ABORPTION IN PLASMONIC MEMS SENSORS

    公开(公告)号:US20210302308A1

    公开(公告)日:2021-09-30

    申请号:US17120339

    申请日:2020-12-14

    Abstract: A differential nondispersive infrared (NDIR) sensor incorporates an infrared (IR) chopper and multiple multi-bit digital registers to store and compare parameter ratio values, as may be digitally calibrated to corresponding temperature values, from chopper clock cycle portions in which a plasmonic MEMS detector is irradiated by the IR chopper with such values from chopper clock cycle portions in which the IR detector is not irradiated by the IR chopper. The plasmonic MEMS detector is referenced to a reference MEMS device via a parameter-ratio engine. The reference device can include a broadband IR reflector or can have a lower-absorption metasurface pattern giving it a lower quality factor than the plasmonic detector. The resultant enhancements to accuracy and precision of the NDIR sensor enable it to be used as a sub-parts-per-million gas concentration sensor or gas detector having laboratory, commercial, in-home, and battlefield applications.

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