Electrically erasable programmable non-volatile memory
    14.
    发明授权
    Electrically erasable programmable non-volatile memory 有权
    电可擦除可编程非易失性存储器

    公开(公告)号:US08546222B1

    公开(公告)日:2013-10-01

    申请号:US13899369

    申请日:2013-05-21

    Abstract: In an embodiment of the invention, a method of fabricating a floating-gate PMOSFET (p-type metal-oxide semiconductor field-effect transistor) is disclosed. A silicide blocking layer (e.g. oxide, nitride) is used not only to block areas from being silicided but to also form an insulator on top of a poly-silicon gate. The insulator along with a top electrode (control gate) forms a capacitor on top of the poly-silicon gate. The poly-silicon gate also serves at the bottom electrode of the capacitor. The capacitor can then be used to capacitively couple charge to the poly-silicon gate. Because the poly-silicon gate is surrounded by insulating material, the charge coupled to the poly-silicon gate may be stored for a long period of time after a programming operation.

    Abstract translation: 在本发明的实施例中,公开了制造浮栅PMOSFET(p型金属氧化物半导体场效应晶体管)的方法。 硅化物阻挡层(例如氧化物,氮化物)不仅用于阻挡不被硅化的区域,而且还在多晶硅栅极的顶部形成绝缘体。 绝缘体与顶部电极(控制栅极)一起形成在多晶硅栅极顶部的电容器。 多晶硅栅极还用于电容器的底部电极。 然后可以使用电容器将电荷电容耦合到多晶硅栅极。 由于多晶硅栅极被绝缘材料包围,所以耦合到多晶硅栅极的电荷可以在编程操作之后长时间存储。

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