公开(公告)号：US20250130198A1

公开(公告)日：2025-04-24

申请号：US19007330

申请日：2024-12-31

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun CHEN ,  Yi-Hsing HSIAO ,  Jui-Cheng HUANG ,  Yu-Jie HUANG

IPC: G01N27/414 ,  G01N33/569 ,  H01L21/762

Abstract: A method includes following steps. A beating pulse of a cardiac cell is monitored by using a biologically sensitive field-effect transistor (BioFET) disposed within a semiconductor substrate. A temperature around the cardiac cell is detected by using a temperature-sensing diode disposed within the semiconductor substrate. In response to the detected temperature falling below a predetermined threshold, the cardiac cell is heated by using a heater disposed within the semiconductor substrate. The cardiac cell is placed within a fluid containment region above the BioFET, and the temperature-sensing diode occupies a larger area within the fluid containment region than the heater.

公开(公告)号：US20240102959A1

公开(公告)日：2024-03-28

申请号：US18525583

申请日：2023-11-30

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun CHEN ,  Yi-Hsing HSIAO ,  Jui-Cheng HUANG ,  Yu-Jie HUANG

IPC: G01N27/414 ,  G01N33/569 ,  H01L21/762

CPC classification number: G01N27/4148 ,  G01N27/4145 ,  G01N33/56966 ,  H01L21/76251

Abstract: An IC structure includes a biologically sensitive field-effect transistor (BioBET) in a semiconductor substrate, and a dielectric layer over a backside surface of the semiconductor substrate. The dielectric layer has a sensing well extending through the dielectric layer to a channel region of the BioFET. The IC structure further includes a biosensing film, a plurality of fluid channel walls, and a first heater. The biosensing film lines the sensing well in the dielectric layer. The fluid channel walls are over the biosensing film and define a fluid containment region over the sensing well of the dielectric layer. The first heater is in the semiconductor substrate. The first heater has at least a portion overlapping with the fluid containment region.

公开(公告)号：US20180164246A1

公开(公告)日：2018-06-14

申请号：US15378794

申请日：2016-12-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tung-Tsun CHEN ,  Jui-Cheng HUANG ,  Kun-Lung CHEN ,  Cheng-Hsiang HSIEH

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  H01L27/1203

Abstract: An on-chip heater in a concentric rings configuration having non-uniform spacing between heating elements provides improved radial temperature uniformity and low power consumption compared to circular or square heating elements. On-chip heaters are suitable for integration and use with on-chip sensors that require tight temperature control.

公开(公告)号：US20220381729A1

公开(公告)日：2022-12-01

申请号：US17884382

申请日：2022-08-09

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun CHEN ,  Yi-Hsing HSIAO ,  Jui-Cheng HUANG ,  Yu-Jie HUANG

IPC: G01N27/414 ,  G01N33/569 ,  H01L21/762

Abstract: An IC includes a source region and a drain region in a semiconductor layer. A channel region is between the source region and the drain region. A sensing well is on a back surface of the semiconductor layer and over the channel region. An interconnect structure is on a front surface of the semiconductor layer opposite the back surface of the semiconductor layer. A biosensing film lines the sensing well and contacts a bottom surface of the sensing well that is defined by the semiconductor layer. A coating of selective binding agent is over the biosensing film and configured to bind with a cardiac cell.

公开(公告)号：US20210263022A1

公开(公告)日：2021-08-26

申请号：US17314825

申请日：2021-05-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Chin-Hua WEN ,  Tung-Tsun CHEN ,  Cheng-Hsiang HSIEH ,  Yu-Jie HUANG ,  Ching-Hui LIN

IPC: G01N33/543 ,  G01N27/416 ,  G01N27/414 ,  B01L3/00 ,  C12Q1/6837

Abstract: A fluidic cartridge and methods of operation are described. The fluidic cartridge includes a substrate having a plurality of contact pads designed to electrically couple with an analyzer, a semiconductor chip having a sensor array, and a reference electrode. The fluidic cartridge includes a first fluidic channel having an inlet and coupled to a second fluidic channel, the second fluidic channel being aligned such that the sensor array and the reference electrode are disposed within the second fluidic channel. A first plug is disposed at the first inlet. The first plug includes a compliant material configured to be punctured by a capillary without leaking fluid through the first plug.

公开(公告)号：US20220065812A1

公开(公告)日：2022-03-03

申请号：US17007973

申请日：2020-08-31

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun CHEN ,  Yi-Hsing HSIAO ,  Jui-Cheng HUANG ,  Yu-Jie HUANG

IPC: G01N27/414 ,  H01L21/762 ,  G01N33/569

Abstract: An IC includes a source region and a drain region in a semiconductor layer. A channel region is between the source region and the drain region. A sensing well is on a back surface of the semiconductor layer and over the channel region. An interconnect structure is on a front surface of the semiconductor layer opposite the back surface of the semiconductor layer. A biosensing film lines the sensing well and contacts a bottom surface of the sensing well that is defined by the semiconductor layer. A coating of selective binding agent is over the biosensing film and configured to bind with a cardiac cell.

公开(公告)号：US20170248536A1

公开(公告)日：2017-08-31

申请号：US15053906

申请日：2016-02-25

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun CHEN ,  Chia-Hua CHU ,  Jui-Cheng HUANG ,  Chun-Wen CHENG ,  Cheng-Hsiang HSIEH

IPC: G01N27/22

CPC classification number: G01N27/223 ,  G01N27/226

Abstract: A micro-electro mechanical system (MEMS) humidity sensor includes a first substrate, a second substrate and a sensing structure. The second substrate is substantially parallel to the first substrate. The sensing structure is between the first substrate and the second substrate, and bonded to a portion of the first substrate and a portion of the second substrate, in which the second substrate includes a conductive layer facing the sensing structure, and a first space between the first substrate and the sensing structure is communicated with or isolated from outside, and a second space between the conductive layer and the sensing structure is communicated with an atmosphere, and the sensing structure, the second space and the conductive layer constitute a capacitor configured to measure permittivity of the atmosphere, and humidity of the atmosphere is derived from the permittivity of the atmosphere, pressure of the atmosphere and temperature.

公开(公告)号：US20210116413A1

公开(公告)日：2021-04-22

申请号：US17135498

申请日：2020-12-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Yi-Hsien CHANG ,  Chin-Hua WEN ,  Chun-Ren CHENG ,  Shih-Fen HUANG ,  Tung-Tsun CHEN ,  Yu-Jie HUANG ,  Ching-Hui LIN ,  Sean CHENG ,  Hector CHANG

IPC: G01N27/414 ,  H01L41/09 ,  B01L3/00 ,  B01F11/02 ,  B01F13/00 ,  G01N33/543 ,  H01L41/08

Abstract: A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.

公开(公告)号：US20230375499A1

公开(公告)日：2023-11-23

申请号：US18228288

申请日：2023-07-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Ta-Chuan LIAO ,  Chien-Kuo YANG ,  Yi-Shao LIU ,  Tung-Tsun CHEN ,  Chan-Ching LIN ,  Jui-Cheng HUANG ,  Felix Ying-Kit TSUI ,  Jing-Hwang YANG

IPC: G01N27/414

CPC classification number: G01N27/4145

Abstract: A biological device includes a substrate, a gate electrode, and a sensing well. The substrate includes a source region, a drain region, a channel region, a body region, and a sensing region. The channel region is disposed between the source region and the drain region. The sensing region is at least disposed between the channel region and the body region. The gate electrode is at least disposed on or above the channel region of the substrate. The sensing well is at least disposed adjacent to the sensing region.

公开(公告)号：US20210109059A1

公开(公告)日：2021-04-15

申请号：US17107420

申请日：2020-11-30

Applicant: Taiwan Semiconductor manufacturing Co., Ltd.

Inventor： Tung-Tsun CHEN ,  Jui-Cheng Huang ,  Kun-Lung Chen ,  Cheng-Hsiang Hsieh

IPC: G01N27/414 ,  H01L27/12

Abstract: An on-chip heater in a concentric rings configuration having non-uniform spacing between heating elements provides improved radial temperature uniformity and low power consumption compared to circular or square heating elements. On-chip heaters are suitable for integration and use with on-chip sensors that require tight temperature control.