公开(公告)号：US20240102830A1

公开(公告)日：2024-03-28

申请号：US18147396

申请日：2022-12-28

Applicant: Texas Instruments Incorporated

Inventor： Fuchao Wang ,  William French ,  Ricky A. Jackson ,  Erika Mazotti

IPC: G01D5/16 ,  G01D5/18 ,  G01R33/09

CPC classification number: G01D5/16 ,  G01D5/18 ,  G01R33/096

Abstract: Barrier layers for anisotropic magneto-resistive (AMR) sensors integrated with semiconductor circuits and methods of making the same are described. The AMR sensors includes a NiFe alloy layer disposed over a dielectric layer. The NiFe alloy layer is in contact with a conductive via coupled to the semiconductor circuits in a substrate underneath the AMR sensor. A barrier layer is formed on the dielectric layer to prevent Ni or Fe atoms from diffusing through the dielectric layer toward the semiconductor circuits. Further, a sacrificial layer is used to facilitate forming a planarized surface with ends of the conductive vias exposed without compromising the barrier layer.

公开(公告)号：US11294002B2

公开(公告)日：2022-04-05

申请号：US16918098

申请日：2020-07-01

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US10409227B2

公开(公告)日：2019-09-10

申请号：US15227929

申请日：2016-08-03

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G04F5/14 ,  G01R33/00 ,  G01R33/64

Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

公开(公告)号：US20180038921A1

公开(公告)日：2018-02-08

申请号：US15227929

申请日：2016-08-03

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N. Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G01R33/26 ,  H03L7/26 ,  G04F5/14

CPC classification number: G04F5/14 ,  G01R33/00 ,  G01R33/64

Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

公开(公告)号：US09606193B2

公开(公告)日：2017-03-28

申请号：US15171615

申请日：2016-06-02

Applicant: Texas Instruments Incorporated

Inventor： Anuraag Mohan ,  Dok Won Lee ,  William French ,  Erika L. Mazotti

IPC: H01L43/02 ,  H01L43/10 ,  H01L43/12 ,  G01R33/04 ,  G01R33/09 ,  H01L43/00 ,  H01L29/26

CPC classification number: G01R33/04 ,  G01R33/0052 ,  G01R33/09 ,  H01L29/26 ,  H01L43/00 ,  H01L43/02 ,  H01L43/10 ,  H01L43/12

Abstract: A method of fabricating fluxgate devices to measure the magnetic field in two orthogonal, in plane directions, by using a composite-anisotropic magnetic core structure.

公开(公告)号：US09383418B2

公开(公告)日：2016-07-05

申请号：US14286517

申请日：2014-05-23

Applicant: Texas Instruments Incorporated

Inventor： Anuraag Mohan ,  Dok Won Lee ,  William French ,  Erika L. Mazotti

IPC: H01L29/26 ,  G01R33/09 ,  H01L43/00 ,  H01L43/12 ,  G01R33/04

CPC classification number: G01R33/04 ,  G01R33/0052 ,  G01R33/09 ,  H01L29/26 ,  H01L43/00 ,  H01L43/02 ,  H01L43/10 ,  H01L43/12

Abstract: A method of fabricating fluxgate devices to measure the magnetic field in two orthogonal, in plane directions, by using a composite-anisotropic magnetic core structure.

Abstract translation: 一种通过使用复合各向异性磁芯结构制造磁通门装置来测量两个正交的，在平面方向上的磁场的方法。

公开(公告)号：US09153726B1

公开(公告)日：2015-10-06

申请号：US14249967

申请日：2014-04-10

Applicant: Texas Instruments Incorporated

Inventor： Ann Gabrys ,  Peter Hopper ,  William French

IPC: H01L31/02 ,  H01L31/0336 ,  H01L31/109 ,  H01L31/18

CPC classification number: H01L31/09 ,  G02B6/42

Abstract: A photodetector detects the absence or presence of light by detecting a change in the inductance of a coil. The magnetic field generated when a current flows through the coil passes through an electron-hole generation region. Charged particles in the electron-hole generation region come under the influence of the magnetic field, and generate eddy currents whose magnitudes depend on whether light is absent or present. The eddy currents generate a magnetic field that opposes the magnetic field generated by current flowing through the coil.

Abstract translation: 光电检测器通过检测线圈的电感的变化来检测光的存在或不存在。 当电流流过线圈时产生的磁场通过电子空穴产生区域。 电子空穴产生区域中的带电粒子受到磁场的影响，并产生大小取决于光不存在或存在的涡流。 涡流产生与由流过线圈的电流产生的磁场相反的磁场。

公开(公告)号：US10712401B2

公开(公告)日：2020-07-14

申请号：US15457669

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US10591872B2

公开(公告)日：2020-03-17

申请号：US15457608

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: H01L21/00 ,  G04F5/14 ,  H03L7/26

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

公开(公告)号：US10295488B2

公开(公告)日：2019-05-21

申请号：US14993073

申请日：2016-01-11

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Nathan Brockie ,  Terry Dyer ,  William French ,  Iouri N Mirgorodski

IPC: G01N25/02 ,  G04F5/14 ,  H03L7/26

Abstract: A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.