公开(公告)号：US20190033252A1

公开(公告)日：2019-01-31

申请号：US15661969

申请日：2017-07-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Yi-Hsien CHANG ,  Chin-Hua WEN ,  Chun-Ren CHENG ,  Shih-Fen HUANG ,  Tung-Tsun CHEN ,  Yu-Jie HUANG ,  Ching-Hui LIN ,  Sean CHENG ,  Hector CHANG

IPC: G01N27/414 ,  H01L41/08 ,  B01F13/00 ,  C12Q1/68 ,  G01N33/543 ,  B01L3/00

Abstract: A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.

公开(公告)号：US20160320335A1

公开(公告)日：2016-11-03

申请号：US14700133

申请日：2015-04-29

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Ta-Chuan LIAO ,  Chien-Kuo YANG ,  Yi-Shao LIU ,  Tung-Tsun CHEN ,  Chan-Ching LIN ,  Jui-Cheng HUANG ,  Felix Ying-Kit TSUI ,  Jing-Hwang YANG

IPC: G01N27/414

CPC classification number: G01N27/4145

Abstract: A biological device includes a substrate, a gate electrode, and a sensing well. The substrate includes a source region, a drain region, a channel region, a body region, and a sensing region. The channel region is disposed between the source region and the drain region. The sensing region is at least disposed between the channel region and the body region. The gate electrode is at least disposed on or above the channel region of the substrate. The sensing well is at least disposed adjacent to the sensing region.

Abstract translation: 生物装置包括衬底，栅电极和感测阱。 衬底包括源极区，漏极区，沟道区，体区和感测区。 沟道区域设置在源极区域和漏极区域之间。 感测区域至少设置在通道区域和身体区域之间。 栅电极至少设置在衬底的沟道区上或上。 感测井至少设置在感测区域附近。